本實驗利用離子源解離乙炔氣體，形成碳氫離子，再利用磁場引導碳氫離子轟擊基板，使碳在基板上成長含氫類鑽碳薄膜。主要目的是探討離子源參數對於含氫類鑽碳鍍層之影響，期望能夠使碳解離率上升，並利用離子束使碳離子具有方向性，使底材更有效率的成長DLC鍍層，並且在無添加中介層情況下達到高附著性之目的，使鍍層兼具高硬度與抗磨耗的性能。首先以Raman及XRD分析鍍層組織，EDS分析薄膜化學成分。再以微小硬度機、奈米壓痕試驗、刮痕試驗機、SRV磨耗實驗對含氫類鑽碳鍍層基本機械性質、附著性及磨耗機構加以研究。最後再進一步利用實際低碳鋼車削探討其磨潤行為。
利用田口方法分析實驗結果發現，Bias底材偏壓對鍍層硬度貢獻率最大，適當的偏壓能夠使鍍層形成較接近鑽石結構。貢獻率第二的是離子束陽極電壓，評估結果通以適當的陽極電壓能夠使鍍層行成較緻密的sp3。而較遠的工作距離能夠使鍍膜均勻成長，使附著性提升。分析結果最佳組合為Lv驗證爐次，基板偏壓為90V、離子束陽極電壓為1KV、乙炔流量為30sccm、工作距離為15公分。
在實際車削實驗中發現，鍍層於車削磨耗試驗中皆無良好的表現，a-C:H鍍層並不能有效的保護車刀使其耐磨耗性增強原因在於車削試驗時類鑽碳鍍層在高溫下容易與車削中碳鋼材發生黏附現象，原因是鐵碳親合力較高導致刀口積屑，刀口積屑將會造成車削試驗結果不佳。

The diamond-like carbon (DLC) was coated with Ion beam source assistance PVD. To achieve this, we adopt a acetylene as the precursor. In this experiment we evaluated the tribological properties of DLC coating with the Taguchi methods L9 orthogonal Array. We deposited hydrogenated diamond-like carbon (a-C:H) films onto high speed steel, tungsten carbide specimens. The effects of various experiment parameter of the Ion beam source were investigated. The cross-section morphology was observed by field emission scanning electron microscopy (FE-SEM). With the increase of the hot tungsten filament current, the deposition rate of the coating increases. Raman spectroscopy and X-ray diffraction (XRD) were employed to analyze the microstructure properties of the coatings. The Nano-indentation tester was used to measure the mechanical properties.
Furthermore, the tribological tests were achieved through the Schwingung Reibung and Verschliess (SRV) reciprocating friction tester, the tests were conducted with no lubricant. The verify experiment Lv DLC coating appears to have a lowest I(D)/I(G) ratio, which was analyzed by Raman spectroscopy. After SRV tribological test we verify that the coating Lv in the verify experiment has good wear resistance and high nano-hardness. At the appropriate substrate bias, Ion beam source anode voltage and the working distance, the microstructure properties of the DLC coating and the tribological properties of the coating can be improved, the life time of the coating also promoted.

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