本文係設計一新型雙楔型反射鏡並應用於雙掃描系統，改變目前微型投影模組之反射鏡皆為平面反射鏡的狀況。雙楔型反射鏡掃描系統包含雙楔型微鏡面結構與薄型壓電元件，其中雙楔型鏡面結構是以LIGA-like製程及蔓延式電鑄技術製作完成，具有快、慢兩組扭轉軸與左右對稱的雙楔型鏡面，搭配薄型壓電元件，使雙楔型鏡面做同步連動形成雙2D掃描運動行為，以應用於同步顯示兩個掃描畫面之功能。在楔型鏡面的部分，本文改變電鑄製程中的起始層，利用被鍍金屬等向性蔓延的現象，並設計獨立的電極區塊，使電鑄過程逐步形成楔型鏡面。由實驗結果證實，楔型反射鏡可應用於雙掃描模組，且鏡面傾斜角與其表面線性擬合程度可透過電極區塊的寬度與間距控制。本論文研製雙楔型反射鏡元件未來可廣泛的應用於微型投影裝置。

This paper presents an wedge-shaped micromirror plate for dual screen scanning system (DSSS), reforming the current status of micro-projection module mirrors, which are using the flat mirror. The DSSS is composed of dual wedge-shaped micromirror structure, a pair of fast axes and slow axes, and slender piezoelectric element, and both micromirrors have synchronously scanning motion. Dual wedge-shaped mirror structure is fabricated by the LIGA-like process and the spread-type electroforming technology. In order to fabricate wedge-shaped micromirror, we have changed the initial layer in the electroforming process and designed independent electrode layout utilizing the anisotropic spread of the electrodeposition.The experimental results demonstrated that the wedge-shaped reflector can be applied to the dual-scan module. The mirror sloping angle and linear fitting factor of the structure surface can be adjusted by the electrode width and spacing. In this research, the development of the dual wedge-shaped mirror elements can be widely used in micro-projection devices.

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