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研究生： 吳汶蒨
Wu, Wen-Chien
論文名稱： 添加不同氮氣和乙炔通量對高熵合金鍍層機械、抗腐蝕與磨潤性質之影響並應用於鎳基合金銑削試驗
Mechanical, anti-corrosion and tribological properties of high entropy coatings with various nitrogen and acetylene flux and applications on nickel-based alloy milling.
指導教授： 蘇演良
Su, Yen-Liang
學位類別： 碩士
Master
系所名稱： 工學院 - 機械工程學系
Department of Mechanical Engineering
論文出版年： 2021
畢業學年度： 109
語文別： 中文
論文頁數： 72
中文關鍵詞： 高熵合金鍍層 、磨潤性質 、機械性質 、抗腐蝕性質 、鎳基合金銑削
外文關鍵詞： High entropy alloy, Tribology, Mechanical properties, Nickel-based alloy milling
相關次數： 點閱：227  下載：0 
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    • 目前國內外對於高熵合金鍍層多探討其結構與基本性質，較少研究對於抗腐蝕性質、磨潤性質及實際應用上，因此本研究為提供一高熵合金資料庫，將對所有性質進行全面性分析及比較，此外因高熵合金高溫穩定性等特色，於實際應用上，本研究選擇將其被覆於刀具，並用於切削鎳基合金。
    本研究通過射頻偏壓DC非平衡磁控濺鍍製備含氮及含氮碳AlCrNbSiTi高熵合金鍍層，因應不同的實驗主軸，共分為三階段進行實驗。第一階段探討在不同氮通量下，鍍層機械性質、磨潤性質與抗腐蝕性質之變化，接著比較實驗結果，找出擁有最佳性能之鍍層，而第二階段以第一階段之最佳鍍層進一步添入乙炔，探討碳元素的添加及不同碳含量對鍍層性能的影響，第三階段則將前兩階段之最佳鍍層及未通氣體之高熵合金鍍層應用於鎳基合金銑削測試中，並為了比較，於此階段尚加入未鍍層之刀具、一般市面商用刀具(鍍製TiAlN)進行。
    第一階段結果顯示，氮氣通量的增加對於鍍層XRD結構無明顯變化，皆為非晶相，但對於鍍層硬度、磨潤性質與抗腐蝕性質卻有著顯著的提升。在硬度方面，當氮氣通入15 sccm以上時，其硬度會高於40 GPa，這是由於金屬氮化物鍵結的產生和固溶強化現象導致；而在磨潤性質與抗腐蝕性質方面，皆以高乙炔通量(15 sccm)之鍍層擁有最佳性能，它具有最低磨耗深度、磨耗率和腐蝕電流，其中磨耗深度及磨耗率分別為0.24 µm及0.4×10-6 mm3/N·m，原因為其具有高的H/E比、H3/E2比和最低的摩擦係數，腐蝕電流顯示0.27×10-7 A/cm2，導因於非晶結構、牢固的金屬氮化物鍵結和優異的附著性，因此綜合上述，第二階段將以氮氣通量15 sccm作為研究基底。
    第二階段結果說明，通入乙炔後鍍層結構發生明顯變化，XRD方面顯示添入乙炔後之鍍層結構都轉為FCC結構，且綜合評比鍍層各性能，包括機械性質、磨潤性質與抗腐蝕性質，皆較第一階段來的差，此外，經由實驗結果可見，在添入乙炔通量後，鍍層機械性質與抗腐蝕性質隨乙炔通量的上升而下降，主要原因與晶粒粗化及附著性的降低有關，於磨潤性質方面則呈相反趨勢，當乙炔通入12 sccm時擁有最佳性能，其磨耗率顯示為1.8×10-6 mm3/N·m。
    最後在第三階段鎳基合金銑削測試中，本實驗鍍層刀具與市售商用刀具相比來的差，其刀具磨耗量皆高於商用刀具，此原因推測與濺鍍時的高偏壓有關，高偏壓導致濺鍍時刀刃受損，不利於後續切削行為，此外比較所有鍍層刀具，以N15鍍層被覆之刀具有最優異之切削性能，這個結果符合前兩階段之研究趨勢。

    The AlCrNbSiTi high entropy alloy coatings were prepared by unbalanced magnetron sputtering. This study determines the effect of the nitrogen flux (0 to 20 sccm) and acetylene (6 to 12 sccm) on the phase composition, microstructure, mechanical properties, tribological properties, anti-corrosion property and machining performance of the coatings. The coatings were named as Nx and N15-CHy. Among them, the “x” in Nx is defined as nitrogen flux, and the “y” in N15-CHy is represented as acetylene flux. The nitride coatings all exhibit amorphous structure because of high mixing entropy effect and the large atomic-size difference. With increasing nitrogen flux, the hardness increases and reaches maximum values of 43.7 GPa (N15). Besides, in the wear tests and electrochemical tests, the coating with nitrogen flux of 15 sccm has the best performance. It exhibits the lowest wear rate (0.4×10-6 mm3/N·m) and corrosion current density (0.27×10-7A/cm2). After adding acetylene flux, all the performances decrease. Finally, the milling tests prove that the suitable addition of nitrogen (15 sccm) during the deposition process is beneficial in enhancing the machining performance of the coatings. Compared with other tools, it has the smallest tool wear depth after milling nickel-based alloys. From this, it can be seen that the coating with nitrogen flux of 15 sccm has great potential in cutting applications.

