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研究生: 黃鋒文
Huang, Feng-wen
論文名稱: 非極性氮化銦鎵/氮化鎵材料與元件光電特性之探討
Characterization of non-polar InGaN/GaN optoelectronic devices
指導教授: 許進恭
Sheu, J-k
學位類別: 碩士
Master
系所名稱: 理學院 - 光電科學與工程研究所
Institute of Electro-Optical Science and Engineering
論文出版年: 2008
畢業學年度: 96
語文別: 中文
論文頁數: 120
中文關鍵詞: 極化光放射與吸收極化選擇律非極性氮化銦鎵
外文關鍵詞: polarization selection rules, nonpolar InGaN, polarization of light emission and absorption
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  • 本論文為成長在非極性氮化鎵銦/氮化鎵之材料之光電元件極化光放射與吸收非等向光學特性之探討,利用極化光光功率偵測系統與極化光電激發光光譜量測系統(polarized electroluminescence),來研究成長在極性與非極性平面之發光二極體之正向發光與側向發光的極化光偏振性質 ; 在吸收方面,則利用極化光光響應量測系統來研究成長在極性與非極性平面之光偵測元件之正向吸收的極化光光響應特性。由極化光放射、吸收量測系統之量測結果可知,成長在極性平面的氮化鎵銦/氮化鎵材料之側向發光、成長在非極性平面的氮化鎵銦/氮化鎵材料之正向發光與正向吸收,其具有極化光的放射與吸收之光學非等向特性。此外,可藉由非等向性應力的調變與結構設計使得元件具有顯著的極化光放射與吸收之特性。

    This thesis aims at the research and fabrication of optical polarization anisotropy characteristics of light emission and absorption of optoelectronic devices fabricated on nonpolar A-plane InGaN/GaN materials. The optical polarization of light emission from the top surface and sidewall of the A- and C-plane InGaN/GaN multiple-quantum-well light-emitting diodes were investigated by measurement of polarized light power detection system and polarized electroluminescence. For the polarization of light absorption of photodetectors, the optical polarization of light absorption from the top surface of the polar C-plane and nonpolar A-plane GaN photodetectors were investigated by measurement of the responsivities for polarization detection system. The measurement of polarized light emission and absorption detection systems showed the optical polarization anisotropy characteristics of light emission from sidewall of the polar C-plane and nonpolar A-plane InGaN/GaN multiple-quantum-well light-emitting diodes, and light absorption from the top surface of the nonpolar A-plane GaN photodetectors. Furthermore, the polarization anisotropy characteristics of light emission and absorption can be enhanced by the modification of anisotropic strain and the device structure design.

