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研究生： 賴育誠
Lai, Yu-cheng
論文名稱： 底層及磁場對(Fe1-xCox)1-yPty薄膜微結構與磁性之影響
The effects of underlayer and magnetic field on the microstructure and magnetic properties of (Fe1-xCox)1-yPty films
指導教授： 張炎輝
Chang, Yen-hwei
學位類別： 博士
Doctor
系所名稱： 工學院 - 材料科學及工程學系
Department of Materials Science and Engineering
論文出版年： 2007
畢業學年度： 95
語文別： 中文
論文頁數： 195
中文關鍵詞： 矯頑磁力 、磁場
外文關鍵詞： coercivity, magnetic
相關次數： 點閱：82  下載：2 
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    • 本論文係以離子束濺鍍系統製備FePt/FeAg及FePt/CoAg薄膜，藉由調變不同成分比例的Fe1-xAgx或Co1-xAgx底層，以及成長FePt磁性層時，同時給予垂直膜面方向的外加磁場(~1.3 kOe)，探討FePt/FeAg及FePt/CoAg薄膜在不同底層成分比例的情況，鍍膜時有外加磁場與無外加磁場的條件下，經不同條件熱處理之後，觀察薄膜的晶體結構、微結構之變化，以及對磁性質之影響。結果顯示由於Fe-Ag或Co-Ag會產生相分離，在外加磁場的情況下部分區域會有磁力線導入，再加上Ag的析出會導致FePt磁性層形成序化相需要的熱處理溫度降低。因為外加磁場降低序化溫度的效果，同時也反應在矯頑磁力值上。在400°C熱處理時，對於FePt/CoAg薄膜而言，鍍膜時有外加磁場會提升FePt/Co25Ag75矯頑磁力(Hc= 5 kOe)，若沒有外加磁場的情況下矯頑磁力(Hc= 0.4 kOe)。同樣的有外加磁場情況下，若CoAg底層換成FeAg底層，則FePt/Fe20Ag80的矯頑磁力值甚至增加到10 kOe。兩者不同底層的使用，造成磁性層矯頑磁力值大幅增加，主要原因是CoAg底層中析出的Co會對FePt產生很大的影響。由二元合金Fe59Pt41中添加Co元素，添加的範圍為(Fe1-xCox)59Pt41 (x= 0, 0.2, 0.4, 0.8)，觀察XRD的結果顯示Co添加的量越多，形成L10序化相的溫度就越高。但是若以Ti當底層時，薄膜的序化溫度從600°C降到500°C，實驗發現少量添加Co元素，(Fe0.8Co0.2)59Pt41/Ti薄膜的序化度反而提高，而且矯頑磁力值略微增加。另一方面，若以Pt為底層除了更容易形成序化相，更在Co添加量為x= 0.2時，(Fe0.8Co0.2)59Pt41/Pt薄膜不但具備硬磁相的矯頑磁力約4 kOe，而且有高飽和磁化量1480 emu/cm3。但是，並非所有的底層都會幫助形成序化相，若以Fe75Ni22Cr3底層，不但序化溫度沒有降低，反而讓無序相更為穩定。

    The deposition of FePt films on top of a FeAg or CoAg underlayer using ion beam sputtering, where the magnetic field strength (~1.3kOe) was used to alter the deposited conditions on the growing film surface, is of particular interest in this study. The microstructures and magnetic properties of annealed FePt films were controlled by various compositions of the Fe1-xAgx or Co1-xAgx underlayer and promoted by magnetic field simultaneously. The characteristic of phase separation of Fe-Ag or Co-Ag was employed to induce an inductive magnetism region, and Ag segregation that reduced the annealing temperature required for L10-FePt. After annealing at 400°C, the FePt/CoAg films deposited under the magnetic field showed a larger coercivity (Hc= 5 kOe) than that of the film deposited without a magnetic field (Hc= 0.4 kOe). At the same time, the coercivity extensively increased to 10 kOe while the Fe20Ag80 was inplace of CoAg underlayer. The segregation of Co atoms resulted from the CoAg underlayer which could apparently influence the corresponding magnetic properties of FePt. For this reason another study is to investigate how the addition of Co to a Fe59Pt41 alloy with compositions in the range of (Fe1-xCox)59Pt41 (x= 0, 0.2, 0.4 and 0.8) affects the crystallographic ordering temperatures and magnetic properties of sputter-deposited films. Further increasing the Co content suppressed the disorder/order transformation. Interestedly, the abnormal enhancement of ordered phase (at x=0.2) correlated with introducing Ti underlayer, as characterized by X-ray diffraction. Introducing Ti underlayer not only decreased ordering temperature from 600°C to 500°C, but also increased the coercivity of the (Fe0.8Co0.2)59Pt41/Ti film due to forming ordered phase. On the other hand, Pt underlayer could promote ordering reaction. As Co concentration of x = 0.2, the (Fe0.8Co0.2)59Pt41/Pt have coercivity (Hc = 4 kOe) of ordered phase and the saturation magnetization is maximum at 1480 emu/cm3. Not all kinds of underlayer could enhance magnetic properties, if Fe75Ni22Cr3 is used as an underlayer disordered fcc-phase is stabilized.