    考試合格證明 I 中文摘要 II Extended Abstract IV 誌謝 IX 目錄 X 表目錄 XIII 圖目錄 XIV 第一章 緒論 1 第二章 理論探討與文獻回顧 2 2-1 濺鍍系統 2 2-2 高熵合金介紹 2 2-3 高熵合金製程 3 2-4 高熵合金強化處理 5 2-5 鎳基合金介紹 6 2-6 本研究採用元素 7 第三章 實驗方法與步驟 9 3-1 研究目的 9 3-2 研究流程 9 3-3 鍍層製備 10 3-3-1 底材準備與靶材配製 10 3-3-2 各階段鍍層濺鍍參數 11 3-4 實驗方法 13 3-4-1 鍍層結構與成分分析 13 3-4-2 附著性試驗 14 3-4-3 硬度試驗 14 3-4-4 磨耗試驗 15 3-4-5 電化學腐蝕試驗 15 3-4-6 鎳基合金(Inconel 718)銑削試驗 16 3-5 實驗設備與廠商資訊 18 第四章 實驗結果與討論 20 4-1 第一階段-以氮氣通量為變因製備含氮高熵合金鍍層 20 4-1-1 EDS元素成分分析 20 4-1-2 XRD晶體結構分析 21 4-1-3 XPS化學鍵結分析 22 4-1-4 鍍層表面、斷面之結構分析 24 4-1-5 鍍層厚度、機械性質與附著性等基本性質分析 25 4-1-6 H/E比和H3/E2比之結果分析 28 4-1-7 鉻鋼球磨耗試驗 29 4-1-8 電化學試驗 34 4-1-9 第一階段結論 37 4-2 第二階段-以第一階段之最佳結果添加乙炔 38 4-2-1 EDS元素成分分析 38 4-2-2 XRD晶體結構分析 39 4-2-3 XPS化學鍵結分析 39 4-2-4 拉曼結構分析 40 4-2-5 鍍層表面、斷面之結構分析 41 4-2-6 鍍層厚度、機械性質與附著性等基本分析 42 4-2-7 H/E比和H3/E2比之結果分析 45 4-2-8 鉻鋼球磨耗試驗 45 4-2-9 電化學試驗 50 4-2-10 第二階段結論 51 4-3 第三階段-被覆鍍層於刀具上之銑削測試 52 4-3-1 刀具磨耗分析(OM) 52 4-3-2 刀具磨耗分析(SEM)-腐蝕前 54 4-3-3 刀具磨耗分析(SEM)-腐蝕後 58 4-3-4 第三階段結論 60 4-4 AlCrNbSiTi與TaNbSiZrCr高熵合金之結果比較與討論 61 第五章 結論 63 第六章 未來展望與發展 64 參考文獻 65

    1. M. Alauddin, M.A. E1 Baradie, M.S.J. Hashmi, Optimization Of Surface Finish In End Milling Inconel 718, J. Mater. Process. Technol. 56 (1996) 54-65.
