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研究生: 林雅珊
Lin, Ya-Shan
論文名稱: 氧化鋅錫薄膜電晶體應用於人工突觸元件之研究
Zinc Tin Oxide Thin Film Transistor for Artificial Synaptic Device
指導教授: 吳季珍
Wu, Jih-Jen
學位類別: 碩士
Master
系所名稱: 工學院 - 化學工程學系
Department of Chemical Engineering
論文出版年: 2021
畢業學年度: 109
語文別: 中文
論文頁數: 150
中文關鍵詞: 薄膜電晶體短期突觸可塑性成對脈衝增強動態濾波時序效應
外文關鍵詞: thin film transistor, short-term synaptic plasticity, pair pulse facilitation, dynamic filter, temporal effect
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  • 本研究成功以製備出之ZTO元件模擬多種突觸可塑性之特性,並探討金奈米粒子的添加與否對於突觸量測時之結果影響。首先,針對ZTO及ZTO/AuNPs(7L)兩元件之轉換特性曲線及TFT性質做比較,並說明遲滯的產生源自於缺陷對電子的捕捉,而金奈米粒子的加入可以增加缺陷,因而於ID-VG掃幅量測有較大的遲滯窗產生。突觸操作部分,先由施加單一電脈衝成功仿擬突觸最基本性質,並更進一步比較兩元件於負偏壓電脈衝及正偏壓電脈衝下之捕捉電子及釋放電子的能力,結果顯示ZTO及ZTO/AuNPs(7L)的捕捉電子能力相當,但ZTO/AuNPs(7L)的釋放電子能力優於ZTO,推測因為金奈米粒子的加入,除了ZTO與SiO2的界面存在缺陷之外,金奈米粒子與ZTO的界面也會有缺陷,因而使ZTO/AuNPs(7L)的釋放電子能力有所提升。
    增益與抑制循環、成對脈衝增益、動態濾波器以及由短期可塑性轉變為長期可塑性之操作皆由單一刺激(電脈衝)進行,以上操作之結果皆為ZTO/AuNPs(7L)元件有比ZTO更貼近生物突觸的趨勢。本研究還引入光脈衝作為另一個刺激來源,藉由調節電脈衝與光脈衝之時序關係,實現更多元的突觸權重調控。由於光脈衝與負偏壓電脈衝對於元件都屬於增益的效果,因此由光脈衝與負偏壓電脈衝形成之突觸權重(ΔW)皆為正的,而正偏壓電脈衝對於元件為抑制的效果,此抑制效果會與光脈衝之增益效果相抗衡,故由光脈衝與正偏壓電脈衝形成之突觸權重(ΔW)則正負皆有可能。由於本研究於操作時之脈衝時間偏長,汲極偏壓偏高,因此兩元件於操作時的能耗便相當大。

    In this study, we successfully emulate the characteristics of various synaptic plasticity with the prepared zinc tin oxide (ZTO) thin film transistor. Gold nanoparticles are added between ZTO and dielectric layer (SiO2) to investigate the influence of synaptic behaviors. First, the transfer characteristic curves of ZTO and ZTO/AuNPs(7L) devices are exhibited, the hysteresis window is caused by trapping electrons at interface defects between ZTO and SiO2. Apart from interface defects between ZTO and SiO2, the interface between gold nanoparticles and ZTO also have defects, which improves the ability of ZTO/AuNPs(7L) to trap/detrap electrons. In synaptic operation part, the application of single electrical pulse successfully emulate the basic property of synapse. The cycle of potentiation and depression, paired pulse facilitation, dynamic filter are all performed by electrical pulse. All above results of ZTO/AuNPs(7L) are better than ZTO and close to biological synapse. This study also introduces 405 nm laser light pulse as another source of stimulation. By adjusting the sequence of electrical pulse and light pulse, more diverse synaptic weight can be achieved. Synergistic effect is shown by applying negative electrical pulse and light pulse simultaneously. As for the energy consumption, the pulse duration time of this study is too long, and the drain voltage is also high, so the energy consumption of our two devices during synaptic operation are quite large.

    摘要 I Extended Abstract II 誌謝 V 目錄 VII 表目錄 X 圖目錄 XI 第一章、緒論 1 1-1前言 1 1-2研究動機 2 第二章、理論基礎與文獻回顧 3 2-1氧化物薄膜電晶體介紹 3 2-2持續光電導效應(PPC) 4 2-3神經元和突觸理論基礎與文獻回顧 7 2-3-1神經元(Neuron)和突觸(Synapse)簡介 7 2-3-2膜電位與動作電位(action potential) 9 2-3-3興奮性突觸後電位與抑制性突觸後電位(EPSP, IPSP) 11 2-3-4離子型受體和代謝型受體 13 2-3-5短期突觸可塑性(short-term synaptic plasticity) 16 2-3-6動態濾波器-Dynamic filter 20 2-3-7長期突觸可塑性(long-term plasticity) 21 2-3-8脈衝時序依賴可塑性(STDP) 24 2-3-9脈衝頻率依賴可塑性(SRDP) 26 2-4類神經網路運算 28 第三章、實驗方法與步驟 34 3-1實驗材料 34 3-1-1實驗藥品 34 3-1-2電子束蒸鍍源 34 3-1-3基板 34 3-2實驗流程 35 3-2-1基板清洗 35 3-2-2 ZTO前驅溶液配製 35 3-2-3 ZTO薄膜電晶體製作 35 3-2-4電子束蒸鍍條件 36 3-3元件結構與命名 37 3-4分析儀器 40 3-4-1半導體元件分析儀(Semiconductor device analyzer) 40 3-4-2脈衝產生系統(Pulse Generator) 41 3-4-3雷射光源(Laser light source)、功率計(Power meter)與偵測器(Detector) 42 第四章、結果與討論 43 4-1 TFT Transfer curve分析(ID-VG) 43 4-2元件可模擬之突觸性質 45 4-2-1興奮性與抑制性突觸後電位 45 4-2-2增益與抑制循環-P/D cycle 54 4-2-3短期突觸可塑性-PPF 65 4-2-4動態濾波器 73 4-2-5長期突觸可塑性-SNDP、SADP 83 4-2-6光電脈衝之時序影響 96 4-3元件之能耗討論 140 第五章、結論 146 參考文獻 148

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