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研究生： 王昭富
Wang, Chao-Fu
論文名稱： 水熱合成法之單晶石英成長研究與數值分析
Experimental And Numerical Studies On Quartz Crystal Growth By Using Hydrothermal Synthesis
指導教授： 趙隆山
Chao, Long-Sun
學位類別： 碩士
Master
系所名稱： 工學院 - 工程科學系碩士在職專班
Department of Engineering Science (on the job class)
論文出版年： 2005
畢業學年度： 93
語文別： 中文
論文頁數： 106
中文關鍵詞： 水熱合成法、單晶石英、長晶爐
外文關鍵詞： Quartz, Hydrothermal Synthesis, Autoclave
相關次數： 點閱：62  下載：19 
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    • 　　本文主要探討水熱合成法之單晶石英成長，設計與製作一小型高壓長晶爐來進行石英長晶實驗，以分析控制參數對長晶速度的影響，並使用ANSYS計算軟體進行應力、熱應力的分析，從分析結果可知長晶爐的耐壓能力及可操作的溫度、壓力範圍，並且可作為製作長晶爐之設計與製程條件設定的參考。在製程分析上，針對影響石英生長速率的各項可能參數，以只調整單一參數的方法進行實驗。從實驗結果中求出長晶爐在爐內平均溫度為367.7 ℃時，充填度與壓力的關係式。長晶過程中，各項參數對長晶速率的影響，從實驗數據顯示，在實驗參數的設定範圍內，當壓力越高、長晶爐上、下溫差越大、溶液濃度越高及晶種表面積越小，都可增加成長速率，其中溫度差和長晶速度呈線性關係。本研究最後以FIDAP軟體進行長晶爐溫度場及流場的分析，得知長晶時的爐體溫度分佈及爐內鹼性溶液流場的情形，可以更準確地了解晶體長晶之溫度環境，並可做為爐體、保溫設計、控制方法及各項參數調整的參考。

    　For the single-crystal growth of quartz by using hydrothermal synthesis, this work deigned and made a small-scale equipment to study the effects of the control parameters on the growth rate of quartz crystal experimentally. ANSYS software was used to analyze the stress fields caused by internal high pressure and thermal effect. From the computing results, the highest operating pressure and temperature of the crystal-growth vessel can be obtained. From the experimental results based on the average vessel temperature of 367.7℃, the relationship between the volume fraction of alkaline solution and internal pressure was derived. The experimental data reveals that the higher growth rate can result from the higher pressure, the larger temperature difference of the growth and dissolution regions, the higher liquid concentration or the smaller surface area of crystal seed. Furthermore, the growth rate is linearly related to the temperature difference. Finally, the temperature and flow fields of the equipment were simulated by FIDAP software. The computing results could give the more realistic temperature distribution of the vessel and alkaline solution, which is an important reference for the design of heating and insulated systems, and the control of working parameters.

    摘要.......................................................................................................... I Abstract.................................................................................................... Ⅱ 誌謝.......................................................................................................... Ⅲ 目錄......................................................................................................... IV 表目錄...................................................................................................... VII 圖目錄...................................................................................................... IX 第一章 導論........................................................................................... 1 1-1 前言.............................................................................................. 1 1-2 文獻回顧..................................................................................... 2 1-3 水熱合成法生長單晶石英的原理及製程簡介......................... 4 1-3-1 晶體生長原理..................................................................... 4 1-3-2 人工水晶工業量產的製程................................................. 8 1-4 研究目的..................................................................................... 10 第二章 實驗設備與方法....................................................................... 11 2-1 實驗設備................................................................................... 11 2-1-1 長晶爐主體結構製作......................................................... 11 2-1-2 長晶爐加熱保溫測溫系統製作........................................ 17 2-1-3 長晶爐爐內附件製作........................................................ 19 2-1-4 控制系統............................................................................ 22 2-2 實驗方法.................................................................................... 28 2-2-1 原料選用及製作................................................................ 28 2-2-2 溶液的調配與充填量計算................................................ 30 2-2-3 實驗步驟............................................................................ 32 2-2-4 長晶實驗相關的相片........................................................ 34 第三章 長晶爐數值模擬分析............................................................... 38 3-1 應力分析的理論模式................................................................ 38 3-2 熱傳導及對流的理論模式......................................................... 40 第四章 結果與討論................................................................................. 43 4-1 實驗結果與討論......................................................................... 43 4-1-1 長晶實驗投產資料及計算數據.......................................... 43 4-1-2 實驗爐性能測試及參數調整過程...................................... 46 4-1-3 充填度與壓力的關係.......................................................... 51 4-1-4 壓力對長晶速度的影響...................................................... 53 4-1-5 溫差對長晶速度的影響...................................................... 55 4-1-6 溶液濃度對長晶速度的影響.............................................. 56 4-1-7 表面積對長晶速度的影響.................................................. 58 4-1-8 溶解區溫度對長晶速度的影響.......................................... 59 4-2 ANSYS應力分析結果與討論................................................... 61 4-2-1 應力分析結果……………………...................................... 61 4-2-2 不同型式的Element Type之比較與收斂性分析.............. 66 4-2-3 水壓試驗及長晶爐的最高使用壓力分析.......................... 68 4-3 長晶爐的熱傳導和爐內熱對流的分析結果............................. 70 第五章 結論............................................................................................. 74 參考文獻................................................................................................. 76 附錄A 單晶石英製程參數、晶體檢驗及工程管理............................ 80 A-1 影響長晶品質的製程參數........................................................ 81 A-2 石英晶體的檢驗........................................................................ 85 A-3 人工水晶品質管理的方法......................................................... 92 附錄B (Ansys 程式碼) ...................................................................... 95 B-1 結構應力分析程式.................................................................... 95 B-2 熱分佈及熱應力分析程式........................................................ 98 B-3 組合應力分析程式...................................................................... 102 自述.......................................................................................................... 106

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