    2. Y.S. Liao, H.M. Lin, J.H. Wang, Behaviors of end milling Inconel 718 superalloy by cemented carbide tools, J. Mater. Process. Technol. 201 (2008) 460-465.
    3. E.O. Ezugwu, J. Bonney, Y.Y. amane, An overview of the machinability of aeroengine alloys, J. Mater. Process. Technol. 134 (2003) 233-253.
    4. J.W. Yeh, S.K. Chen, S.J. Lin, J.Y. Gan, T.S. Chin, T.T. Shun, C.H. Tsau, S.Y. Chang, Nanostructured High-Entropy Alloys with Multiple Elements：Novel Alloy Design Concepts and Outcomes, Adv. Eng. Mater. 6 (2004) 299-303.
    5. J.W. Yeh, Recent Progress In High-Entropy Alloys, Ann. Chim. - Sci. Mat. 31 (2006) 633-648.
    6. P.J. Kelly, R.D. Arnell, Magnetron sputtering: a review of recent developments and applications, Vacuum 56 (2000) 159-172.
    7. K.B. Zhang, Z.Y. Fu, J.Y. Zhang, W.M. Wang, H. Wang, Y.C. Wang, Q.J. Zhang, J. Shi, Microstructure and mechanical properties of CoCrFeNiTiAlx high-entropy alloys, Mater. Sci. Eng. A 508 (2009) 214-219.
    8. N. Tüten, D. Canadinc, A. Motallebzadeh, B. Bal, Microstructure and tribological properties of TiTaHfNbZr high entropy alloy coatings deposited on Ti-6Al-4V substrates, Intermetallics 105 (2019) 99-106.
    9. D. Liu, X. Jin, N. Guo, P.K. Liaw, J.W. Qiao, Non-equiatomic FeMnCrNiAl high-entropy alloys with heterogeneous structures for strength and ductility combination, Mater. Sci. Eng. A 818 (2021) 141386.
    10. S. Varalakshmi, M. Kamaraj, B.S. Murty, Synthesis and characterization of nanocrystalline AlFeTiCrZnCu high entropy solid solution by mechanical alloying, J. Alloys. Compd. 460 (2008) 253-257.
    11. L.R. Kanyane, N. Malatji, A.P.I. Popoola, O.S.I Fayomi, Synthesis of equi-atomic Ti-Al-Mo-Si-Ni high entropy alloy via spark plasma sintering technique: Evolution of microstructure, wear, corrosion and oxidation behavior, Results Phys. 14 (2019) 102465.
    12. Y. Brif, M. Thomas, I. Todd, The use of high-entropy alloys in additive manufacturing, Scr. Mater. 99 (2015) 93-96.
    13. H. Yao, Z. Tan, D. He, Z. Zhou, Z. Zhou, Y. Xue, L. Cui, L. Chen, G. Wang, Y. Yang, High strength and ductility AlCrFeNiV high entropy alloy with hierarchically heterogeneous microstructure prepared by selective laser melting, J. Alloys. Compd. 813 (2020) 152196.
    14. Y. Guo, Q. Liu, MoFeCrTiWAlNb refractory high-entropy alloy coating fabricated by rectangular-spot laser cladding, Intermetallics 102 (2018) 78-87.
    15. L.M. Wang, C.C. Chen, J.W. Yeh, S.T. Ke, The microstructure and strengthening mechanism of thermal spray coating NixCo0.6Fe0.2CrySizAlTi0.2 high-entropy alloys, Mater. Chem. Phys. 126 (2011) 880-885.
    16. W.L. Hsu, H. Murakami, J.W. Yeh, A.C. Yeh, K. Shimoda, On the study of thermal-sprayed Ni0.2Co0.6Fe0.2CrSi0.2AlTi0.2 HEA overlay coating, Surf. Coat. Technol. 316 (2017) 71-74.
    17. S. Yin, W. Li, B. Song, X. Yan, M. Kuang, Y. Xu, K. Wen, R. Lupoi, Deposition of FeCoNiCrMn high entropy alloy (HEA) coating via cold spraying, J. Mater. Sci. Technol. 35 (2019) 1003-1007.
