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研究生：	花聰傑 Hwa, Thung-Jie
論文名稱：	微小型PVDF壓力感測器之聲學特性研究 Acoustic Characteristics of Miniature PVDF Pressure Sensors
指導教授：	王逸君 Wang, Yi-Chun
學位類別：	碩士 Master
系所名稱：	工學院 - 機械工程學系 Department of Mechanical Engineering
論文出版年：	2003
畢業學年度：	91
語文別：	中文
論文頁數：	72
中文關鍵詞：	準分子雷射微細加工、PVDF微型壓力感測器、聲波、水下聽音器、靈敏度
外文關鍵詞：	Acoustic wave, Hydrophone, Sensitivity, PVDF micro-pressure sensor, Excimer laser micro-machining
相關次數：	點閱：93 下載：11
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本研究使用準分子雷射微細加工技術，以準分子雷射配合程式控制精密移動平台，在厚度的PVDF (polyvinylidene fluoride) 壓電薄膜上，加工出感測面積為1.5mm×1.5mm及2mm×2mm之微型壓力感測器。為了瞭解此種微型壓力感測器之聲學特性，我們分別以超音波換能器及水下聽音器，頻率為數佰萬赫及數十仟赫的聲場，並以校正過之聽音器在同一聲場同一位置處所量得訊號，比較求得微型壓力感測器之靈敏度。

This study employed a excimer laser mirco-maching technique on a thick PVDF (polyvinylidene fluoride) piezoelectric film to fabricate miniature pressure sensors .The sizes of sensing area are 1.5mm×1.5mm and 2mm×2mm.
To investigate the acoustic characteristics of the sensors , acoustic fields generated by ultrasound transducers and hydrophones were used to test the sensors in frequencies of the orders of few MHz and tens of kHz respectively.
Sensitivities of the sensors were obtained by comparing the sensor output to those of calibrated hydrophones which were located nearby in the same acoustic field.

摘要...........................................Ⅰ
英文摘要.......................................Ⅱ
誌謝...........................................Ⅲ
目錄...........................................Ⅳ
圖目錄.........................................Ⅵ
表目錄.........................................Ⅸ
符號說明.......................................Ⅹ
第一章 緒論.....................................1
   1-1 研究背景與動機...........................1
   1-2 本文架構.................................2
第二章 實驗設備與儀器...........................3
   2-1 實驗架構.................................3
   2-2 實驗設備.................................4
     2-2-1直流電源供應器(Power Supply) .........4
     2-2-2 放大器...............................4
     2-2-3 函數產生器(Function Generator)、示波.5
     2-2-4 脈衝產生接收器(Pulse Receiver).......5
     2-2-5 線性平台.............................6
     2-2-6 超音波換能器(Ultrasound Transducer)..6
     2-2-7 水下聽音器(Hydrophone)...............6
     2-2-8 準分子雷射加工系統...................8
第三章 微型壓力感測器之加工與製作..............17
   3-1 PVDF壓電薄膜之特性......................17
   3-2 準分子雷射之加工原理與控制..............19
   3-3 PVDF壓電薄膜之加工特性..................20
   3-4 光罩之設計	.............................21
   3-5 微型壓力感測器製作過程..................22
   3-6 整體組合................................23
第四章 PVDF感測器與水下聽音器之特性及壓力分佈..27
   4-1 壓電特性................................27
     4-1-1 正逆電壓效應........................27
     4-1-2 壓電材料及其應用	...................28
   4-2 水下聽音器之操作效能與應用..............29
     4-2-1 水下聽音器之應用....................30
   4-3 聲壓量測................................31
     4-3-1 聲源頻率在75kHz~100kHz之範圍........31
     4-3-2 聲源頻率在1MHz~20MHz之範圍..........33
第五章 結果與討論..............................41
   5-1 實驗量測步驟............................41
     5-1-1 以超音波換能器為聲波之激發源產生聲場
           (頻率範圍1MHz~20MHz)................41
     5-1-2 以8104水聽器為聲波之激發源產生聲場
            (頻率範圍75kHz~100kHz).............44
第六章 結論與未來展望..........................62
   6-1 結論....................................63
   6-2 未來展望................................64
 附錄..........................................65
 參考文獻......................................69
                                    

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Dou, K., Knobbe, E.T., Parkhill, R.L., and Wang, Y.M., 2000,“Surface Texturing of Aluminum Alloy 2024-T3 via Femto and Nanosecond Pulse Excimer Laser Irradiation .”IEEE J. Sel. Top. Quant, Vol. 6, pp. 689-695.

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校外：2003-08-04公開

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