本研究以直流電漿火炬於常壓下，以矽烷有機物(HMDSO, Hexamethyldisiloxane)為前驅物，生產二氧化矽奈米粉體。利用成核輔助粒子分離(Nucleation-assisted process for the removal of fine aerosol particles)的方式，結合傳統的濾布式收集袋，提升粉體與氣體的分離效率。藉由控制前驅物流率、電漿氣體組成及驟冷氣體的冷卻速率，達到調整產物粒子一次粒徑、二次粒徑及表面特性的目的。並以TEM、DLS、FT-IR與XRD分析產物粒子一次粒徑粒徑、外觀形貌以及團聚情形、化學組成及結晶成度。透過調整電漿中氧氣的比例，可控制粒子表面的親疏水特性，並成功生產出疏水與親水的二氧化矽奈米粒子，其一次粒徑分別介於8.0- 14.0 nm與7.4- 14.3 nm之間；二次粒徑分別介於195- 260 nm與135- 198 nm之間。將粉體的冷卻速率提升20%可以使粒子一次粒徑降低75%以及二次粒徑降低8%。利用成核輔助粒子分離的方式，粉體收集效率可達70%，產率可達75 g/ hr。本研究所產之二氧化矽奈米粉體的成本為11.7 NT/ g。

In this study, hexamethyldisiloxane (HMDSO) was used to produce hydrophobic and hydrophilic silica nanoparticles in an atmospheric DC plasma reactor.The hydrophilicity of produced particles can be controlled by varying the molar ratio of oxygen and HMDSO in the reactor. Nucleation-assisted process for removing fine aerosol particles was used to enhance the collection efficiency of the filter. The resulting nanoparticles were characterized for their morphology, size and chemical composition. Transmission electron microscopy, dynamic laser scattering and FT-IR techniques were used to characterize and to measure the mean diameter, agglomerate size and functional groups of the resulting nanopowders, respectively.
The mean particle size of hydrophobic and hydrophilic silica nanoparticles produced at the exit (filter) were between 8.0- 14.0 nm and 7.4- 14.3 nm, respectively while the agglomerates were of much larger size, between 195- 260 nm and 135- 198 nm, respectively. 20% increment of cooling rate leads to a decrease of the mean particles size and agglomerate size by 75% and 8%, respectively. The collection efficiency was improved to 70% by employing the nucleation-assisted process and the collected particles were all redispersible. The production rate of silica nanoparticles is 75 g/hr and the cost of produced particles is 11.7 NT/ g.

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