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研究生: 鄭景鴻
Cheng, Ching-Hung
論文名稱: 雷射熔蝕生成奈米金屬粒子之研究
The formation of nano-scale metallic particles in laser ablation
指導教授: 林震銘
Lin, Jehnming
學位類別: 碩士
Master
系所名稱: 工學院 - 機械工程學系
Department of Mechanical Engineering
論文出版年: 2006
畢業學年度: 94
語文別: 中文
論文頁數: 95
中文關鍵詞: 奈米粒子雷射熔蝕
外文關鍵詞: laser ablation, nanoparticle
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  • 摘要
      本文研究目的是以雷射熔蝕生成奈米鎳微粒,並且針對不同流場特性對於奈米鎳微粒的成核成長現象以數值分析及實驗進行研究並進一步的進行分析與比較。在理論分析方面使用計算流體力學軟體FLUENT計算在真空腔中的流場特性及速度分佈,在奈米微粒成長理論是使用考慮粒子碰撞重熔行為的金屬蒸氣冷凝及單體分子濃度的平衡關係式、成核率方程式以及相關的奈米粒子成長尺寸的計算模型。並使用有限差分法將奈米微粒成長理論中的數學模型離散並撰寫Fortran程式語言以求得生成粒子過程中的粒徑變化,最後將真空腔中計算所得之流場速度分佈代入到奈米微粒成長理論的計算中以瞭解流場特性對於生成粒徑及粒子成長機制的影響。在實驗部份則是採用Q-switch Nd-YAG雷射在真空腔體中對鎳金屬靶材加熱並將生成的金屬蒸氣使用氬氣予以冷凝並使用試片於予以收集並進行掃描式電子顯微鏡(Scanning Electron Microscope)分析。在文中可以得到雷射熔蝕生成奈米鎳微粒時粒徑的變化,並且探討流場特性及不同參數下所造成的影響。在本文中可以提出對於使用雷射熔蝕生成奈米鎳微粒完整的噴流理論分析並以實驗相互印證以作為日後從事生成奈米粒子相關研究的重要依據。

    Abstract
     In this study the synthesis of metallic nanoparticles by evaporation is generated by a pulse laser irradiated on a metallic target with a rapid condensation in an inert jet flow condenser. In the simulation analysis of local ablation phenomenon in gas plume, which was induced by laser ablation, small particles with narrow distributions were expected in the experiment. The over-heated vapor may become the plasma and it will affect the particle generation significantly. This study is going to apply the computational fluid dynamics(CFD), numerical analysis to simulate the condensation process of the metallic particles under laser irradiating, in order to understand the formation mechanism of the nanoparticles for broader applications to the mass production. The flow analysis is used to investigate the process design in macroscopic and microscopic views respectively to predict the flow characteristics in the laser ablation and condensation for nanoparticle formation.

    目 錄 中文摘要……………………………………………………………… I 英文摘要……………………………………………………………… II 誌謝…………………………………………………………………… III 目錄…………………………………………………………………… IV 表目錄………………………………………………………………… VIII 圖目錄………………………………………………………………… IX 符號說明……………………………………………………………… XI 第一章 緒論………………………………………………… 1 1-1 研究背景及目的……………………………………………. 1 1-2 問題描述及研究方法………………………………………. 4 1-3 文獻回顧……………………………………………………. 5 1-4 本文架構……………………………………………………. 9 第二章 數值分析理論……………………………………… 10 2-1自由噴流概述……………………………………………….. 11 2-1.1中心線速度分佈方程式………………………………... 11 2-2數值計算流場方程式……………………………………….. 14 2-2.1基本假設………………………………………………... 14 2-2.2紊流方程式……………………………………………... 15 2-3 計算流體力學軟體FLUENT………………………………. 18 2-3.1 數值方法……………………………………………….. 18 2-4奈米鎳微粒成長理論……………………………………….. 21 2-4.1 成核冷凝及單體分子濃度間的平衡方程式…..……… 21 2-4.2 微粒數變化率方程式…………………..…………..….. 24 2-4.3 預測奈米鎳微粒生成尺寸方程式……….…………..... 26 2-5 程式計算流程……...……………..……………………..….. 28 第三章 數值分析結果……………………………………… 29 3-1 流場分析……………………………...…………..………… 29 3-1.1物理條件及數值計算範圍……………………………... 29 3-1.2數值計算模型之建立…………………………………... 30 3-1.2.1二維軸對稱模型…………………………………… 30 3-1.2.2流場計算條件及邊界設定………………………… 32 3-1.3中心線流場壓力變化…………………………………... 34 3-1.4中心線流場速度變化…………………………………... 34 3-1.5中心線速度解析解與數值解比較……………………... 35 3-1.6圓管噴流效應…………………………………………... 37 3-1.6.1物理條件及邊界條件設定………………………… 37 3-1.6.2計算結果………………………...…………………. 37 3-1.6噴流流場分析…………………………………………... 39 3-2奈米鎳微粒生成粒徑分析………………………………….. 42 3-2.1數值計算範圍與基本假設………….………………….. 42 3-2.2粒徑分析…………………………….………………….. 42 3-2.3奈米鎳微粒單體分子數、體積及粒子數隨位置之變化. 46 3-2.4碰撞重熔效應對於生成奈米鎳微粒粒徑之影響….….. 49 3-2.5溫度效應對於生成奈米鎳微粒之影響………………... 52 3-2.6不同流場位置對於生成粒徑之影響…………………... 55 3-2.7不同入口速度對於生成粒徑之影響…………………... 56 3-3 結果與討論………………………………..………………... 58 第四章 實驗……………………………………..………………...…. 60 4-1奈米鎳微粒生成實驗………………...……...……………… 60 4-1.1實驗方法………………………….…………………….. 60 4-1.2實驗設備與配置……...……………………..………...... 62 4-1.3實驗步驟…………………………...………………..….. 63 4-1.4 SEM試片之製作…………………………...…….…….. 64 4-1.5電子顯微鏡分析……………….………..…………....… 65 4-1.6實驗結果………………………….…………….……..... 67 4-1.6.1低倍率電子顯微鏡分析…………………………… 68 4-1.6.2高倍率電子顯微鏡分析…………………………… 71 4-1.6.3生成奈米鎳微粒粒徑與數量變化關係…………… 75 4-1.7數值模擬與實驗結果比較……………..……..……...… 76 4-2結果及討論……………………………..…………..………. 77 第五章 綜合討論與建議……………………………...………..……. 79 5-1綜合討論……………………………..…………………….... 79 5-2相關建議及未來發展……………………………..……….... 82 參考文獻………………………………………………………...……. 83 附錄A……………………………………………………...…………. 86 附錄B…………………….………………………………...…………. 88 自述…………………………………………………...………………. 95

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