超穎介面是一種由具有次波長尺度元素組成的介面，這些元素能夠編碼振幅、相位及偏振資訊，進而用於操控光的波前。近年來，這在平面光學元件的開發上取得了顯著的進展，例如在偏振轉換、全像成像、分光器、光學透鏡及光學感測的應用中。
這些平面光學元件通常是通過在介面上排布特定的相位資訊來產生特定的光學特徵。然而，過去的實驗中，通常只能量測整個介面的光強度及光學特性，無法確切得知製成完畢後的超穎介面相位分布是否與設計相符。由於製程技術的限制，製作完畢後的超穎介面在某些區域的尺寸難免會與設計尺寸有所差異。過往的實驗也因光點大小的限制，很難量測出超穎介面各區域的強度是否符合預期。
此研究工作中 ，我們通過整合相差顯微鏡及高光譜影像的優勢於新穎奈米光子系統中 ， 幫助分析超穎介面元件上編碼的空間相位與強度資訊是否符合預期 及製程誤差對樣品效能的影響。為了驗證此奈米光子系統的量測結果是否符合預期 ，們通設計了一組超穎介面並結合多重共振原理來調製相位，藉此探討量測數據與理論分析之間的相對關係 。通過這系系統，們通成功分析出結的的相位分布與設計相符，並藉由系統中的高光譜影像計算成功比較各區域因製程誤差產生的結果。在本論文最後也指出了這系系統目前存在的一些瑕疵，並也成功修正完畢。

In this research, we integrate the advantages of phase contrast microscopy and hyperspectral imaging into a novel nanophotonic system to analyze whether the spatial phase and intensity information encoded on the metasurface elements meet expectations and to understand the impact of fabrication errors on the sample's performance. To verify whether the measurement results of this nanophotonic system meet expectations, we designed a set of V-shaped metasurfaces and combined multiple resonance principles to modulate the phase, thereby exploring the relationship between the measurement data and theoretical analysis. Through this system, we successfully analyzed the phase distribution of the structure and found it to be consistent with the design. Additionally, using hyperspectral imaging within the system, we successfully compared the results of different regions caused by fabrication errors.

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