本研究致力於脈衝雷射加工系統應用於石墨材料立體雕刻成形模擬與影像輔助加工系統之開發，並分析雷射斜角加工時輪廓成形之趨勢。並且設計一加工平台輔助實驗。
數值計算研究利用雷射能量密度計算靶材表面的溫升情形，由汽化蒸氣密度推算材料去除深度，建立一計算模型模擬雷射多脈衝加工石墨靶材的成型過程，並引入斜向角度與重疊比率兩參數來討論其輪廓趨勢。並以近場繞射理論分析鑽孔內繞射能量分布情形，提出鑽孔輪廓將受繞射影響。實驗將脈衝雷射整合三軸數控平台與分光鏡及CCD影像系統，形成加工與同步影像觀測系統，藉由步進馬達控制進行橫向加工，實驗結果使用影像分析軟體將加工結果取樣量化，並與模擬結果進行形貌分析與比較，印證材料去除模型，分析輪廓成形趨勢與現象。
實驗結果顯示計算模型有一定準確度，輪廓計算誤差隨著角度提升而降低，但是在特定重疊比率的輪廓計算明顯失真。而不同重疊比率影響的加工深度關係也未在實驗中有明顯的趨勢，以及在0度平面加工時加工趨勢反向的現象在實驗結果與討論中以文獻說明計算結果與實驗誤差的原因。

The aim of this research is to analyze the laser engraving contour and its relations with the controlling parameters such as overlap ratio, inclination angle and the absorption coefficient of substrate. A theoretical model was applied to simulate the hole contour with the key factors to affect the engraving profile. The experimental results were compared with the simulations, and it shows that the theoretical model is in a good agreement with the experimental results.
The simulation is based on the theoretical model developed previously. The laser energy distribution was calculated and modified with the engraving depth. By combining the absorption and material removal effects on the inclined surface, the engraving profiles were simulated for a graphite substrate.
The experiment was carried out by using a pulsed Nd-YAG laser and graphite substrate. An optical fiber was connected to a beam splitter with a focusing lens and a CCD camera. A CNC platform was used to achieve micro step engraving in 3D coordinates.
The theoretical model is well developed to analyze the three dimensional laser engraving contour with an acceptable accuracy in the present study. The laser engraving system developed in the research shows that it can be used to engrave material at high precision. Both experiment and simulation results show the overlap ratio and the inclination angle are the key factors to the 3D engraving contours.

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