本研究探討微噴嘴片在陶瓷壓電片驅動下，各種液體產生噴霧之特性。設計之噴嘴片使用類LIGA技術，經由黃光微影搭配精密電鑄來製作，以產生微米級噴孔孔徑，材質為鎳鈷合金，將其上黏貼一環形陶瓷壓電片，作為噴嘴片之驅動元，並將50mm  50mm  70mm壓克力載水艙體與壓電噴嘴片組裝，作為本實驗之微霧化器。實驗時藉由訊號產生器輸出訊號，經高壓放大器放大電壓，驅動壓電噴嘴片共振後將流體加以霧化，用以探討不同液體及噴嘴設計之霧化特性。噴霧粒子則以Malvern RT-sizer進行即時之粒徑量測，並計算固定容量液體之完整噴霧時間及流率。
本實驗之工作液體為蒸餾水以及不同重量濃度百分比之甘油溶液、離子溶液(NaCl)和酒精溶液，改變噴嘴之噴孔孔徑大小、噴孔間距和噴孔位置，透過固定頻率、不同電壓及波形產生噴霧後進行測試。實驗結果顯示噴霧過程表面易形成液膜化現象，液膜與液滴之間產生交互作用，降低霧化品質。驅動電壓與波形可改變噴霧流率，波形為方波時有較佳的流率，而流率隨電壓增加而增加，但對噴霧粒徑不影響。噴霧粒徑受噴孔孔徑所主導，隨著孔徑增加，噴霧粒徑及流率都呈現上升的趨勢，結果顯示，小孔徑噴孔之噴發臨界條件與大孔徑截然不同，說明霧化的結果主要受噴嘴設計參數的影響，本實驗在驅動頻率101± 1% kHz、電壓43.6 Vp-p、方波的操作條件下，5 m的噴嘴孔徑下可以產生平均粒徑9.32 m流率0.23 g/min的噴霧；噴孔間距在110 m左右可有效防止液膜化形成，同時在噴霧流率及粒徑間取得一平衡值；噴孔位置在2.5 mm ~ 3.5 mm之環內，為噴嘴共振過程之最大位移處，1000孔、5 m之噴嘴可產生0.57 g/min的噴霧流率。實驗結果亦顯示，噴嘴表面處理會影響霧化結果，濺鍍疏水膜可防止液滴與液膜之間的交互作用，避免形成大顆粒之液滴；適當的曲面沖壓則可降低液滴追撞形成大顆粒的現象發生。不同的噴嘴表面加工將使霧化性能得到不同的改善。當使用的工作流體黏製係數提高時，噴霧粒徑及流率隨之下降，係因高黏度使得噴孔噴發不易，須更高能量驅動之，提高其臨界噴發條件；當離子溶液濃度提高時，噴霧粒徑不受影響，噴霧流率則呈現下降趨勢，係因在氣液交界處，產生電雙層效應，噴嘴出口易吸附帶有離子的溶液，使液滴不易噴發出去；當酒精溶液濃度提高時，噴霧粒徑隨之降低，是由於酒精高揮發性，在液滴噴發後，濃度較高的溶液易產生揮發，噴霧流率則隨之提高，是由於酒精表面張力降低，使得液滴較易突破臨界噴發點，但因酒精溶液所產生之霧化結果，具多種物理化學性質交互影響，須更進一步探討才能了解全貌。

In this study, the effect of operating conditions, nozzle design and fluid properties on the aerosol droplet size and output rate with vibrating mesh are investigated comprehensively. The increase in orifice size increases both aerosol droplet size and output rate, it plays the most important role in nozzle design. Nozzle pitch about 110 m can avoid forming liquid film. Moreover, nozzle position at ∅2.5 mm~∅3.5 mm with amounts of energy can generate 0.57 g/min aerosol with ∅5 m orifice. When the different fluid was employed, the commercial nebulizers compared with homemade one show a totally diverse performance. For instance, increased viscosity resulted in increase in Dv50 with the Beurer nebulizer, decrease in Dv50 with the Omron and homemade nebulizer but no clear trend with Aerogen nebulizer. It reveals that performance of vibrating mesh is highly affected by nozzle design and fluid properties, the overall nebulization should be further researched.

翁維隆（2009），「驅動模式對供需式壓電微噴嘴噴注特性之影響」，成功大學成功大學航空太空工程學系學位論文。
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