本研究的主要目的在於製備透明且可見光催化的TiO2/SiO2奈米粒子薄膜，並探討氮摻雜反應溫度及厚度與薄膜自潔特性的關聯。本研究運用全奈米粒子 (all-nanoparticle) 靜電逐層 (electrostatic layer-by-layer, ELbL) 組裝技術，在玻璃基板上交替沉積7 nm TiO2與22 nm SiO2奈米粒子，並經由以每30個雙層為一週期的週期性鍛燒製程，製備多雙層的奈米粒子薄膜；再於氨氣氣氛下高溫鍛燒 (450 ℃-600 ℃) 以獲得氮摻雜TiO2/SiO2可見光催化薄膜，並測定薄膜的氮摻雜反應溫度與厚度對亞甲藍分子在可見光下降解速率的影響。
由實驗結果顯示，本研究製備的奈米粒子薄膜 (1-120雙層) 的平均雙層厚度為20.07±0.03，平均折射率為1.29±0.05，都具有抗反射特性且平均穿透度皆高於玻璃，並有效地將光的吸收延伸至可見光區域。實驗結果也顯示，氮摻雜反應溫度對薄膜的亞甲藍可見光降解速率有一最佳值。本文也提出氮摻雜改變TiO2能階型態有助電子/電洞的產生及氮摻雜伴隨氧空缺的產生而形成電子/電洞再結合中心的雙重效應，解釋此一現象。另一方面，不同厚度氮摻雜的薄膜進行可見光降解亞甲藍實驗可知，薄膜皆具有相同的可見光催化能力，亦即可見光催化降解速率不因厚度而有所改變。

The main purpose of this work is to fabricate a transparent visible-light-active nitrogen-doped TiO2/SiO2 self-cleaning surfaces. All-nanoparticle thin film coatings on glass substrates by electrostatic layer-by-layer (ELbL) assembly of 7 nm TiO2 and 22 nm SiO2 nanoparticles were performed. Followed by periodic calcination process after every 30 bilayers, then calcine the coatings under ammonia gas flow with different temperature and number of bilayer, multibilayer nitrogen-doped nanoparticulate thin films (TiO2-δNδ/SiO2 )X with x=1-120 can be fabricated and to determine effects of N-doping temperature and thin film thickness under visible light illumination.
Antireflective property was exhibited by all of the nanoparticulate thin films fabricated as revealed by UV-vis transmittance spectra. In addition, average refractive indices of the nanoparticle thin films about 1.31±0.05 and linear growth behavior nearly 20.03±0.07 nm for a bilayer of the multilayers were determined using ellipsometry and scanning electron microscopy. According the result of experiment, N-doped TiO2 thin film can be fabricated by different calcination temperature under NH3 gas flow and extend absorbance wavelength from UV light to visible light. Beside, there is an optimum calcination temperature condition (500℃/NH3) to show the best photocatalytic activity which is evaluated by the degradation of methylene blue under visible light illumination. This suggests that the isolated narrow band formed above the valence band is responsible for the visible light response in the present N-doped TiO2 but nitrogen doping is likely to be accompanied by oxygen vacancy formation. Furthermore, photocatalytic degradation of methylene blue by the nanoparticle thin films with different number of bilayers under visible light illumination showed the same self-cleaning property.

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