簡易檢索 / 詳目顯示

研究生: 賴柏衛
Lai, Po-Wei
論文名稱: Bi2Se3拓樸絕緣體薄膜之低溫磁傳輸特性研究
Low-Temperature Magnetotransport Properties of Bi2Se3 Topological Insulator Thin Films
指導教授: 王書瑋
Wang, Shu-Wei
學位類別: 碩士
Master
系所名稱: 電機資訊學院 - 微電子工程研究所
Institute of Microelectronics Engineering
論文出版年: 2026
畢業學年度: 114
語文別: 中文
論文頁數: 71
中文關鍵詞: 硒化鉍 、拓樸絕緣體 、變溫磁傳輸 、弱反局域化 、相位相干長度
外文關鍵詞: Bi2Se3, topological insulator, magnetotransport, weak antilocalization, phase coherence length
相關次數: 點閱:101  下載:1 
分享至:
查詢本校圖書館目錄 查詢臺灣博碩士論文知識加值系統 勘誤回報
  • 本研究利用分子束磊晶(Molecular Beam Epitaxy, MBE)技術,於藍寶石(Al₂O₃)基板上成長厚度為 4 nm 與 8 nm 的硒化鉍(Bi₂Se₃)拓樸絕緣體薄膜,並進行 10–300 K 變溫磁傳輸量測,以分析其縱向電阻、霍爾效應、載子濃度、霍爾遷移率及弱反局域化特性。

    量測結果顯示,兩種厚度樣品皆呈現 n 型傳輸,片載子濃度皆位於 10¹³ cm⁻² 數量級,未隨厚度呈現明顯變化。8 nm 樣品於各溫度下的霍爾遷移率皆高於 4 nm 樣品,約為其 1.8 至 2.1 倍,顯示較薄薄膜可能受到較強的表面、界面及缺陷散射影響。此外,兩種樣品的縱向電阻皆隨溫度升高而增加,呈現金屬型傳輸行為。

    4 nm 樣品於低磁場下呈現明顯的弱反局域化特徵。經 Hikami–Larkin–Nagaoka(HLN)模型擬合,10 K 時 α 約為 −0.481,相位相干長度約為 145.3 nm,且隨溫度升高,相位相干長度逐漸縮短,弱反局域化效應亦隨之減弱。8 nm 樣品因縱向電阻訊號具有較明顯的不規則起伏,因此未進行 HLN 擬合。

    綜合而言,Bi₂Se₃ 的薄膜厚度可能對載子遷移率具有明顯影響,研究結果可作為後續探討其厚度效應與表面態傳輸特性的參考

    This study investigates the temperature-dependent magnetotransport properties of 4 nm and 8 nm Bi₂Se₃ topological insulator thin films. The films were grown on sapphire substrates by molecular beam epitaxy and fabricated into Hall-bar devices. Magnetotransport measurements were performed from 10 to 300 K with the magnetic field perpendicular to the film surface.
    Both samples exhibited n-type transport, with sheet carrier concentrations on the order of 10¹³ cm⁻² and no clear thickness dependence. The Hall mobility of the 8 nm sample was approximately 1.8–2.1 times higher than that of the 4 nm sample, suggesting stronger surface, interface, and defect scattering in the thinner film. Both samples showed metallic transport behavior, as the longitudinal resistance increased with temperature.
    The 4 nm sample exhibited a clear weak antilocalization feature at low magnetic fields. Hikami–Larkin–Nagaoka fitting yielded an α value of approximately −0.481 and a phase coherence length of 145.3 nm at 10 K. The phase coherence length and weak antilocalization effect decreased with increasing temperature. The 8 nm sample was not fitted because of irregular fluctuations in the longitudinal resistance signal.
    These results suggest that film thickness may influence carrier mobility and low-temperature quantum transport in Bi₂Se₃ thin films.

