在電子光斑干涉術中，我們常使用相位移法得到相位。常見的相位移法如利用步進馬達、壓電致動器推動試件或參考面，或是轉動偏極板以得到不同相位移干條紋圖像，但容易因周遭環境因素降低量測精準度，因此發展瞬間相移系統用來提高量測精準度。本研究主要使用麥克森干涉儀架設，搭配分光鏡(Beam-Splitter, BS)及直角反射鏡(Right Angle Prisms)所組成之一分四鏡組，藉由光通過極化分光鏡(Polarized Beam-Splitter,PBS)、偏極板(Polarizer)及四分之一波板(Quarter-Wave Plate, QWP)，經一分四鏡組分光後可形成不同相移之四圖像。利用此光學架構搭配單一CCD(Charge Coupled Device)相機建立瞬間相移電子光斑干涉儀。
　　本文中使用三種光斑相位計算方法：位移前後相位相減法(方法一)、位移前後光斑圖同相位移相減法(方法二)、位移後四相移光斑圖減位移前任意一相移光斑圖法(方法三)。由推導及模擬的方式驗證這三種光斑相位計算方法的可行性後，再運用於實驗之光斑圖，由這三種方法求出之相位值，經相位判斷及相位展開後，由電子光斑面外位移原理，所推導出的相位值與高度值之關系式，即可得試件之面外位移量。
　　使用非瞬時相移實驗來比較三種光斑相位計算方法於實驗之光斑圖，其中方法一之光斑相位計算法，所求得之位移量及位移方向皆符合施加於試件之位移。方法二之光斑相位計算法，相位截斷線附近無法明確呈現，且相位截斷線附近所展開之位移量會有較大的誤差產生。方法三之光斑相位計算法，所求得之位移量也近似施加於試件之位移，但方法三比起方法一較不方便在於截斷頻率之選擇不易。接著以瞬時相移靜態及動態實驗所得之光斑圖像，利用三種不同光斑相位計算方法所求出試件之面外位移，由靜態之實驗結果來看，其相位圖之相位資訊並不明確，因此，針對實驗架設及光斑圖做檢測及分析，在實驗架設檢測中經過四相位檢測，我們可確定四步相移皆有呈現出來。在光斑圖之檢測方面，對光斑圖彼此間的相關性做濾波處理，拿3x3中值濾波與平均濾波比較後，以平均濾波之效果為佳，因此以平均濾波對光斑圖進行濾波處理，根據檢測及分析之結果進行調整後，用在靜態實驗上其相位圖並未獲得改善，而最後藉由光斑尺寸與CCD光圈的關系式，將光斑尺寸縮小後，經靜態實驗相位圖雖有明顯改善，但仍然不夠好。在瞬時相移實驗中我們需要先克服光斑圖間相關性的問題，其次為提升相位正確性才能使實驗有更好的結果。

　　The phase shifting method is usually applied to the Electronics Speckle Pattern Interferometry to obtain phases. Common phase shifting methods such as using stepping motor or piezoelectric actuator to move reference mirror or specimen, rotating the polarizer to get different interference fringe image are easily affected by environmental factors and reduces the measurement precision. Therefore, the instantaneous phase-shifting interferometry is developed to enhance the stability of measurement. In this research, Michelson interferometer and a four-bucket optical elements component were used. The component composed of beam splitters (BS) and right angle prisms (RAP). When the light passes through the polarized beam splitters (PBS), polarizer, quarter wave plates (QWP) and the four-bucket optical elements component, four phase-shifting images were captured by one CCD camera. By using this optical configuration with single CCD camera, an instantaneous phase-shifting electronic speckle pattern interferometry is set up.
　　In this article, three different methods to calculate the phase of speckle pattern are used: 1) the before- and after-displacement phase subtraction method 2) the before- and after-displacement phase subtraction of the same phase shifting speckle images method 3) the four after-displacement phase shifting speckle pattern images and either one before-displacement phase shifting speckle image subtraction and filtering method. The simulation and derivation results show that three different speckle pattern phase calculation methods could be used and then applied to the speckle images obtained from experiments. Phases were obtained by three different phase calculation methods. After phase judgment and phase unwrapping, the phases were substitute into the equation of the out of plane displacement and the out of plane displacement of the specimen were calculated.
The non-instantaneous phase-shifting experiment is applied to the speckle pattern images obtained from experiments to compare the three different speckle pattern phase calculation methods. In method one, the displacement and the direction are in line with the displacement we exert. In method two, the phase blockline is unapparent and there is large error when unwrap the displacement nearby the phase blockline. In method three, the displacement is also in line with the displacement we exert. But method three is not more convenient than method one because the cutoff frequency is not easy to choice. These methods were applied to the speckle images obtained from the either static or dynamic instantaneous phase-shifting experiments to　calculate the out of plane displacement of the specimen. From the result of the static experiment, the phases of the phase images are not clear. Therefore, the configuration of the experiments is examined and the speckle pattern images are analyzed. By four phase examination we are certain that the four step displacement is effective. In the examination of the speckle pattern images, filtering is applied to the correlation of the speckle pattern images. Compared to the 3x3 median filtering, the average filtering is more effective. So the average filtering is applied to the speckle pattern images. After the some changes according the result of the examination, the result of the static experiments is not improved. Eventually, by adjusting the aperture of CCD camera to minify the size of speckles in the static experiments, the phase image is significantly improved but not well enough. In instantaneous phase shifting experiment, we have to overcome the problem of correlation between speckle pattern images first then the correctness of the phases to get better result from experiments.

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