定位平台不論是應用在微操作、微手術或通訊模組與光纖間之耦合，其著眼的要求不外乎安全性、高精度、高速度、高潔淨度、低成本與多自由度。
本研究將提出一新型三自由度平行軸機構與三自由度串聯機構組合而成的六軸定位平台。首先將介紹此平台的設計概念，並選定線性馬達為致動器並配合楔形溝槽與球接頭作為運動機構，以進行平台的整機設計、零件加工與組裝。使原本只具旋轉運動的球接頭也兼具滑移運動。進而展現出簡單的結構、易加工製造及量測、簡化運動方程式、無奇異點的發生、沒有累積誤差及高精確度等優點。
平台的分析上，首先針對定位平台進行自由度分析，進而使用齊次轉換矩陣為工具進行定位平台之運動分析，以求得逆向運動解及順向運動解。再者針對平台的製造或組裝訂定誤差源，以探討誤差源對定位精度之影響，並建立補償模式。
最後將運動與補償分析的結果於三次元量床上進行量測的驗證，以確立分析的正確性。並進行光纖對位實例之模擬。以瞭解探討定位平台應用於尋光對位時的正確性與硬體可改善的空間，以利將此定位平台的應用技術推展到其他產業。

This paper presents the geometric error measurement and compensation of a six-degree-of-freedom (6-DOF) hybrid positioning stage consisting of a 3-DOF parallel kinematic mechanism and a 3-DOF serial mechanism. The parallel kinematic mechanism uses ball joints and wedge-shaped mechanisms to provide the required rotational and sliding movement. The advantages of this mechanism include a simple structure, easy assembly and zero accumulated linkage errors. The study commences by describing the kinematic mechanisms of the positioning stage, and then evaluates the degrees of freedom of the parallel kinematic mechanism. Subsequently, a homogeneous transformation matrix approach is employed to perform an inverse analysis of the kinematics of the entire positioning stage. The study then discusses the effects of geometric errors caused by imprecision in the manufacturing and assembly processes on the positional accuracy of the stage. Finally, a coordinate measuring machine is used to measure the translation and orientation errors of the positioning stage. By comparing the measured data with the values derived from the inverse kinematics analysis, an error compensation model is constructed.

1. T. Saito, T. Ota, T. Toratani and Y. Ono, “16-ch
Arrayed Waveguide Grating Module with 10