    18. C.H. Lin, J.G. Duh, J.W. Yeh, Multi-component nitride coatings derived from Ti–Al–Cr–Si–V target in RF magnetron sputter, Surf. Coat. Technol. 201 (2007) 6304-6308.
    19. N.D. Stepanov, N. Yu. Yurchenko, M.A. Tikhonovsky, G.A. Salishchev, Effect of carbon content and annealing on structure and hardness of the CoCrFeNiMn-based high entropy alloys, J. Alloys. Compd. 687 (2016) 59-71.
    20. Y.S. Jhong, C.W. Huang, S.J. Lin, Effects of CH4 flow ratio on the structure and properties of reactively sputtered (CrNbSiTiZr)Cx coatings, Mater. Chem. Phys. 210 (2018) 348-352.
    21. K.H. Cheng, C.H. Lai, S.J. Lin, J.W. Yeh, Structural and mechanical properties of multi-element (AlCrMoTaTiZr)Nx coatings by reactive magnetron sputtering, Thin Solid Films 519 (2011) 3185-3190.
    22. Y. Wang, Y. Yang, H. Yang, M. Zhang, S. Ma, J. Qiao, Microstructure and wear properties of nitrided AlCoCrFeNi high-entropy alloy, Mater. Chem. Phys. 210 (2018) 233-239.
    23. T. Fedorova, J. Rosler, J. Klower, B. Gehrmann, Development of a new 718-type Ni-Co superalloy family for high temperature applications at 750◦C, MATEC Web of Conferences 14 (2014) 01003.
    24. https://www.emuge.com/media-resources/news/new-emuge-tinox-cut-end-mills-are-designed-cutting-inconel-718-titanium-and-tough-stainless.
    25. https://www.iscar.com/Products.aspx/CountryId/39/ProductId/40.
    26. W. J. Shen, M. H. Tsai, K. Y. Tsai, C. C. Juan, C. W. Tsai, J. W. Yeh, Y. S. Chang, Superior Oxidation Resistance of (Al0.34Cr0.22Nb0.11Si0.11Ti0.22)50N50 High-Entropy Nitride, J. Electrochem. Soc. 160 (2013) C531-C535.
    27. W.H. Kao, Y.L. Su, J.H. Horng, C.M. Wu, Structure, mechanical properties and thermal stability of nitrogen-doped TaNbSiZrCr high entropy alloy coatings and their application to glass moulding and micro-drills, Surf. Coat. Technol. 405 (2021) 126539.
    28. W.H. Kao, Y.L. Su, J.H. Horng, H.M. Wu, Effects of carbon doping on mechanical, tribological, structural, anti-corrosion and anti-glass-sticking properties of CrNbSiTaZr high entropy alloy coatings, Thin Solid Films 717 (2021) 138448.
    29. W.H. Kao, Y.L. Su, J.H. Horng, W.C. Wu, Mechanical, tribological, anti-corrosion and anti-glass sticking properties of high-entropy TaNbSiZrCr carbide coatings prepared using radio-frequency magnetron sputtering, Mater. Chem. Phys. 268 (2021) 124741.
    30. C.H. Lai, S.J. Lin, J.W. Yeh, S.Y. Chang, Preparation and characterization of AlCrTaTiZr multi-element nitride coatings, Surf. Coat. Technol. 201 (2006) 3275-3280.
    31. P. Cui, W. Li, P. Liu, K. Zhang, F. Ma, X. Chen, R. Feng, P.K. Liaw, Effects of nitrogen content on microstructures and mechanical properties of (AlCrTiZrHf)N high-entropy alloy nitride films, J. Alloys. Compd. 834 (2020) 155063.
    32. H.D. Mannling, D.S. Patil, K. Moto, M. Jilek, S. Veprek, Thermal stability of superhard nanocomposite coatings consisting of immiscible nitrides, Surf. Coat. Technol. 146-147 (2001) 263-267.
    33. G. Wu, S. Ma, K. Xu, V. Ji, P.K. Chu, Oxidation resistance of quintuple Ti-Al-Si-C-N coatings and associated mechanism, J. Vac. Sci. Technol. A 30 (2012) 041508.
