| 研究生: |
陳漢珍 Chen, Han-Jan |
|---|---|
| 論文名稱: |
可積體化表面聲波帶拒濾波器之研製 An Integrable Surface Acoustic Wave Notch Filter |
| 指導教授: |
洪茂峰
Houng, Mau-Phon 王永和 Wang, Yeong-Her |
| 學位類別: |
碩士 Master |
| 系所名稱: |
電機資訊學院 - 微電子工程研究所 Institute of Microelectronics |
| 論文出版年: | 2002 |
| 畢業學年度: | 90 |
| 語文別: | 中文 |
| 論文頁數: | 86 |
| 中文關鍵詞: | 帶拒濾波器 、表面聲波 、交叉電極轉換器 、傳輸延遲線 |
| 外文關鍵詞: | Surface Acoustic Wave, Notch Filter, Delay Line, Interdigital Transducer |
| 相關次數: | 點閱:87 下載:9 |
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有鑑於傳統的帶拒濾波器(Notch Filter)不易積體化且功率消耗大,所以本論文之目的,則是以表面聲波為基礎來製作一表面聲波帶拒濾波器(Surface Acoustic Wave Notch Filter)。雖然過去已有些研究討論,但在其結構上往往需外加集總元件電阻R、電容C、電感L,而使元件結構呈現複雜化及不易於積體化。所以我們提出了一種簡單平面型的結構來實現表面聲波帶拒濾波器,使其具有較小尺寸和較輕重量的特性且易於積體化。吾人利用表面聲波的原理,設計交叉指狀電極轉換(Interdigital Transducer,IDT)與傳輸延遲線(Delay Line)耦合的電路結構,使其達成帶拒濾波器之特性。
以本文為例,則是以此結構採取指叉電極寬度為8μm,以半導體中的微影、曝光及蒸著(Evaporation)的製程技術,製作於128˚ rotated YX-cut Lithium Niobate(鈮酸鋰,LiNbO3)壓電材料基板上,其所呈現的中心頻率為 113.4 MHz 且3dB頻寬約為400 KHz(BW=0.36%)、插入損失(S21)約為 -10.583 dB 的帶拒濾波效果。
經由軟體Microwave Office模擬與製程結果比較發現,隨著IDTs之重疊長度、對數及傳輸延遲的改變,可調變濾波器之插入損失及頻寬,可應用於阻絕其它訊號的干擾。除此之外,更解決了傳統RLC濾波器之不易積體化、消耗功率等問題;且符合通訊元件低成本、製作容易、體積小的需求。
Although Surface Acoustic Wave Notch Filter was investigated in the past, the structures of these devices often needed the extra lumped-element : resistance R、capacitance C and inductance L so that the devices are complex and integrated hardly. From this, we offer a simple planar structure of the SAW notch filters that have smaller size and can be fabricated easily. It has several advantages such as easy-integrated; smaller size and no power dissipation. We adopt the interdigital transducers and delay line to fabricate the SAW notch filter. In this paper, we use an interdigital transducer finger width 8 mm with conventional photolithography process; lift-off technique; piezoelectric materials to fabricate on the 128° rotated YX-cut Lithium Niobate (LiNbO3). Finally, we get the frequency responses of the SAW notch filter: the center frequency 113.4 MHz; the 3dB bandwidth 0.36 %; the insertion loss S21= –10.583 dB.
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