本研究採用非平衡磁控濺鍍法製備一系列含氫類鑽碳鍍層，探討鍍層之成份、組織、結構、基本機械性質、磨潤性質、抗腐蝕性等。進一步進行微鑽削和抗菌性等應用之研究，抗菌性能評估採在鍍層表面培養金黃色葡萄球菌執行。
鍍層製備參數研究採兩個階段進行：第一階段探討中介層的影響，以單一類鑽碳鍍層成長在兩種不同中介層上(TiC/Ti及CrC/Cr)，選用機械及磨潤性質較佳塗層之中介層，以為後續使用。第二階段採乙炔氣體作為氫源，調整製程中的乙炔流量0-24sccm，製備一系列不同含氫量類鑽碳鍍層，分析氫對於性質的影響。
研究得到以下一系列結果：使用TiC/Ti為中介層的類鑽碳鍍膜具有較佳的附著性、機械性質及耐磨耗性質。隨著乙炔流量增加，鍍層之含氫量及鍍層厚度(1.4-3.1µm)均有明顯增加。乙炔流量8 sccm (a-C:H08, a: amorphous)下所製備的鍍層具有最高比例的sp3混成鍵結，因而具有最高奈米硬度(15.4GPa)與最低磨耗率(0.053*10-6 mm3/Nm)。在微鑽削試驗中，與未披覆鍍層的微鑽針相比，能夠降低39.7%的刀具磨耗面積。在電化學試驗中，a-C:H08鍍層擁有最佳的抗腐蝕表現。在抗菌性能方面，乙炔流量0 sccm (DLC)製備的鍍層，接觸角為98.2°，具最高的疏水性，經24小時培養後抗菌效率達到最高的69.8%。

In this study, a series of hydrogenated diamond-like carbon (H-DLC) coatings were deposited by using an unbalanced magnetron sputtering system. The chemical compo-sition, micro-structure, constituted phases and fundamental mechanical, tribological and corrosive properties, etc. were evaluated. Further study on applications was car-ried out in micro-drilling and anti-bacterial tests. The anti-bacterial behavior was as-sessed by using Staphylococcus aureus incubated on the coating surface.
The study on coating conditions consisted of two stages. In the first stage, the effect of interface on the single DLC coating was evaluated. Two interface layers, TiC/Ti and CrC/Cr, were evaluated. The interface that resulted in DLC coating showing overall better mechanical and tribological performance was used in the following study. In the stage two, to obtain the H-DLC coatings, the acetylene gas was used as the hydrogen source. A series of H-DLC coatings doped with a varying content of H were prepared. The acetylene flow rate ranging 0 - 24 sccm was used. The influence of H content was then studied.
Some important results are as follows: The DLC coating on the TiC/Ti interlayer showed higher adhesion, hardness and wear resistance than on the CrC/Cr interlayer. The hydrogen content and coating thickness (1.4-3.1 µm) increased as the flow rate of acetylene gas increased. The H-DLC coating (a-C:H08, a: amorphous) prepared at flow rate 8 sccm of acetylene gas showed the highest sp3 bond ratio of all the coatings evaluated, the highest hardness (15.4GPa) and the lowest wear rate (0.053*10-6mm3/Nm). In the drilling test, the a-C:H08 coating reduced the wear area on the micro-drill by 39.7% as compared to the uncoated micro-drill. In the electro-chemical corrosion test, the a-C:H08 coating showed the highest corrosive resistance. The single DLC coating, due to its highest hydrophobic surface (contact angle 98.24°), showed the best anti-bacterial efficiency 69.8% after 24h incubation.

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