    34. M.P. Brady, J.H. Zhu, C.T. Liu, P.F. Tortorelli, L.R. Walker, Oxidation resistance and mechanical properties of Laves phase reinforced Cr in-situ composites, Intermetallics 8 (2000) 1111-1118.
    35. J.P. Lin, L.L. Zhao, G.Y. Li, L.Q. Zhang, X.P. Song, F. Ye, G.L. Chen, Effect of Nb on oxidation behavior of high Nb containing TiAl alloys, Intermetallics 19 (2011) 131-136.
    36. Z.T. Wu, Z.B. Qi, D.F. Zhang, B.B. Wei, Z.C. Wang, Evaluating the influence of adding Nb on microstructure, hardness and oxidation resistance of CrN coating, Surf. Coat. Technol. 289 (2016) 45-51.
    37. X. Liu, H. Cheng, Z. Li, H. Wang, F. Chang, W. Wang, Q. Tang, P. Dai, Microstructure and mechanical properties of FeCoCrNiMnTi0.1C0.1 high-entropy alloy produced by mechanical alloying and vacuum hot pressing sintering, Vacuum 165 (2019) 297-304.
    38. B. Lenz, H. Hasselbruch, A. Mehner, Automated evaluation of Rockwell adhesion tests for PVD coatings using convolutional neural networks, Surf. Coat. Technol. 385 (2020) 125365.
    39. S.A. Sajjadi, A. Chaichi, H.R. Ezatpour, A. Maghsoudlou, M.A. Kalaie, Hot Deformation Processing Map and Microstructural Evaluation of the Ni-Based Superalloy IN-738LC, J. Mater. Eng. Perform. 25 (2016) 1269-1275.
    40. K. v. Fieandt, L. Riekehr, B. Osinger, S. Fritze, E. Lewin, Influence of N content on structure and mechanical properties of multi-component Al-Cr-Nb-Y-Zr based thin films by reactive magnetron sputtering, Surf. Coat. Technol. 389 (2020) 125614.
    41. S.C. Liang, D.C. Tsai, Z.C. Chang, H.S. Sung, Y.C. Lin, Y.J. Yeh, M.J. Deng, F.S. Shieu, Structural and mechanical properties of multi-element (TiVCrZrHf)N coatings by reactive magnetron sputtering, Appl. Surf. Sci. 258 (2011) 399-403.
    42. M. Braic, M. Balaceanu, A. Vladescu, C.N. Zoita, V. Braic, Deposition and characterization of multi-principal-element (CuSiTiYZr)C coatings, Appl. Surf. Sci. 284 (2013) 671-678.
    43. H.T. Hsueh, W.J. Shen, M.H. Tsai, J.W. Yeh, Effect of nitrogen content and substrate bias on mechanical and corrosion properties of high-entropy films (AlCrSiTiZr)100 – xNx, Surf. Coat. Technol. 206 (2012) 4106-4112.
    44. S.K. Bachani, C.J. Wang, B.S. Lou, L.C. Chang, J.W. Lee, Fabrication of TiZrNbTaFeN high-entropy alloys coatings by HiPIMS: Effect of nitrogen flow rate on the microstructural development, mechanical and tribological performance, electrical properties and corrosion characteristics, J. Alloys. Compd. 873 (2021) 159605.
    45. C.W. Tsai, S.W. Lai, K.H. Cheng, M.H. Tsai, A. Davison, C.H. Tsau, J.W. Yeh, Strong amorphization of high-entropy AlBCrSiTi nitride film, Thin Solid Films 520 (2012) 2613-2618.
    46. V. Braic, A. Vladescu, M. Balaceanu, C.R. Luculescu, M. Braic, Nanostructured multi-element (TiZrNbHfTa)N and (TiZrNbHfTa)C hard coatings, Surf. Coat. Technol. 211 (2012) 117-121.
    47. C.T. Lynch, Robert Summitt, Alan Sliker, CRC Handbook of Materials Science, CRC Press, Cleveland, 1974.
    48. D.C. Tsai, Z.C. Chang, B.H. Kuo, M.H. Shiao, S.Y. Chang, F.S. Shieu, Structural morphology and characterization of (AlCrMoTaTi)N coating deposited via magnetron sputtering, Appl. Surf. Sci. 282 (2013) 789-797.
