近幾年在奈米科技的推波助瀾之下，世界各國莫不全力投入這個劃時代的產業，視為國家的發展重點。而奈米科技的發展有賴於操控奈米尺度之微細加工技術，故高精密定位控制技術之重要性不言可喻。線型超音波馬達除了定位精度高外，其行程亦可隨需要而調整，可應用於精密定位平台，在需兼顧精度及工作範圍的場合，有其相當之優勢。其中，定子的振動行為是影響超音波馬達性能的重要關鍵。因此本論文針對一線型行波超音波馬達之定子，包含壓電結構與黏彈結構，利用Hamilton’s Principle 與 Assumed Mode Energy Method建立兩結構之動態模型。其中因黏彈結構需考慮剪力之影響，故將其視為一Timoshenko樑，並使用GHM方法描述黏彈結構之材料特性。由兩動態模型之邊界條件相等，可相互耦合為定子之模型。同時使用有限元素分析軟體ANSYS輔助分析適合的黏彈材料長度，並對此定子結構作初步的可行性分析。透過以上的分析，可以瞭解各設計參數對於定子行為之影響，並依此建立出適合此定子之設計分析流程，以掌握超音波馬達設計之關鍵技術。

　　Due to the incitement of nano-technology, many countries have urged to develop this epochal technology, treating which as the nations’ key industry. However, the development of nano-technology highly depends on nanoscale manipulation technique and hence high precision manufacturing process becomes critical. Ultrasonic linear motors, which possess the advantages of both long stroke and high precision, are capable of satisfying the requirement of a precision stage. This thesis studies a stator of a traveling-wave type ultrasonic linear motor which consists of a piezoelectric based actuator and viscoelastic structures due to that the stator vibration is an important key to the performance of ultrasonic motors. The Hamilton’s Principle and the assumed mode energy method are adopted to obtain the dynamic equations of the actuator and viscoelastic structures. The viscoelastic structure is modeled as a Timoshenko beam, and the GHM method is employed to account for the frequency dependent damping properties. By applying the continuity conditions in the interface of the actuator and viscoelastic structures, the two sets of equations can be coupled as the stator model. ANSYS is used to analyze the suitable dimension of the viscoelastic structures and feasibility of the stator. Through the analyses, the influence of various design parameters of the stator can be understood so that the proper stator design procedure can be induced to master the key technique of ultrasonic motor design.

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