    摘要 i SUMMARY ii INTRODUCTION iii MATERIALS AND METHODS v RESULTS AND DISCUSSION vii CONCLUSION ix 誌謝 xi 目錄 xii 表目錄 xiv 圖目錄 xv 第一章 緒論 1 1-1. 前言 1 1-2. 文獻回顧 2 1-3. 研究動機 6 第二章 實驗相關理論 7 2-1. 電子傳輸機制 7 2-2. 相位相干(Phase Coherence) 9 2-3. 弱局域化與弱反局域化(Weak Localization & Weak Antilocalization) 11 2-4. Hikami-Larkin-Nagaoka formula (HLN) 公式 13 2-5. 霍爾效應(Hall Effect) 15 2-6. 磁阻效應(Magnetoresistance, MR) 18 2-7. 對稱化及反對稱化 19 第三章 實驗製備與量測架構 21 3-1. Bi2Se3樣品製備方法 21 3-2. 樣品製備方法介紹 22 3-2.1 分子束磊晶法(Molecular Beam Epitaxy, MBE) 22 3-2.2 清洗樣品 22 3-2.3 光阻塗佈 23 3-2.4 曝光及顯影 24 3-2.5 蝕刻(Etching) 25 3-2.6 光阻塗佈 27 3-2.7 曝光及顯影 27 3-2.8 蒸鍍(Evaporation) 28 3-2.9 舉離(Lift off) 29 3-3. 量測架構 31 第四章 量測結果與討論 33 4-1. 4 nm與8 nm Bi2Se3之電阻溫度特性 33 4-1.1 零磁場縱向電阻Rxx (T) 33 4-2. 4 nm 與 8 nm Bi2Se3之磁傳輸量測結果 34 4-2.1 4 nm Bi2Se3 之縱向電阻 Rxx (B) 34 4-2.2 8 nm Bi2Se3 之縱向電阻 Rxx (B) 36 4-2.3 4 nm與8 nm Bi2Se3 之霍爾電阻 Rxy (B) 37 4-3. 霍爾效應與載子傳輸特性 39 4-3.1 片載子濃度之溫度依賴性 39 4-3.2 遷移率之溫度依賴性 41 4-4. 4 nm Bi2Se3 之磁阻比 43 4-5. 4 nm Bi2Se3 之弱反局域化效應與 HLN 擬合分析 44 第五章 結論 48 5-1. 結論 48 參考文獻 50

    [1] K. von Klitzing, G. Dorda, and M. Pepper, "New Method for High-Accuracy Determination of the Fine-Structure Constant Based on Quantized Hall Resistance," Phys. Rev. Lett., vol. 45, pp. 494–497, 1980.

    [2] D. J. Thouless, M. Kohmoto, M. P. Nightingale, and M. den Nijs, "Quantized Hall Conductance in a Two-Dimensional Periodic Potential," Phys. Rev. Lett., vol. 49, pp. 405–408, 1982.

    [3] C. L. Kane and E. J. Mele, "Z₂ Topological Order and the Quantum Spin Hall Effect," Phys. Rev. Lett., vol. 95, 146802, 2005.

    [4] B. A. Bernevig, T. L. Hughes, and S.-C. Zhang, "Quantum Spin Hall Effect and Topological Phase Transition in HgTe Quantum Wells," Science, vol. 314, pp. 1757–1761, 2006.

    [5] M. König et al., "Quantum Spin Hall Insulator State in HgTe Quantum Wells," Science, vol. 318, pp. 766–770, 2007.

    [6] H. Zhang et al., "Topological Insulators in Bi₂Se₃, Bi₂Te₃ and Sb₂Te₃ with a Single Dirac Cone on the Surface," Nature Physics, vol. 5, pp. 438–442, 2009.

    [7] Y. Xia et al., "Observation of a Large-Gap Topological-Insulator Class with a Single Dirac Cone on the Surface," Nature Physics, vol. 5, pp. 398–402, 2009.

    [8] R. J. Cava et al., “Crystal structure and chemistry of topological insulators,” Journal of Materials Chemistry C, 2013.

    [9] D. Kong et al., “Few-Layer Nanoplates of Bi₂Se₃ and Bi₂Te₃ with Highly Tunable Chemical Potential,” Nano Letters, 2010.

    [10] M. Brahlek et al., “Surface versus bulk state in topological insulator Bi₂Se₃ under environmental disorder,” Applied Physics Letters, vol. 99, 012109, 2011.

    [11] Y. Zhang et al., “Crossover of the three-dimensional topological insulator Bi₂Se₃ to the two-dimensional limit,” Nature Physics, vol. 6, pp. 584–588, 2010.

    [12] P. Drude, "Zur Elektronentheorie der Metalle," Annalen der Physik, vol. 306, no. 3, pp. 566–613, 1900.

    [13] S. Datta, Electronic Transport in Mesoscopic Systems, Cambridge University Press, 1995.

    [14] Y. Imry, Introduction to Mesoscopic Physics, Oxford University Press, 2002.

    [15] G. Bergmann, “Weak localization in thin films: a time-of-flight experiment with conduction electrons,” Physics Reports, vol. 107, no. 1, pp. 1–58, 1984.

    [16] S. Hikami, A. I. Larkin, and Y. Nagaoka, “Spin–Orbit Interaction and Magnetoresistance in the Two Dimensional Random System,” Progress of Theoretical Physics, vol. 63, no. 2, pp. 707–710, 1980.

