本研究主要目標為設計一創新之往覆式微馬達，利用感應馬達
的驅動方式應用於微陀螺儀之驅動，以提升微陀儀的解析度等性能表
現。同時改良三維微型電磁極的製作流程，提出新式U 型微線圈，
期望達到減少光罩曝光次數、提升良率及簡化製造難度等目標。接著
藉由電磁場專用之有限元素分析軟體Ansoft Maxwell，分析微馬達與
微線圈的系統特性，並改良各項設計參數以提升其性能表現。另外，
本文也建立了微轉子系統之數學模型，並利用查找表(Look-up Table)
達到初步的轉盤與軸承之防撞控制。最後，透過簡單的電子元件進行
實體驅動電路之實作，驗證了所設計的驅動電路之可行性。

The proposed novel micro-motor is composed of the U-type
three-dimensional micro-electro-magnetic poles(MEM poles), which are innovative with respect to the weakly-magnetic micro-planar coils and traditional micro three-dimensional coils, the rotating disc and bearings are relatively simpler and lower-cost for batch fabrication. To investigate the characteristics of the micro-motor and 3D-MEM poles, FEM software , Ansoft Maxwell, for electro-magnetic analysis is employed. The mathematic model of the micro-motor and look-up table are used to prevent collision by the rotating disc against bearings. The driving circuit is designed and verified by experiments. Finally, the
fabrication process technique for the three-dimensional MEM poles is proposed. The experiments illustrate that the performance of three-dimensional MEM poles is superior, compared with the traditional.

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