本文主要目的為運用快速光譜相關法建立一計算程式以分析多光束干涉所產生之等色階條紋。對稱式三層公式僅限用於對稱式三層多光束干涉架構，且薄膜厚度量測範圍限制於200nm以下；若使用快速光譜相關法則無上述之限制。
研究中以多層膜矩陣法模擬對稱式三層及非對稱式干涉下之等色階條紋，並利用快速光譜相關法分析可得在此兩種干涉子下其平均誤差百分比皆小於1%；另一方面，亦架設出對稱式三層及非對稱式干涉之實驗架構並根據實驗所得之等色階條紋來討論此兩種實驗之差異性，以拓展表面力分析儀之分析能力。

In this article, the main purpose is to establish a program based on fast spectral correlation method which can analyze the fringe of equal chromatic order (FECO) in multiple beam interferometry. The symmetrical three-layer formula only can be used in symmetrical three-layer multiple beam interferometry and have a limit of measurability of thin film thickness with 200nm. Fast spectral correlation method has no measurement restriction of thin film thickness and can be used in asymmetrical or symmetrical multi-layer interferometry.
In the research, I used fast spectral correlation method to analyze the simulated FECO images of symmetrical three-layer and asymmetrical types which is based on multilayer matrix method, and had an average error percentage less than 1% in analysis. On the other hand, I set up symmetrical three-layer and asymmetrical interferometry and compare the diversity according to the experimental FECO images. Finally, let the results in this article extend the measurement capability of the surface force apparatus.

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