    目 錄 摘 要 I Abstract II 致 謝 III 圖 目 錄 VI 第一章 緒論 1 1.1前言 1 1.2 研究背景與動機 3 參考文獻 6 第二章 理論背景與文獻 9 2.1氮化鎵材料 9 2.2能帶結構與能隙 13 2.3發光二極體原理 15 2.4光的偏振性質與polarizer 18 2.5金半接面之蕭基能障原理 27 2.6光偵測器原理 32 2.7氮化銦鎵/氮化鎵系列材料之極化光放射與吸收之機制與影響因素 44 參考文獻 55 第三章 實驗方法 63 3.1 元件的製備與結構 63 3.2 元件光學特性分析 73 3.3極化光學特性量測裝置與量測方式 78 第四章 結果與分析討論 81 4.1 C-plane LED正向之極化光放射量測與分析 81 4.2 C-plane LED側向之極化光放射量測與分析 85 4.3 A-plane LED正向之極化光放射量測與分析 90 4.4 C-plane光偵測元件正向之極化光吸收量測與分析 95 4.5 A-plane光偵測元件正向之極化光吸收量測與分析 104 第五章 結論與未來展望 120 5.1結論與未來展望 120 圖 目 錄 圖 1-1 半導體能隙值與晶格常數的關係圖 3 圖2-1晶格結構圖(a)wurtzite 結構(b)zincblende結構 9 圖2-2 簡併態位分裂成可允許能量帶 14 圖2-3 半導體之能帶分裂示意圖 14 圖2-4 兩個能階間的三種基本轉換過程 16 圖2-5 P-N 接面在熱平衡時之能帶圖 17 圖2-6 P-N接面在順向偏壓下載子的流動 17 圖2-7 氮化銦鎵(InGaN)與氮化鎵形成異質接面量子井結構 18 圖2-8兩同頻率且垂直之光波相互作用後產生線偏振光 19 圖2-9 線偏振光 20 圖2-10兩同頻率、振幅且垂直之光波相互作用後產生圓偏振光 21 圖2-11 圓偏振光 22 圖2-12 不同之合成橢圓偏振光 23 圖2-13 橢圓偏振光 23 圖2-14 TE mode與TM mode 的光 24 圖2-15 偏光板之光吸收 25 圖2-16 熱的非平衡下之金屬靠近n型半導體之能帶圖 28 圖2-17 熱平衡時之金屬接觸的能帶圖 29 圖2-18 熱離子發射 30 圖2-19 熱游離場發射 31 圖2-20 場發射 31 圖2-21 p-i-n 光偵測器在外加逆偏壓下之能帶圖 32 圖2-22 光偵測器照光下之光子吸收機制 33 圖2-23 不同材料之量子效率相對波長關係圖 35 圖2-24 擴散電流機制 36 圖2-25 產生-復合電流機制 37 圖2-26 穿遂電流機制 38 圖2-27 MSM光偵測器的元件其幾何形狀為指叉狀的結構 42 圖2-28 MSM光偵測元件工作原理 43 圖2-29 WZ-GaN 晶格不對稱性結構圖 46 圖2-30 C-plane InGaN/GaN系列材料之電子能帶結構圖(at the center of the Brillouin zone) 46 圖2-31 C-plane InGaN/GaN系列材料之電子躍遷所造成的電場分佈圖 47 圖2-32 M-plane InGaN/GaN系列材料之電子能帶結構圖(at the center of the Brillouin zone) 49 圖2-33 M-plane InGaN/GaN系列材料之電子躍遷所造成的電場分佈圖 50 圖2-34 A-plane InGaN/GaN系列材料之電子能帶結構圖(at the center of the Brillouin zone) 50 圖2-35 A-plane InGaN/GaN系列材料之電子躍遷所造成的電場分佈圖 51 圖3-1 C-plane LED 正向發光結構圖 63 圖3-2 C-plane LED 側向發光結構圖 65 圖3-3 A-plane LED 正向發光結構圖 66 圖3-4 MSM光偵測元件C-plane正向吸收結構圖 67 圖3-5 MSM光偵測元件A-plane正向吸收結構圖 69 圖3-6 PIN光偵測元件C-plane正向吸收結構圖 71 圖3-7 MIS光偵測元件A-plane正向吸收結構圖 72 圖3-8 光強度量測系統配置圖 73 圖3-9 直接發光與間接發光示意圖 74 圖3-10 光響應量測系統架設圖 75 圖3-11 石英偏振片之紫外光穿透率與偏光對比度圖 76 圖3-12 LED放射極化光量測裝置架設圖 78 圖3-13 光偵測元件吸收極化光量測裝置圖 79 圖4-1 C-plane LED 正向發光之發光強度與偏振角度之關係圖 81 圖4-2 C-plane 能帶示意圖(正向觀測) 82 圖4-3 C-plane極化光電場分佈與正向觀測圖 83 圖4-4 C-plane LED 正向發光之相互垂直之極化光之EL光譜圖 83 圖4-5 C-plane LED 正向發光與側向之發光強度與偏振角度之關係圖 85 圖4-6 C-plane 能帶示意圖(側向觀測) 87 圖4-7 C-plane 極化光電場分佈與側向觀測圖 87 圖4-8 C-plane LED 側向發光之相互垂直之極化光之EL光譜圖 88 圖4-9 C-plane LED 正向發光與A-plane LED正向之發光強度與偏振角度之關係圖 90 圖4-10 A-plane 能帶示意圖 (正向觀測) 92 圖4-11 A-plane 極化光電場分佈與正向觀測圖 92 圖4-12 A-plane LED 正向發光之相互垂直之極化光之EL光譜圖 93 圖4-13 C-plane MSM 光偵測元件之正向吸收之光響應頻譜與偏振角度之關係圖- 0度角對應入射光電場方向垂直a軸;90度角對應入射光電場方向平行a軸-(a)波段範圍為330nm~430nm;(b)波段範圍為350nm~375nm (c) 光響應值之吸收極化比例 96 圖4-14 C-plane PIN 光偵測元件之正向吸收之光響應頻譜與偏振角度之關係圖- 0度角對應入射光電場方向垂直a軸;90度角對應入射光電場方向平行a軸-(a)波段範圍為310nm~430nm;(b) 波段範圍為350nm~380nm (c) 光響應值之吸收極化比例 100 圖4-15 C-plane 光偵測元件光吸收之電子能帶結構與躍遷圖 103 圖4-16 C-plane 光偵測元件吸收入射光之電場分佈示意圖 103 圖4-17 A-plane MSM 光偵測元件之正向吸收之光響應頻譜與偏振角度之關係圖- 0度角對應入射光電場方向垂直c軸;90度角對應入射光電場方向平行c軸-(a)波段範圍為330nm~430nm;(b) 波段範圍為350nm~375nm (c) 光響應值之吸收極化比例 105 圖4-18 A-plane MIS 光偵測元件之正向吸收之光響應頻譜與偏振角度之關係圖- 0度角對應入射光電場方向垂直c軸;90度角對應入射光電場方向平行c軸-(a)波段範圍為330nm~430nm; (b) 波段範圍為353nm~375nm (c) 光響應值之吸收極化比例 110 圖4-19 A-plane光偵測元件光吸收之電子能帶結構與躍遷圖 113 圖4-20 A-plane光偵測元件吸收入射光之電場分佈示意圖 113 圖4-21 C-plane-MSM、C-plane-PIN與A-plane-MSM、A-plane-MIS光偵測元件光響應值之最大吸收極化比例之比較圖 114 圖4-22不同偏壓下電場對極化光響應吸收特性的影響 119 如圖(a)(b)(c)(d)為MIS隨著偏壓的增加使得不同入射光電場方向之光響應吸收值劈裂與吸收邊緣波長位移;而圖(e)(f)為MSM元件偏壓1V與3V亦有相同情況;且作為極化比例顯現程度之對照 119

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