    49. S.Y. Chang, S.Y. Lin, Y.C. Huang, C.L. Wu, Mechanical properties, deformation behaviors and interface adhesion of (AlCrTaTiZr)Nx multi-component coatings, Surf. Coat. Technol. 204 (2010) 3307-3314.
    50. D. Güttler, B. Abendroth, R. Grötzschel, and W. Möller, D. Depla, Mechanisms of target poisoning during magnetron sputtering as investigated by real-time in situ analysis and collisional computer simulation, Appl. Phys. Lett. 85 (2004) 6134.
    51. H.W. Chang, P.K. Huang, A. Davison, J.W. Yeh, C.H. Tsau, C.C. Yang, Nitride films deposited from an equimolar Al–Cr–Mo–Si–Ti alloy target by reactive direct current magnetron sputtering, Thin Solid Films 516 (2008) 6402–6408.
    52. Z.C. Chang, Structure and properties of duodenary (TiVCrZrNbMoHfTaWAlSi)N coatings by reactive magnetron sputtering, Mater. Chem. Phys. 220 (2018) 98-110.
    53. B. Ren, S.Q. Yan, R.F. Zhao, Z.X. Liu, Structure and properties of (AlCrMoNiTi)Nx and (AlCrMoZrTi)Nx films by reactive RF sputtering, Surf. Coat. Technol. 235 (2013) 764-772.
    54. C.H. Chang, C.B. Yang, C.C. Sung, C.Y. Hsu, Structure and tribological behavior of (AlCrNbSiTiV)N film deposited using direct current magnetron sputtering and high power impulse magnetron sputtering, Thin Solid Films 668 (2018) 63-68.
    55. P.F. Lang, B.C. Smith, An equation to calculate internuclear distances of covalent, ionic and metallic lattices, Phys. Chem. Chem. Phys. 17 (2015) 3355-3369.
    56. A.L. Allred, Electronegativity Values From Thermochemical Data, L Inorg. Nucl. Chem. 17 (1961) 215-221.
    57. B. Ren, Z.X. Liu, L. Shi, B. Cai, M.X. Wang, Structure and properties of (AlCrMnMoNiZrB0.1)Nx coatings prepared by reactive DC sputtering, Appl. Surf. Sci. 257 (2011) 7172-7178.
    58. Y. Fu, H. Du, C. Q. Sun, Interfacial structure, residual stress and adhesion of diamond coatings deposited on titanium, Thin Solid Films 424 (2003) 107–114.
    59. O. Knotek, R. Elsing, G. Kramer, F. Jungblutt, On the origin of compressive stress in PVD coatings — an explicative model, Surf. Coat. Technol. 46 (1991) 265-274.
    60. J.K. LANCASTER, The relationship between the wear of carbon brush materials and their elastic moduli, BRIT. J. APPL. PHYS. 14 (1963) 497.
    61. A. Leyland, A. Matthews, On the significance of the H/E ratio in wear control: a nanocomposite coating approach to optimised tribological behavior, Wear 246 (2000) 1–11.
    62. P.H. Mayrhofer, C. Mitterer, J. Musil, Structure–property relationships in single- and dual-phase nanocrystalline hard coatings, Surf. Coat. Technol. 174-175 (2003) 725–731.
    63. A.J.W. Moore, W.J. McG. Tegart, Relation between friction and hardness, Proc. Roy. Soc. A 212 (1952) 452-458.
    64. X. Zhang, J. Guo, X. Zhang, Y. Song, Z. Li, X. Xing, D. Kong, Influence of remelting and annealing treatment on corrosion resistance of AlFeNiCoCuCr high entropy alloy in 3.5% NaCl solution, J. Alloys. Compd. 775 (2019) 565-570.
    65. M.S. Bakare, K.T. Voisey, K. Chokethawai, D.G. McCartney, Corrosion behaviour of crystalline and amorphous forms of the glass forming alloy Fe43Cr16Mo16C15B10, J. Alloys. Compd. 527 (2012) 210-218.
    66. M. Naka, K. Hashimoto, T. Masumoto, Corrosion Behavior Of Amorphous And Crystalline Cu50Ti50 And Cu50Zr50 Alloys, J. Non. Cryst. Solids. 30 (1978) 29-36.