    [17] P. A. Lee and T. V. Ramakrishnan, “Disordered electronic systems,” Reviews of Modern Physics, vol. 57, no. 2, pp. 287–337, 1985.

    [18] H.-Z. Lu and S.-Q. Shen, “Weak localization and weak anti-localization in topological insulators,” Proceedings of SPIE, vol. 9167, 91672E, 2014.

    [19] S. Hikami, A. I. Larkin, and Y. Nagaoka, “Spin-Orbit Interaction and Magnetoresistance in the Two Dimensional Random System,” Progress of Theoretical Physics, vol. 63, no. 2, pp. 707–710, 1980.

    [20] Gautam, S., Aggarwal, V., Singh, B., et al., “Signature of weak-antilocalization in sputtered topological insulator Bi₂Se₃ thin films with varying thickness,” Sci. Rep., 12, 9770, 2022.

    [21] E. H. Hall, "On a New Action of the Magnet on Electric Currents," American Journal of Mathematics, vol. 2, no. 3, pp. 287–292, 1879.

    [22] N. S. Nair, S. Wirth, S. Friedemann, F. Steglich, Q. Si, and A. J. Schofield, "Hall effect in heavy fermion metals," Advances in Physics, vol. 61, no. 5, pp. 583–664, 2012.

    [23] Y. Jing, S. Huang, K. Zhang, J. Wu, Y. Guo, H. Peng, Z. Liu, and H. Q. Xu, “Weak antilocalization and electron–electron interaction in coupled multiple-channel transport in a Bi2Se3 thin film,” Nanoscale, vol. 8, pp. 1879–1885, 2016.

    [24] B. Yang et al., “Electrostatically controlled spin polarization in graphene/Cr₂Ge₂Te₆ van der Waals heterostructures,” Nature Communications, 2024.

    [25] E. Zimmermann et al., “Fourier transformation based analysis routine for intermixed longitudinal and transversal hysteretic data for the example of a magnetic topological insulator,” Journal of Physics: Materials, vol. 7, no. 1, 015015, 2024.

    [26] R. J. Nicholas, K. Takashina, M. Lakrimi, B. Kardynal, S. Khym, N. J. Mason, D. M. Symons, D. K. Maude, and J. C. Portal, “Metal-insulator oscillations in a two-dimensional electron-hole system,” Physical Review Letters, vol. 85, no. 11, pp. 2364–2367, 2000.

    [27] W. J. Wang, K. H. Gao, and Z. Q. Li, “Thickness-Dependent Transport Channels in Topological Insulator Bi₂Se₃ Thin Films Grown by Magnetron Sputtering,” Scientific Reports, vol. 6, 25291, 2016.

    [28] D. Kim, Q. Li, P. Syers, N. P. Butch, J. Paglione, S. Das Sarma, and M. S. Fuhrer, “Intrinsic Electron-Phonon Resistivity of Bi₂Se₃ in the Topological Regime,” Physical Review Letters, vol. 109, Art. no. 166801, 2012.

    [29] Y. S. Kim et al., “Thickness-dependent bulk properties and weak anti-localization effect in topological insulator Bi₂Se₃,” Physical Review B, vol. 84, Art. no. 073109, 2011.

    [30] J. Chen et al., “Tunable Surface Conductivity in Bi₂Se₃ Revealed in Diffusive Electron Transport,” Physical Review B, 83, 241304(R), 2011.

    [31] H. Steinberg, J.-B. Laloë, V. Fatemi, J. S. Moodera, and P. Jarillo-Herrero, “Electrically Tunable Surface-to-Bulk Coherent Coupling in Topological Insulator Thin Films,” Physical Review B, 84, 233101, 2011.

    [32] I. Garate and L. Glazman, “Weak Localization and Antilocalization in Topological Insulator Thin Films with Coherent Bulk–Surface Coupling,” Physical Review B, 86, 035422 , 2012.

    [33] Y. Kumar et al., “Thickness-dependent magneto-transport of Bi₂Se₃/SiO₂ topological insulator thin films,” Journal of Materials Science: Materials in Electronics, vol. 33, pp. 18726–18733, 2022.

    [34] Wang, W., Gao, K. & Li, Z. Thickness-dependent transport channels in topological insulator Bi2Se3 thin films grown by magnetron sputtering. Sci Rep 6, 25291, 2016.

    [35] J. Barzola-Quiquia et al., “Topological insulator thin films starting from the amorphous phase—Bi₂Se₃ as example,” J. Appl. Phys. 117, 075301, 2015.

    下載圖示
    校外:立即公開
    QR CODE