| 研究生: |
賴柏衛 Lai, Po-Wei |
|---|---|
| 論文名稱: |
Bi2Se3拓樸絕緣體薄膜之低溫磁傳輸特性研究 Low-Temperature Magnetotransport Properties of Bi2Se3 Topological Insulator Thin Films |
| 指導教授: |
王書瑋
Wang, Shu-Wei |
| 學位類別: |
碩士 Master |
| 系所名稱: |
電機資訊學院 - 微電子工程研究所 Institute of Microelectronics Engineering |
| 論文出版年: | 2026 |
| 畢業學年度: | 114 |
| 語文別: | 中文 |
| 論文頁數: | 71 |
| 中文關鍵詞: | 硒化鉍 、拓樸絕緣體 、變溫磁傳輸 、弱反局域化 、相位相干長度 |
| 外文關鍵詞: | Bi2Se3, topological insulator, magnetotransport, weak antilocalization, phase coherence length |
| 相關次數: | 點閱:101 下載:1 |
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本研究利用分子束磊晶(Molecular Beam Epitaxy, MBE)技術,於藍寶石(Al₂O₃)基板上成長厚度為 4 nm 與 8 nm 的硒化鉍(Bi₂Se₃)拓樸絕緣體薄膜,並進行 10–300 K 變溫磁傳輸量測,以分析其縱向電阻、霍爾效應、載子濃度、霍爾遷移率及弱反局域化特性。
量測結果顯示,兩種厚度樣品皆呈現 n 型傳輸,片載子濃度皆位於 10¹³ cm⁻² 數量級,未隨厚度呈現明顯變化。8 nm 樣品於各溫度下的霍爾遷移率皆高於 4 nm 樣品,約為其 1.8 至 2.1 倍,顯示較薄薄膜可能受到較強的表面、界面及缺陷散射影響。此外,兩種樣品的縱向電阻皆隨溫度升高而增加,呈現金屬型傳輸行為。
4 nm 樣品於低磁場下呈現明顯的弱反局域化特徵。經 Hikami–Larkin–Nagaoka(HLN)模型擬合,10 K 時 α 約為 −0.481,相位相干長度約為 145.3 nm,且隨溫度升高,相位相干長度逐漸縮短,弱反局域化效應亦隨之減弱。8 nm 樣品因縱向電阻訊號具有較明顯的不規則起伏,因此未進行 HLN 擬合。
綜合而言,Bi₂Se₃ 的薄膜厚度可能對載子遷移率具有明顯影響,研究結果可作為後續探討其厚度效應與表面態傳輸特性的參考
This study investigates the temperature-dependent magnetotransport properties of 4 nm and 8 nm Bi₂Se₃ topological insulator thin films. The films were grown on sapphire substrates by molecular beam epitaxy and fabricated into Hall-bar devices. Magnetotransport measurements were performed from 10 to 300 K with the magnetic field perpendicular to the film surface.
Both samples exhibited n-type transport, with sheet carrier concentrations on the order of 10¹³ cm⁻² and no clear thickness dependence. The Hall mobility of the 8 nm sample was approximately 1.8–2.1 times higher than that of the 4 nm sample, suggesting stronger surface, interface, and defect scattering in the thinner film. Both samples showed metallic transport behavior, as the longitudinal resistance increased with temperature.
The 4 nm sample exhibited a clear weak antilocalization feature at low magnetic fields. Hikami–Larkin–Nagaoka fitting yielded an α value of approximately −0.481 and a phase coherence length of 145.3 nm at 10 K. The phase coherence length and weak antilocalization effect decreased with increasing temperature. The 8 nm sample was not fitted because of irregular fluctuations in the longitudinal resistance signal.
These results suggest that film thickness may influence carrier mobility and low-temperature quantum transport in Bi₂Se₃ thin films.
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