    67. R.A. Dickie, Paint adhesion, corrosion protection, and interfacial chemistry, Prog. Org. Coat. 25 (1994) 3-22.
    68. S.Y. Chang, S.Y. Lin, Y.C. Huang, Microstructures and mechanical properties of multi-component (AlCrTaTiZr)NxCy nanocomposite coatings, Thin Solid Films 519 (2011) 4865-4869.
    69. C.F. Lv, G.F. Zhang, B.S. Cao, Y.Y. He, X.D. Hou, Z.X. Song, Structure and mechanical properties of a-C/(AlCrWTaTiNb)CxNy composite films, Surf. Eng. 32 (2016) 541-546.
    70. U.C. Oh, J.H. Je, Effects of strain energy on the preferred orientation of TiN thin films, J. Appl. Phys. 74 (1993) 1692-1696.
    71. Q. Wei, J. Narayan, Superhard diamondlike carbon: preparation, theory, and propertie, Int. Mater. Rev. 45 (2000) 133-164.
    72. R. Saito, M. Hofmann, G. Dresselhaus, A. Jorio, M.S. Dresselhaus, Raman spectroscopy of graphene and carbon nanotubes, Adv. Phys. 60 (2011) 413-550.
    73. R. Memming, H.J. Tolle, Properties of polymeric layers of hydrogenated amorphous carbon produced by a plasma-activated chemical vapour deposition process II: Tribological and mechanical properties, Thin Solid Films 143 (1986) 31-41.
    74. A. Erdemir, C. Bindal, G.R. Fenske, C. Zuiker, P. Wilbur, Characterization of transfer layers forming on surfaces sliding against diamond-like carbon, Surf. Coat. Technol. 86-87 (1996) 692-697.
    75. D.C. Sutton, G. Limbert, D. Stewart, R.J.K. Wood, The friction of diamond-like carbon coatings in a water environment, Friction 1 (2013) 210-221.
    76. E. Budke, J.K. Hesse, H. Maidhof, H. Schu¨ssler, Decorative hard coatings with improved corrosion resistance, Surf. Coat. Technol. 112 (1999) 108-113.
    77. J.H. Hsieh, C. Liang, C.H. Yu, W. Wu, Deposition and characterization of TiAlN and multi-layered TiN/TiAlN coatings using unbalanced magnetron sputtering, Surf. Coat. Technol. 108-109 (1998) 132-137.
    78. L. Aihua, D. Jianxin, C. Haibing, C. Yangyang, Z. Jun, Friction and wear properties of TiN, TiAlN, AlTiN and CrAlN PVD nitride coatings, Int. J. Refract. Hard. Met. 31 (2012) 82-88.
    79. C. Xue, W. Chen, Adhering layer formation and its effect on the wear of coated carbide tools during turning of a nickel-based alloy, Wear 270 (2011) 895-902.
    80. X. Liang, Z. Liu, B. Wang, Multi-pattern failure modes and wear mechanisms of WC-Co tools in dry turning Ti–6Al–4V, Ceram. Int. 46 (2020) 24512-24525.
    81. A. Jawaid, S. Koksal, S. Sharif, Cutting performance and wear characteristics of PVD coatedand uncoated carbide tools in face milling Inconel 718 aerospace alloy, J. Mater. Process. Technol. 116 (2001) 2-9.
    82. P. Panjana, I. Bonina, J. Bevk, M. Cˇ ekada, PVD hard coatings applied for the wear protection of drawing dies, Surf. Coat. Technol. 200 (2005) 133-136.
    83. L. Wang, G. Zhang, R.J.K. Wood, S.C. Wang, Q. Xue, Fabrication of CrAlN nanocomposite films with high hardness and excellent anti-wear performance for gear application, Surf. Coat. Technol. 204 (2010) 3517-3524.
    84. B. Navingek, P. Panjan, A. Cvelbar, Characterization of low temperature CrN and TiN (PVD) hard coatings, Surf. Coat. Technol. 74-75 (1995) 155-161.
    85. A. A. Voevodin, C. Muratore, S. M. Aouadi, Hard coatings with high temperature adaptive lubrication and contact thermal management: review, Surf. Coat. Technol. Vol. 257, (2014) 247-265.

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