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研究生：	洪銘鴻 Hung, Ming-hung
論文名稱：	混合式碳源之類鑽碳膜磨潤性能之研究 Tribological performance of mixed carbon source diamond-like carbon
指導教授：	蘇演良 Su, Yean-Liang
學位類別：	碩士 Master
系所名稱：	工學院 - 機械工程學系 Department of Mechanical Engineering
論文出版年：	2004
畢業學年度：	92
語文別：	中文
論文頁數：	100
中文關鍵詞：	混合式碳源、混合式碳源、類鑽碳
外文關鍵詞：	mixed carbon source, gaseous hydrocarbon, diamond-like carbon
相關次數：	點閱：128 下載：4
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　　本實驗利用非平衡磁控濺鍍法，於高速鋼底材上披覆混合式碳源摻鈦類鑽碳，混合不同碳氫氣體源：甲烷、乙炔、甲烷加乙炔及石墨固體靶做為類鑽碳膜的碳源，並加入鈦元素製備出混合式碳源摻鈦類鑽碳鍍膜。固定偏壓、靶材電流，探討混合式碳源摻鈦類鑽碳膜之顯微組織、機械特性與磨潤性能的變化，以及建立最佳氣體流量參數。最後，將鍍膜被覆於車刀與PCB微鑽針上，進行車削與鑽削實驗，以了解類鑽碳鍍膜切削特性。實驗分為三大部分，第一部份主要對於濺鍍機腔體內的碳氫氣體甲烷於不同流量為變化參數，第二部分則針對於濺鍍機腔體內的乙炔於不同流量為變化參數，第三部分是以甲烷混合乙炔作為鍍膜碳氫氣體源。

　　經由實驗結果可得知，鍍膜為非晶態結構，添加碳氫氣體有助於提升硬度，以甲烷流量為7sccm時具有最高硬度值24.74Gpa。由刮痕與壓痕試驗可知，以不同甲烷流量為濺鍍參數配合TiTiC中介層使用的鍍膜，對於高速鋼底材上的附著性，具有更廣泛性的運用。由磨耗試驗可得知，鍍膜不論在線磨50N、100N或點磨25N、10N下，僅添加少量的碳氫氣體6~7sccm之磨潤表現，會比沒有添加碳氫氣體或者添加較多碳氫氣體時更為出色。車削試驗的結果可知，添加碳氫氣體後車刀刀腹磨損量較未披覆與無添加碳氫氣體的鍍膜為佳。在PCB鑽削實驗方面，以甲烷流量7sccm的鍍膜NO.2表現最佳，約可提升刀具壽命為未被覆微鑽針的9倍。這顯示甲烷流量7sccm的類鑽碳鍍膜，的確有助於提升車刀與微鑽針的刀具壽命。

　　The aim of experiment is to mix different gaseous hydrocarbon source ：CH4, C2H2 and CH4+C2H2 with graphite target as the carbon sources of DLC and to dope titanium into the films which form-mixed carbon sources Ti-DLC deposited on the high speed steel substrate by closed-field unbalanced magnetron sputtering system. The main purpose of this study is to investigate the microstructures、mechanical properties and tribological performance of mixed carbon sources Ti-DLC films and to establish the best flow rate of the gaseous hydrocarbon sources under fixed deposition parameters：bias voltage of the substrate and current of the target. Finally, the film coated on the inserts and microdrills to understand the cutting performance. The study has three sections. In the first section, we change the methane of flow rate in the sputtering chamber. In the second section, we vary the acetylene of flow rate in the sputtering chamber. In the third section, we mix the methane and acetylene as the carbon sources of DLC.

　　The experiment results are shown that Diamond-like films have amorphous structure and increase the hardness with gaseous hydrocarbon into the films. When methane flow rate is 7sccm, the film has the highest hardness value 24.74Gpa. Through the result of scratch and impact test, the films co-operate methane and TiTiC medium layer can get more extensive applications on the high speed steel substrate. Among wear tests, only add a few gaseous hydrocarbon (6-7sccm) can be got the best tribology performance. In the turning tests, flank wears of the cutting tools with mixed carbon sources Ti-DLC that is better than uncoated and without adding gaseous hydrocarbon. In the PCB drilling tests, the NO.2 coating improved tool life about 9 times. It shows that the diamond-like carbon coating with 7sccm methane flow rate truly increase the tool life.

