本研究採用非平衡磁控濺鍍法，利用漸進層的方式，於高速鋼底材上鍍一層鎢碳薄膜，並探討此鍍膜於熱處理前後的磨潤性質、機械性質與切削性質。實驗主要分為三階段：第一階段以甲烷當做碳源，分析不同甲烷流量時對於鍍膜性質的影響；第二階段會加入碳靶當做不同的碳源，分析其對鍍膜的變化；第三階段探討鍍膜於不同溫度(500℃和600℃)持溫一小時後，對其性質的影響。最後選用較佳的鍍膜進行乾車削與印刷電路板微鑽針試驗，以瞭解實際上鍍膜披覆刀具在工業上的應用。
實驗結果得知，甲烷流量越高，鍍膜的硬度也越高，當甲烷流量達到10 sccm時，鍍層硬度最高，奈米硬度可達28.7 GPa(荷重為10mN)，微硬度Hk0.25為2630，使用甲烷流量6 sccm的鍍層磨耗性質最佳，不過鍍膜的附著性也會隨著甲烷的增加而變差。在加入碳靶之後，鍍膜的硬度會降低，但能改善其附著性與磨耗性。經過500℃和600℃持溫一小時的熱處理後，鍍膜硬度會大幅下降，且容易剝落，表示W-C系列的鍍膜不適合熱處理。由實際的切削結果得知，當甲烷流量為6 sccm且添加碳靶的鍍層能夠有效降低車刀及鑽針磨耗量，與未鍍膜前的刀具相比，車刀刀腹磨耗量降低了59 %，微鑽針刀角磨耗量降低了56 %。

The W-C coatings were deposited on the high speed substrate with progressive approach by closed field unbalanced magnetron sputtering system, The mechanical and tribological properties and cutting performance of this coating before and after heat treatment were explored. This experiment was divided into three stages. In first stage, methane was used as carbon source, the coating properties with different methane flow rate were analyzed. In second stage, a carbon target was added as another carbon source, to study the influence of carbon source on coating. In third stage will discuss the mechanical and tribological properties of these coatings after one-hour heat treatment in different temperature (500℃and 600℃). Finally, we will choose the optimal coating to deposit on cutting tools and micro-drills to test under actual machining.
The results show that the hardness increases with increasing methane flow rate. The hardest coating at the nano hardness of 28.7 GPa and the micro hardness of Hk0.25 2630 were performed by the coating which use the methane flow rate is 10 sccm, the best wear resistance were performed by the coating which use the methane flow rate is 6 sccm. But the adhesion of coating is poor with increasing methane flow rate. After adding the carbon target, the coatings hardness will become lower, but it can improve the adhesion and wear resistance. The hardness and tribological properties of W-C coatings decreased after 500℃and 600℃ one-hour heat treatment.
In turning and micro-drilling tests, the coating use 6 sccm methane flow rate and carbon target deposited on cutting tools and micro-drills can be reduced the wear rate about 59 % and 56 %, respectively.

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