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研究生: 張志聖
Chang, Chin-Sheng
論文名稱: 應用DLTL量測微波基板介電特性及封裝電路之參數萃取
Microwave Dielectrics Measurement by Using Difference Length Transmission Lines (DLTL) Method and Applied to Extraction Parameters of Packaging Circuit
指導教授: 王永和
Wang, Yeong-Her
洪茂峰
Houng, Mau-Phon
學位類別: 碩士
Master
系所名稱: 電機資訊學院 - 微電子工程研究所
Institute of Microelectronics
論文出版年: 2005
畢業學年度: 93
語文別: 中文
論文頁數: 81
中文關鍵詞: 介電特性不同長度之傳輸線測試夾具彈簧針的等效電路
外文關鍵詞: dielectric properties, test contact probe, test fixture, DLTL
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  • 本研究中,將之前有研究過的不同長度之傳輸線法做理論的推導及應用上的延伸。在考慮相角、多重反射及邊緣效應下,所得到的介電特性與其他方法所得之特性相近。利用雙傳輸線來測量微波基板特性,不需像其他方法要有準確的TRL校正及複雜的矩陣轉換,在使用上也更為簡便。
    應用DLTL量測出基板的衰減常數,在彈簧針的應用頻率下,能作為測試載具的基板。當彈簧針位於測試載具中時,兩根彈簧針之間便會有互容及互感的電氣效應出現。而彈簧針本身也會具有自容與自感的高頻特性。故在測試方法上即必需先量測單獨一根彈簧針之S參數,以先建立單一彈簧針之等效電路模型為優先目標。ADS模擬軟體,針對彈簧針的結構與等效電路,分別預測頻率響應及萃取等效元件值。待推導出單一彈簧針之等效電路模型後,再接續分析複雜的複
    數根彈簧針之等效電路模型。

    In this research, we have the theories of difference length transmission line in advanced study. We can obtained the dielectric properties by considering transformation phase, multiple reflection, and filling effect, which are more close to data sheet. The DLTL needn’t the accurate TRL calibration or the complex matrix transformation to obtain the dielectric properties of microwave substrate.
    When testing in microwave region, the testing plate and Test Contact Probes need be well electrically and mechanically contacted. The design of the 4 different testing plate to obtain the different Test Contact Probes is required. As the probes positioned between the testing plate, the mutual capacitance and mutual instance between the two Test Contact Probes are appeared. Therefore measuring the S parameters of the single Test Contact Probe is required in the testing method and constructing the equivalent circuit of the single probe is being the first goal. Using the ADS simulation tool, the frequency response and the equivalent values in the structure of the Test Contact Probe can be obtained. After deriving the equivalent circuit of the single Test Contact Probe, the equivalent circuit of the multi probes can be obtained.

    第一章 序論---------------------------------------------------------------1 1-1 研究背景-----------------------------------------------------------------1 1-2 研究動機-----------------------------------------------------------------3   1-2-1微波基板參數萃取方法------------------------------------------------3   1-2-2封裝電路之參數萃取--------------------------------------------------5 第二章 相關原理-----------------------------------------------------------7 2-1傳播常數------------------------------------------------------------------7 2-2介電理論------------------------------------------------------------------9   2-2-1介電常數------------------------------------------------------------9   2-2-2 微波頻段之極化機制------------------------------------------------12   2-2-3 介電損失----------------------------------------------------------14 2-3多重反射效應-------------------------------------------------------------15 2-4傳輸線理論---------------------------------------------------------------17   2-4-1微帶線結構---------------------------------------------------------17   2-4-2微帶線特性---------------------------------------------------------17   2-4-3微帶線的損失-------------------------------------------------------19   2-4-4微帶線的色散現象---------------------------------------------------20 第三章 微波基板介電特性實驗結果------------------------------------------22 3-1微波基板介電特性---------------------------------------------------------22 3-2相關量測方法-------------------------------------------------------------22   3-2-1 共振器------------------------------------------------------------23   3-2-2 單一傳輸線--------------------------------------------------------24   3-2-3 不同長度之傳輸線--------------------------------------------------25 3-3實驗結果-----------------------------------------------------------------26 第四章 錫球陣列載具內部探針之參數萃取------------------------------------39 4-1錫球陣列載具(Ball Grid Array:BGA)簡介-----------------------------------39 4-2高頻時的傳輸效應---------------------------------------------------------39 4-3相關量測方式-------------------------------------------------------------40 4-4 彈簧針之等效電路元件推導------------------------------------------------42 4-5量測用之載具設計---------------------------------------------------------44 4-6實驗結果-----------------------------------------------------------------48 第五章 結論--------------------------------------------------------------57 參考文獻--------------------------------------------------------------------60

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