本研究探討的主題是利用雷射輔助化學氣相沉積系統進行矽薄膜沉積，比較在雷射輔助化學氣相反應下，矽薄膜性質是否有結構上的改變。本研究詳盡地探討在不同雷射功率輔助下，化學氣相沉積系統所沉積的矽薄膜於結晶特性以及鍵結特性上造成的差異，並以穿透式電子顯微鏡，實際觀察到結晶顆粒的存在。最後將沉積的矽薄膜應用到薄膜太陽電池上，最後進行轉換特性比較。

This research is on the laser assist PECVD deposited silicon film. And the change of silicon film structure was investigated. This research was discussing the crystalline and bond structure affected by different laser power density in detail. And the crystal grain was observed by transmission electron microscope. As to application, the high absorption of amorphous silicon film made itself possible to meet the solar cell demand. On the other side, amorphous silicon would degrade at a longer term luminance. Therefore, the laser assisted PECVD deposited silicon film could supply a better quality of silicon thin film as the active layer to overcome this weakness. The research is toward the goal. And the transformation efficiencies were compared finally.

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