薄膜製程的應用十分廣泛，常見於半導體、光電、微機電等領域，其熱性質也相當重要，薄膜熱傳導係數便是探討的重點。許多產品元件在進行熱傳設計的時候，常以塊材的熱傳導係數代入計算，薄膜與塊材的熱傳導係數有一定程度的差異，因而造成熱傳分析上的誤差。
本研究為利用溫度波分析法對於濺鍍之二氧化矽薄膜進行實驗，量測其熱傳導係數，找到不同厚度適合的溫度振盪頻率，並針對各項可能對薄膜熱傳導係數造成影響的因素進行研究，探討的內容包括溫度、基板、晶格排列、厚度、鍍製方法。以實驗的方式觀察這些因素是否會影響薄膜的熱傳導係數。
本研究發現將薄膜鍍製在不同的基板上，並不會影響到薄膜熱傳導係數；因為尺寸效應，薄膜的厚度不同，實驗量測得到的熱傳導係數也會不一樣；晶格排列在常溫情況下，晶相與非晶相薄膜之熱傳導係數沒有明顯的差距，但在變溫情況下，兩者差距有隨著溫度升高而擴大的趨勢；不同的鍍製方法，會影響到薄膜的孔隙率，進而導致量測得到的薄膜熱傳導係數不同。

The application of thin film procedures are widely used in Semiconductors, Optoelectronics, Microelectromechanical Systems, and other fields. Its thermal properties are also very important. The thermal conductivity of the thin film is the focus of discussion. When considering the heat transfer of the product, the thermal conductivity of the bulk material is often substituted into the calculation. There is a difference between the thermal conductivity of the thin film and the bulk material, which causes errors in the heat transfer analysis.
This research is based on the Temperature Wave Analysis method to do experiments on the sputtered silicon dioxide film, measure the thermal conductivity to find the suitable temperature oscillation frequency for different thicknesses, and research various factors that affect the thermal conductivity of the film. The contents discuss include temperature, substrate, lattice arrangement, thickness, and various thin film methods. This research observes experimentally whether these factors will affect the thermal conductivity of the thin film.
This study find that coating the thin film on different substrates does not affect the thermal conductivity of the thin film. Because of the size effect, the thickness of the film is different, and the thermal conductivity measured by the experiment will also be different. When the crystal lattice is arranged at room temperature, there is no obvious difference between the thermal conductivity of the crystalline phase and the amorphous phase film, but in the case of changing temperature, the gap between the two phases have a tendency to expand as the temperature rises. Different thin film methods will affect the porosity of the film. In turn, the measured thermal conductivity of the film is different.

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