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研究生: 陳漢珍
Chen, Han-Jan
論文名稱: 可積體化表面聲波帶拒濾波器之研製
An Integrable Surface Acoustic Wave Notch Filter
指導教授: 洪茂峰
Houng, Mau-Phon
王永和
Wang, Yeong-Her
學位類別: 碩士
Master
系所名稱: 電機資訊學院 - 微電子工程研究所
Institute of Microelectronics
論文出版年: 2002
畢業學年度: 90
語文別: 中文
論文頁數: 86
中文關鍵詞: 帶拒濾波器表面聲波交叉電極轉換器傳輸延遲線
外文關鍵詞: Surface Acoustic Wave, Notch Filter, Delay Line, Interdigital Transducer
相關次數: 點閱:87下載:9
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  • 有鑑於傳統的帶拒濾波器(Notch Filter)不易積體化且功率消耗大,所以本論文之目的,則是以表面聲波為基礎來製作一表面聲波帶拒濾波器(Surface Acoustic Wave Notch Filter)。雖然過去已有些研究討論,但在其結構上往往需外加集總元件電阻R、電容C、電感L,而使元件結構呈現複雜化及不易於積體化。所以我們提出了一種簡單平面型的結構來實現表面聲波帶拒濾波器,使其具有較小尺寸和較輕重量的特性且易於積體化。吾人利用表面聲波的原理,設計交叉指狀電極轉換(Interdigital Transducer,IDT)與傳輸延遲線(Delay Line)耦合的電路結構,使其達成帶拒濾波器之特性。
    以本文為例,則是以此結構採取指叉電極寬度為8μm,以半導體中的微影、曝光及蒸著(Evaporation)的製程技術,製作於128˚ rotated YX-cut Lithium Niobate(鈮酸鋰,LiNbO3)壓電材料基板上,其所呈現的中心頻率為 113.4 MHz 且3dB頻寬約為400 KHz(BW=0.36%)、插入損失(S21)約為 -10.583 dB 的帶拒濾波效果。
    經由軟體Microwave Office模擬與製程結果比較發現,隨著IDTs之重疊長度、對數及傳輸延遲的改變,可調變濾波器之插入損失及頻寬,可應用於阻絕其它訊號的干擾。除此之外,更解決了傳統RLC濾波器之不易積體化、消耗功率等問題;且符合通訊元件低成本、製作容易、體積小的需求。

    Although Surface Acoustic Wave Notch Filter was investigated in the past, the structures of these devices often needed the extra lumped-element : resistance R、capacitance C and inductance L so that the devices are complex and integrated hardly. From this, we offer a simple planar structure of the SAW notch filters that have smaller size and can be fabricated easily. It has several advantages such as easy-integrated; smaller size and no power dissipation. We adopt the interdigital transducers and delay line to fabricate the SAW notch filter. In this paper, we use an interdigital transducer finger width 8 mm with conventional photolithography process; lift-off technique; piezoelectric materials to fabricate on the 128° rotated YX-cut Lithium Niobate (LiNbO3). Finally, we get the frequency responses of the SAW notch filter: the center frequency 113.4 MHz; the 3dB bandwidth 0.36 %; the insertion loss S21= –10.583 dB.

    中文摘要 英文摘要 目錄 圖表目錄 目錄 第一章 緒論 1-1 研究背景……………………..…………………………………...1-1 1-2 研究動機……………………..…………………………………...1-2 附圖….…………………………………………………………...1-5 第二章 原理 2-1 表面聲波 2-1-1 基本理論……………………………….....………..…………2-1 2-1-2 特性因數………………………………………….……….2-2 2-2 表面聲波帶拒濾波器 2-2-1 基本原理…………………………………………..………2-7 2-2-2 等效電路…………………………………………….…….2-8 2-2-3 等效電路之分析…………………………………………2-12 2-2-4 元件模擬………………………………………..………..2-15 2-3 RLC帶拒濾波器………………………………………..……….2-16 表與附圖……………………………………………...…………2-18 第三章 實驗過程 3-1光罩及基板選擇…………………………………………………...3-1 3-2元件製程……………………………………………………….…..3-1 3-3元件之量測…………………………………….…………………..3-4 附圖………………………………………………………………...3-5 第四章 結果與討論 4-1 製程結果……………………………………………………...…..4-1 4-2 製程結果與模擬之討論分析…………………………….………4-1 4-3 表面聲波元件之二次效應…………………….…………………4-7 附圖………………………………………………………………4-9 第五章 結論 參考文獻

    參考文獻

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