    摘 要 I Abstract II 誌 謝 III 目 錄 IV 表目錄 VIII 圖目錄 IX 符號表 XIX 第一章 序論 1 1-1 前言 1 1-2 研究動機與目的 3 第二章 相關理論 4 2-1 磁性材料 4 2-2 磁晶異向性來源 5 2-3 晶體異向性能 6 2-4 靜磁能 7 2-5 交互耦合作用力 7 2-6 磁記錄媒體 10 2-7 高記錄密度薄膜材料之要求 12 2-7-1 高磁晶異向性 12 2-7-2 縮小磁性晶粒以提高記錄密度 12 2-7-3 高磁化量與矯頑磁力值 13 2-7-4 縮小磁化反轉區間寬度與適當的角形比 15 2-8 FePt 二元合金材料 16 2-8-1 序化相的成核成長 16 2-8-2 L10-FePt超晶格結構 18 2-8-3 有序度之計算 19 2-8-4 促進L10序化相 21 第三章 實驗方法 39 3-1 實驗流程 39 3-1-1 靶材製作 39 3-1-2 基板製備 40 3-1-3 薄膜濺鍍 40 3-1-4 FeCoPt、FeCoPt/Ti、FeCoPt/FNC、FeCoPt/Pt濺鍍薄膜 41 3-1-5 FePt/FeAg/SiO2、FePt/CoAg/SiO2薄膜濺鍍 41 3-1-6 退火熱處理 42 3-2晶體結構分析 43 3-2-1 X光繞射分析 43 3-2-2 穿透式電子顯微鏡分析 43 3-3成分分析 43 3-3-1感應耦合電漿質譜儀分析 43 3-3-2 X射線能量散佈分析儀分析 44 3-3-3歐傑電子能譜儀(AES) 44 3-4表面形態 44 3-4-1掃描式電子顯微鏡(SEM)分析 44 3-5磁性量測 44 3-5-1 磁滯曲線 44 3-5-2 δM分析 45 第四章 結果與討論 55 4-1 (Fe1-xCox)59Pt41/SiO2/Si薄膜 55 4-1-1 (Fe1-xCox)59Pt41/SiO2/Si薄膜晶體結構 55 4-1-2 (Fe1-xCox)59Pt41/SiO2/Si微結構觀察 56 4-1-3 (Fe1-xCox)59Pt41/SiO2/Si磁性質分析 58 4-2 (Fe1-xCox)59Pt41/Ti薄膜 67 4-2-1 (Fe1-xCox)59Pt41/Ti薄膜晶體結構 67 4-2-2 (Fe1-xCox)59Pt41/Ti微結構觀察 69 4-2-3 (Fe1-xCox)59Pt41/Ti磁性質分析 71 4-3 (Fe1-xCox)59Pt41/FNC薄膜 88 4-3-1 (Fe1-xCox)59Pt41/FNC薄膜晶體結構 88 4-3-2 (Fe1-xCox)59Pt41/FNC微結構觀察 89 4-3-3 (Fe1-xCox)59Pt41/FNC磁性質分析 91 4-4 (Fe1-xCox)59Pt41/Pt薄膜 100 4-4-1 (Fe1-xCox)59Pt41/Pt薄膜晶體結構 100 4-4-2 (Fe1-xCox)59Pt41/Pt微結構觀察 102 4-4-3 (Fe1-xCox)59Pt41/Pt磁性質分析 104 4-5 FePt/Fe1-xAgx薄膜 126 4-5-1 FePt/Fe1-xAgx薄膜晶體結構 126 4-5-2 底層Fe1-xAgx薄膜的微結構 129 4-5-3 L10-FePt序化相的微結構 130 4-5-4 磁性質分析 131 4-6 FePt/Co1-xAgx薄膜 162 4-6-1 FePt/Co1-xAgx薄膜晶體結構 162 4-6-2 CoAg底層的微結構分析 163 4-6-3 磁性質的表現 165 4-7 Co添加、底層與外加磁場效應之綜合比較 179 4-7-1 Fe59Pt41中添加Co對於序化度的影響 179 4-7-2 底層對Fe59Pt41序化度的影響 179 4-7-3 底層對(Fe1-xCox)59Pt41序化度的影響 179 4-7-4 Fe1-xAgx底層與外加磁場對序化度的影響 180 4-7-5 Fe1-xAgx與Co1-xAgx對FePt薄膜晶粒間交互作用力的影響 180 第五章 結論 184 未來展望 186 參考文獻 187

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