兆赫波具有比紅外光低的光子能量，可與分子間作用力匹配，兆赫波感測技術則是具潛力且尚未發展完整的一項光學感測方法，其中又以微量分子感測最具挑戰性，以目前兆赫波時域頻譜系統而言，樣品重量至少達數百個微克才能辨識，或是樣品厚度與兆赫波的作用長度太短等限制，為解決此問題，此論文發展一種新型複合式的兆赫電漿人造結構，並實現其穿透消逝波在近場之微量感測技術。此複合式電漿人造結構是整合奈米導電層於立體網狀介質基板而成，與電漿波導、平面金屬孔洞電漿結構相比較，此奈米導電層可以高效率地調變週期結構的表面兆赫波，展現極明顯的頻譜特徵於穿透率峰值-低值頻率。此研究也指出，該頻譜低值頻率與孔洞寬與導電率相關，其中孔洞寬度90 m與單面鋁金屬層之導電率達到0.1 MS/cm等條件，具備光學感測應用的價值，尤其可以克服目前兆赫波在微量感測方面的窘境，此論文在微量感測原理方面也成功展示：分析模型、模型驗證、模型使用方法、以及待測樣品條件等，預估此感測結果在厚度與折射率之精準度可以分別低於10 %與2 %。

Terahertz photonic energy is considerably lower than that of infrared ray, approximately matching to the energy of intermolecular force. Terahertz wave sensing technology is one potential optical sensing method but not explored yet. Especially, the sening performance of minute smaple is difficult to achieve based on terahertz time-domain spectroscopy because the detectable sample amounts should be sufficient with several hundreds of micrograms or thicknesses approximating terashertz wavelength. The research experimentally resolves the limitation of THz wave sensing on minute samples based on one hybrid plasmonic structure. The hybrid terahertz plasmonic structure constructed by one conductive layer with nanometers of thickness on a dielectric mesh substrate. In contrast to terahertz plasmonic waveguides and plasmonic structures of metal-hole-array, such the hybrid plasmonic structure efficiently modulates terahertz surface waves on the metal structures with distinctly high visibility between spectral peaks and dips. The research results express that those spectral dips correlate to the structural pore widths and surface conductivity, and the critical paramters are derived in the experiments, including the mesh pore width of 90 m, metal coating of aluminum metal layer with single-side integration, and the conductivity higher than 0.1 MS/cm. The aluminum mesh layer thus works as one useful optical sensor and overcomes the restriction of minute sening in THz frequency region. The minue sening performance is presented based on the evanescent wave sensing model and discussed in the definition, experimental confirmation and opearation method of the model, which successfully approaches the detection precision about 10 % and 2 %, respectively, on the thickness and refractive index.

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