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研究生：	賴柏儒 Lai, Bo-Ru
論文名稱：	應用於神經形態儲備池運算之氧化銦鎵鋅-氧化鉭憶阻器動態訊號處理與模擬 Dynamic Signal Processing and Simulation in IGZO-TaOx Memristor for Neuromorphic Reservoir Computing
指導教授：	陳貞夙 Chen, Jen-Sue
學位類別：	碩士 Master
系所名稱：	工學院 - 材料科學及工程學系 Department of Materials Science and Engineering
論文出版年：	2023
畢業學年度：	111
語文別：	中文
論文頁數：	115
中文關鍵詞：	易失性記憶體、時間序列訊息、儲備池運算、雙氧化層憶阻器、自整流
外文關鍵詞：	reservoir computing, dynamic memristor, neuromorphic computing, spatial- temporal information processing
相關次數：	點閱：58 下載：0
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摘要 I 
EXTENDED ABSTRACT II 
誌謝 VII 
內文目錄 VIII 
圖目錄 XII 
CHAPTER1 緒論 1
1-1 前言 1
1-2 研究動機與介紹 2
CHAPTER 2 理論基礎與文獻回顧 5
2-1 電阻式轉換記憶體(RRAM) 5 
2-1-1 阻態轉換行為 6 
2-1-2 阻態轉換機制 8 
2-1-3 電容效應(Capacitive effect) 15 
2-1-4 潛行電流(Sneak current) 17
2-2 神經元(Neuron)與突觸(Synapse) 19 
2-2-1 神經元構造 19 
2-2-2 突觸(Synapse)與突觸可塑性(Synaptic plasticity) 20
2-3 憶阻器的物理模型 21
2-4 突破類神經網絡訓練困境-憶阻器建構之儲備池運算 30
2-4-1 人工神經網絡(Artificial neural networks，ANNs) 30 
2-4-2 儲備池運算(Reservoir computing，RC)的由來 33
2-4-3 憶阻器建構儲備池運算系統(Memristor-based RC system) 35
2-4-4 樹突行為模擬-動態電阻轉換憶阻器 39 
2-5 相關文獻與應用42 
2-5-1 用於高效時空(Spatial-Temporal)信息處理的基於憶阻器的樹突神經元 (Dendritic Neuron) 42 
2-5-2 使用動態憶阻器(dynamic memristors)進行時間信息(temporal information) 處理的儲備池運算 46 
2-5-3 用於實時(real-time)神經活動(neural activity)分析的憶阻器網絡(memristor networks) 51
CHAPTER 3 實驗方法與步驟 55
3-1 實驗材料 55 
3-1-1 基板 55 
3-1-2 基板清洗藥品 55 
3-1-3 金屬電極 56 
3-1-4 金屬氧化物 56 
3-1-5 實驗使用氣氛 57 
3-1-6 耗材 57
3-2 實驗設備 58 
3-2-1 乾式熱氧化系統 58 
3-2-2 濺鍍系統(Sputter system) 58
3-3 實驗流程 59 
3-3-1 基板清洗 59 
3-3-2 乾式熱氧化成長 SiO2 60 
3-3-3 清洗已成長 SiO2 之基板 60
3-3-4 元件製備 60 
3-4 分析儀器 61 
3-4-1 表面粗度儀(α-step) 61 
3-4-2 前瞻聚焦離子束系統(Advanced Focused Ion Beam System，FIB) 62 
3-4-3 穿透式電子顯微鏡(Transmission Electron Microscopy，TEM) 63 
3-4-4 精密半導體參數分析儀(Precision Semiconductor Parameter Analyzer) 64
CHAPTER4 結果與討論 65
4-1 元件結構與命名 65
4-2 材料分析與討論 67
4-3 三端式雙層結構電流分析 70
4-3-1 薄膜電晶體 I-V 轉換特性曲線與電流傳輸機制 70
4-3-2 連續刺激之增益與抑制行為 72 
4-4 兩端式元件基本電性量測與分析 75 
4-4-1 單層氧化物元件電性分析 75 
4-4-2 雙層氧化物憶阻器元件電性分析 77 
4-4-3 不同厚度條件對元件之電性分析 79 
4-4-4 不同掃幅條件對元件之電性分析 82
4-5 兩端式電流量測突觸元件操作 85
4-6 物理模型模擬及機制探討 89
4-6-1 非線性及短期記憶 89 
4-7 IGZO-TaOx 憶阻器於儲備池運算系統中電性操作 98 
4-7-1 四位元(4-bit)的輸入序列可應用於圖像辨識 98 
4-7-2 在不同時序的電脈衝訊號輸入下創建代表儲備池狀態(reservoir state)的虛擬節點(virtual nodes) 105
CHAPTER5 結論 110 
CHAPTER 6 參考文獻 111
                                    

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