摘 要

　　本文主要的研究目的為探索垂直氣壓缸受不同負載力時，控制器於定位精度的表現，改善垂直定位精度的穩定性及可靠性。本文使用模糊滑動模式控制器與負載補償器來控制在不同負載力下的垂直氣壓缸伺服定位控制系統，系統的負載力是藉著壓力閥控制來調變。由實驗結果可知，在各種不同的負載情況下，定位精度均可達100nm以內，並與傳統PID控制結果做比較，由此可證明模糊滑動模式控制器與負載補償器的可行性。並且修正系統無感區補償，增加垂直精密定位控制的穩定性及可靠性。

Abstract

　The objective of the thesis is to study the precision performance of positioning to the vertical pneumatic cylinder under vertical loading, and improve the stability and the reliability of the precision performance positioning. The fuzzy sliding mode controller with loading compensator is implemented in the microcomputer to control the position of the vertical pneumatic cylinder under vertical loading in the study. Regarding the simulation of loading force, it can be accomplished by controlling the pressure of the pneumatic proportional valve. From the experimental results, the system can still reach the positioning accuracy of 100 nm under different load conditions. Comparing with the result from PID controller, the feasibility of the fuzzy sliding mode controller and loading compensator can be demonstrated by the experiment. After modifying the compensator of the system dead-zone, the stability and the reliability of the precision positioning under vertical load can be improved.

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