本研究利用準分子雷射微細加工技術，在厚度為25微米之PVDF壓電薄膜上製作四通道壓力陣列感測器，同時設計一對一的緩衝器電路來調整感測器的頻寬，所完成的壓力陣列感測器在氣體震波管中進行動態校正，最後將校正過的陣列感測器應用於量測空蝕汽泡對鄰近固體表面衝擊壓力之分佈及變化情形。

In this research, we utilize an excimer laser micro-machining technique to fabricate a four-channel array transducer on a 25-μm-thick PVDF piezoelectric film. A one-to-one buffer circuit is then designed to adjust the bandwidth of the transducer. Dynamic calibration of the array transducer is accomplished in a gas shock tube. Finally, the calibrated array transducer is used to measure the spatial distribution and tempered variation of the impulsive pressure induced by the collapse of a cavitation bubble close to a solid boundary.

Arndt, R.E.A., Paul, S. and Ellis, C.R., Application of piezoelectric film in cavitation research, Journal of Hydraulic Engineering, vol. 123, pp. 539-548, (1997)

Benjamin, T.B. and Ellis, A.T., The collapse of cavitation bubbles and the pressure thereby produced against solid boundaries, Philosophical Transactions of the Royal Society of London. Series A, Mathematical and Physical Sciences, vol. 260(1110), pp. 221-240, (1966)

Bloomfield, P.E., Castro, F. and Goeller R.M., Design, processing, evaluation and characterization of pyroelectric PVDF copolymer/silicon mosfet detector arrays, In: Proceedings of the 9th IEEE International Symposium on Applications of Ferroelectrics, University Park, PA, USA, pp. 752-728, (1994)

Brujan, E.A., Keen, G.S., Vogel, A. and Blake, J.R., The final stage of the collapse of a cavitation bubble close to a rigid boundary, Physics of Fluids, vol. 14(1), p 85-92, (2002)

Filali, E.G., Michel, J.M., Hattori, S. and Fujikawa, S., The cavermod device: force measurements, Journal of Fluids Engineering, Transactions of the ASME, vol. 121(2), pp. 312-317, (1999)

Freitag, R. and Meixner, H., PVDF sensor array for human body detection, Proceedings 6th International Symposium on Electrets (ISE 6), pp. 374-378, (1988)

Freitag, R. and Meixner, H., Sensor array for human-body detection based on pyroelectric polyvinylidene fluoride, IEEE Transactions on Electrical Insulation, vol. 24, pp. 469-472, (1989)

Gaydon, A.G. and Hurle, I.R., The shock tube in high-temperature chemical physics, Reinhold Pub. Corp., New York, (1963)

Kolesar, E.S., Dyson, C.S., Reston, R.R., Fitch, R.C., Ford, D.G. and Nelms, S.D., Tactile integrated circuit sensor realized with a piezoelectric polymer, In: Proceedings of the 1996 8th Annual IEEE International Conference on Innovative Systems in Silicon, Austin, TX, USA, pp. 372-381, (1996)

Lally, J. and Cummiskey, D., Dynamic Pressure Calibration, Sensors, vol. 20(4), (2003)

Lee, I. and Sung, H.J., Development of an array of pressure sensors with PVDF film, Experiments in Fluids, vol. 26(1-2), pp. 27-35, (1999)

Lee, Yung-Chun, Yu, Jhih-Ming and Huang, Shiang-Wen, Fabrication and Characterization of a PVDF Hydrophone Array Transducer, Key Engineering Materials, vol. 270-273, pp. 1406-1413, (2004)

Lindau, Olgert and Lauterborn, Werner, Cinematographic observation of the collapse and rebound of a laser-produced cavitation bubble near a wall, Journal of Fluid Mechanics, vol. 479, pp. 327-348, (2003)

Measurement Specialties, Inc., Piezo film sensors technical manual, 1999
Naude, C.F. and Ellis, A.T., On the mechanism of cavitation damage by non-hemispherical cavities in contact with a solid boundary, Transactions of the ASME, journal of basic engineering, vol. 83, pp. 648-656, (1961)

Ohl, C.D., Philipp, A. and Lauterborn, W., Cavitation bubble collapse studied at 20 million frames per second, Annalen der Physik, vol. 4, pp. 26-34, (1995)

Philipp, A. and Lauterborn, W., Cavitation erosion by single laser-produced bubbles, Journal of Fluid Mechanics, vol. 361, pp. 75-116, (1998)

Rayleigh, Lord, On the pressure developed in a liquid during the collapse of a spherical cavity, Phil. Mag., vol. 34, pp. 94-98, (1917)

Shima, A., Takayama, K., Tomita, Y. and Ohsawa N., Mechanism of Impact Pressure Generation from Spark-Generated Bubble Collapse Near a Wall, AIAA Journal, vol. 21(1), pp. 55-59, (1983)

Tomita, Y. and Shima, A., Mechanisms of impulsive pressure generation and damage pit formation by bubble collapse, Journal of Fluid Mechanics, vol. 169, pp. 535-564, (1986)

Tong, R.P., Schiffers, W.P., Shaw, S.J., Blake, J.R. and Emmony, D.C., Role of 'splashing' in the collapse of a laser-generated cavity near a rigid boundary, Journal of Fluid Mechanics, vol. 380, pp. 339-361, (1999)

Ward, B. and Emmony, D.C., Interferometric studies of the pressure developed in a liquid during infrared-laser-induced cavitation cavitation bubble oscillation, Infrared Physics. vol. 32, pp. 489-515, (1991)

陳郁文, “利用壓電薄膜量測空蝕氣泡對鄰近物體表面所造成之衝擊力”, 國立成功大學機械工程研究所碩士論文, 2001.

郭志祥, “水電式汽泡產生器的特性研究”, 國立成功大學機械工程研究所碩士論文, 2003.