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研究生： 林子平
Lin, Tzu-Ping
論文名稱： 以感應耦合電漿系統成長類鑽碳奈米複合薄膜
Deposition of Diamond-Like Carbon Nanocomposite Films by Inductively-Coupled-Plasma System
指導教授： 吳季珍
Wu, Jih-Jen
學位類別： 碩士
Master
系所名稱： 工學院 - 化學工程學系
Department of Chemical Engineering
論文出版年： 2002
畢業學年度： 90
語文別： 中文
論文頁數： 105
中文關鍵詞： 複合薄膜 、奈米粒子 、類鑽碳
外文關鍵詞： nanoparticle, nanocomposite, DLC
相關次數： 點閱：69  下載：5 
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    • 類鑽碳薄膜具有與鑽石相近的性質，如高硬度、低摩擦係數、表面平滑、高熱傳導度、耐化學腐蝕等優良性質，所以常應用於磨耗、機械性質等方面。
    由於類鑽碳膜的成長機制與鍍膜離子之能量有關，因此常有著內應力太大的問題。所以要成長品質良好的類鑽碳膜並不容易。在本研究中，利用HMDSN、HMDSO、HMDS為成長源，以感應耦合式電漿進行解離，並以脈衝式的基板偏壓獨立控制鍍膜離子的入射能量，以沉積類鑽碳奈米複合薄膜。
    在分析方面，主要利用掃瞄式電子顯微鏡進行膜厚分析，X光光電子儀進行表面鍵結分析，拉曼光譜進行結構性質分析，並利用穿隧式電子顯微鏡進行微結構分析，並利用接觸角來進行表面能的分析，與使用UV-Vis光譜做為光學能隙的分析。
    由穿隧式電子顯微鏡的分析，利用HMDSN、HMDSO與HMDS為成長源所沉積的類鑽碳膜，可以發現膜中均包含著奈米粒子。由於使用的成長源組成不同，所包含的奈米粒子也不相同。其組成藉由能量分散光譜儀進行定性分析，並由擇區電子繞射圖分析其結晶狀態，以獲得奈米粒子的結構。
    由分析的結果顯示：以含有Si-C-N、Si-C-O與Si-C成份的有機金屬化合物做為成長源，所沉積的類鑽碳奈米複合膜，可以沉積較厚的膜厚，同時其表面能遠小於利用CH4成長的類鑽碳膜，使得其表面呈現親水特性。

    Diamond-Like Carbon (DLC) films that are like diamond exhibit excellent characteristics, such as high hardness, low friction coefficient, smooth surface, high heat conductivity, and chemical erosion resistivity. It is always applied on wear, mechanic properties etc.
    According to the growth mechanism of DLC, the ion energy influences the properties of film. So, DLC films have high compressive stress. Therefore, it is difficult to deposit high quality DLC films. In this study, we used hexamethyldisilazane (HMDSN), hexamethyldisiloxane (HMDSO), and hexamethyldisilane (HMDS) as carbon source, that ionized by inductively-coupled-plasma (ICP). Pulsed substrate bias independently controlled the incident energy of ions.
    For analysis, we use scanning electron microscopy (SEM) and X-ray photoemission spectroscopy (XPS) to measure film thickness and bonding energy, respectively. Raman spectroscopy was used to characterize the structure and the microstructure was analyzed by tunneling electron microscope (TEM). The surface tension was measured by contact angle and optical band-gap was analyzed by UV-Vis spectroscopy.
    From analysis of TEM, it shows that nanoparticles are imbedded in DLC films depositing by HMDSN, HMDSO and HMDS. The nanoparticles are varied with different source. The composition of nanoparticles was analyzed by electron dispersive spectroscopy (EDS), and structure was characterized by selected area diffraction (SAD) pattern.
    The results of analysis show that DLC nanocomposite films can be useful to deposit thicker films by organometallic compounds like Si-C-N, Si-C-O and Si-C. Its surface energy is less than DLC films depositing by CH4, and shows hydrophilic feature.

    中文摘要..............................Ⅰ 英文摘要..............................Ⅱ 誌謝..................................Ⅲ 目錄..................................Ⅳ 表目錄................................Ⅶ 圖目錄................................Ⅷ 第一章 緒論............................1 1-1 前言...............................1 1-2 奈米材料之特性與及其應用...........2 1-3 奈米材料的製作技術.................5 1-4 複合材料之特性.....................6 1-5 研究背景與目的.....................7 第二章 理論基礎.......................11 2-1 電漿化學..........................11 2-2 離子被覆..........................18 2-2-1 離子被覆系統簡介................18 2-2-2 離子轟擊效應....................19 2-3 感應耦合式電漿輔助離子蒸鍍系統法..21 2-3-1 高密度電漿......................21 2-3-2 ICP產生原理.....................22 2-4 類鑽碳膜..........................24 2-4-1 類鑽碳膜之組成..................24 2-4-2 類鑽碳膜之成長機制..............28 2-4-3 類鑽碳改質膜....................32 2-5 分析儀器之原理....................34 2-5-1 拉曼光譜儀......................34 2-5-1~1 拉曼光譜於類鑽碳上的應用......36 2-5-2 化學分析電子光譜儀..............40 2-5-3 掃瞄式電子顯微鏡................41 2-5-4 穿隧式電子顯微鏡................43 2-5-5 接觸角儀........................44 第三章 實驗參數與研究方法.............46 3-1 實驗流程..........................46 3-2 實驗裝置..........................47 3-2-1 電漿產生裝置....................48 3-2-2 基板座裝置......................49 3-2-2~1 基板座之設計與冷卻系統........49 3-2-2~2 基板溫度量測系統..............49 3-2-2~3 基板偏壓裝置..................49 3-2-3 真空及抽氣系統..................51 3-2-3~1 抽氣系統......................51 3-2-3~2 壓力檢測系統..................51 3-2-4 反應氣體輸送裝置................52 3-3 實驗材料..........................53 3-3-1 實驗氣體........................53 3-3-2 基板材料........................54 3-4 實驗操作..........................55 3-4-1 基板前處理......................55 3-4-2 實驗操作步驟....................55 3-4-2~1 清理基板......................55 3-4-2~2 奈米複合材料的沈積............56 3-5 分析與鑑定........................57 3-5-1 表面型態觀察....................57 3-5-2 薄膜品質分析....................57 3-5-3 薄膜組成及鍵結型態分析..........57 3-5-4 微結構穿隧式電子顯微鏡分析......58 3-5-5 接觸角與表面能分析..............58 第四章 結果與討論.....................59 4-1 結構分析..........................60 4-1-1 膜厚分析........................60 4-1-2 拉曼分析........................64 4-1-3 鍵結分析........................72 4-1-3~1 HMDSN的ESCA鍵結分析...........72 4-1-3~2 HMDSO的ESCA鍵結分析...........72 4-1-3~3 HMDS的ESCA鍵結分..............73 4-1-4 穿隧電子顯微鏡分析..............80 4-2 表面能分析........................87 4-3 光學能隙分析......................90 第五章 結論...........................96 第六章 參考文獻.......................98 自述.................................105

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