授權書………………………………………………………………………Ⅰ
考試合格證明書.……………………………………………………………Ⅱ
中文摘要…………….………………………………………………………Ⅲ
Abstract……………………………………………………………………Ⅳ
致謝…..……………………………………………………………………Ⅴ
總目錄………………………………………………………………………Ⅵ
表目錄 ………………………………………………………………………Ⅹ
圖目錄………………………………………………………………………ⅩI
第一章 緒論 …………………………………………………………………1
– 1 前言…………………………………………………………………1
– 2 研就動機……………………………………………………………2
第二章 理論基礎與文獻回顧………………………………………………3
2–1 類鑽碳…………………………………………………………………3
– 1 – 1 類鑽碳膜的由來……………………………………………3
– 1 – 2 類鑽碳膜之特性……………………………………………3
– 1 – 3 絕緣性………………………………………………………4
– 1 – 3 類鑽碳的分類………………………………………………5
– 1 – 3 類鑽碳的摩擦係數…………………………………………5
– 2 原子力顯微鏡………………………………………………………6
– 2 – 1 成像原理……………………………………………………6
– 2 – 1 接觸式………………………………………………………7
– 3 奈米壓痕之硬度與彈性模數………………………………………7
– 3 – 1 奈米壓痕之原理……………………………………………8
– 4  PCB鑽孔……………………………………………………………9
– 4 – 1 鑽針簡介……………………………………………………9
– 4 – 2 微鑽針磨耗破壞……………………………………………10
– 4 – 2 印刷電路板…………………………………………………10
第三章 實驗方法與內容 …………………………………………………11
– 1 實驗目的……………………………………….…………………11
– 2 實驗流程…………………………………………………………11
– 3 濺鍍參數與鍍膜安排………………………………………………11
– 4 實驗內容…………………………….……………………………12
– 4 – 1 鍍膜結構分析………………………………………………12
– 4 – 2 表面觀察….………………………………………………12
– 4 – 3 鍍膜成分分析………………………………………………13
– 4 – 4 硬度實驗……………………………………………………13
– 4 – 5 電阻率………………………………………………………14
– 4 – 6 附著性試驗…………………………………………………14
– 4 – 7磨耗實驗..……………………………………………………15
– 4 – 8 耐熱實驗……………………………………………………16
– 4 – 9 接觸角試驗…………………………………………………16
– 4 – 10 PCB鑽削實驗………………………………………………17
– 4 – 11車削實驗……………………………………………………17
– 5實驗所需設備………………………………………………………19
第四章 實驗結果與討論…………………………………………………21
– 1 鍍膜基本性質……………………………………………………21
– 1 – 1 流量對鍍膜表面粗糙度的關係……………………………21
– 1 – 2流量對膜後、成分的影響…………………………………22
– 1 – 3 鍍膜結晶結構、拉曼分析…………………………………22
– 1 – 4 鍍層硬度值…………………………………………………24
– 1 – 5 氣體流量與附著性之關係…………………………………25
– 1 – 6 接觸角..……….….………………………………………26
– 1 – 7氣體流量與導電性之關係…………………………………26
– 2 氣體流量與磨耗試驗之關係……………………………………27
– 2 – 1 SRV往復式磨耗試驗………………………………………27
– 2 – 2 Pin-On-Disc迴轉式磨耗試驗……………………………29
– 3 鍍膜的耐熱性能…………………………………………………29
– 4 微鑽針……………………………………………………………30
– 4 – 1 鑽削磨耗試驗……………………………………………30
– 4 – 2鑽削力量量測實驗…………………………………………31
– 5車削磨耗試驗………………………………………………………32
第五章 結論….……………………………………………………………33
– 1結論…………………………………………………………………33
– 2掺鈦非含氫含氫及混合式碳源類鑽碳膜之比較…………………34
– 3實驗心得與改進空間………………………………………………34
第六章 參考文獻…………………………………………………………36
附錄一	鍍膜表面型態圖 1X1 μm (AFM)………………………………82
附錄二	鍍膜斷面SEM圖 15000X………………………………………85
附錄三	鍍膜壓痕型態SEM圖100X………………………………………88
附錄四	鍍膜SRV摩擦係數圖……………………………………………90
附錄五	鍍膜SRV磨耗實驗結果…………………………………………93
附錄六	微鑽針磨耗SEM圖………………………………………………96

                                    

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校內：2005-06-24公開
校外：2006-06-24公開

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