近年來奈米材料的研究進行的如火如荼，而奈米壓痕試驗系統也成為量測奈米材料之很重要的工具。本文利用兩種不同大小的圓球形探針來進行奈米壓痕試驗，探討以不同的基底劑與固化劑重量比聚合之聚二甲基矽氧烷(Polydimethysiloxane，PDMS)試體在不同頻率下量測的簡諧接觸勁度、簡諧接觸阻尼、儲能模數與消能模數，同時探討利用此系統量測表面黏著能之可行性；根據JKR黏著接觸理論可知表面黏著能的量測可由最大拉拔力計算而得，本文由奈米壓痕實驗找出聚二甲基矽氧烷(PDMS)之最大拉拔力，並計算不同配比PDMS試體之表面黏著能。

In recent years, the materials at nanometer scale have been widely studied. Nano-indentation also becomes a very important tool for testing materials’ properties at nanometer scales. This thesis uses two spherical indenters of different radii in the nano-indentation of PDMS (Polydimethysiloxane) samples, which were made by several base/curing agent ratios. The data of harmonic contact stiffness, harmonic contact damping, storage modulus and loss modulus of the PDMS samples were collected at different frequencies in the test. We also discovered the possibility of measuring the adhesive property of PDMS by nano-indentation. According to JKR theory, the work of adhesion can be obtained by the maximum pull-off force in the experiment. We found the pull-off forces in the nano-indentation and calculated the work of adhesion of different PDMS samples.

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