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研究生: 張裕昀
Chang, Yu-yun
論文名稱: 製備堇青石與氮化鋁複合材料之燒結性質研究
On the Preparation and Sintering Properties of Cordierite and Aluminum Nitride Composites
指導教授: 申永輝
D.SHEN
溫紹炳
Wen, Shaw-Bing
學位類別: 碩士
Master
系所名稱: 工學院 - 資源工程學系
Department of Resources Engineering
論文出版年: 2008
畢業學年度: 96
語文別: 中文
論文頁數: 80
中文關鍵詞: 熱傳導係數溶膠–凝膠法氮化鋁堇青石
外文關鍵詞: thermal conductivity, sol-gel, AlN, cordierite
相關次數: 點閱:60下載:3
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  • 堇青石(2MgO•2Al2O3•5SiO2) 是一種重要的陶瓷材料,因具有低熱膨脹係數、低介電係數、高電阻係數,在工業上的用途非常廣泛,近年更是電子工業上一個極具潛力的材料。
    本研究以硝酸鎂、硝酸鋁、TEOS(矽酸乙酯)為起始原料,溶膠–凝膠法製備堇青石粉末。為了提高堇青石熱傳導性質,以濕混方式分別添加0 wt%~30 wt%氮化鋁粉末,由於氮化鋁於高溫下容易氧化生成氧化鋁,本研究以碳黑與氮化硼作為空氣阻隔劑,有別於一般以還原氣氛爐燒結之製程。此外,由於氮化鋁燒結溫度過高且堇青石燒結不易,故本研究添加氧化鉍為燒結助劑,以期製備緻密之堇青石–氮化鋁陶瓷燒結體。
    研究結果顯示煆燒溫度對堇青石粉末粒徑影響不大,主要造成相變的產生,μ–堇青石相變為α–堇青石的溫度約為1300℃。添加10 wt%氮化鋁於1250℃持溫6小時之燒結體可得到最高相對密度96.65%、線收縮率27.27%。堇青石–氮化鋁燒結體介電係數均介於4~5,符合低介電材料需求,添加15 wt%氮化鋁之燒結體可得到最佳品質因子2592.7(MHz)。添加10 wt%氮化鋁於1350℃持溫6小時之燒結體可得到最高熱傳導係數,其值為8.14W/mK。

    Cordierite is an important ceramic material and widely used in industry for its low thermal expansion coefficient, low dielectric constant, and high resistivity. In recent years, cordierite is regarded as a greatly potential material in electronic industry. However its thermal conductivity is too low to limit its application. Thesis studied the composite of cordierite and aluminum nitride to improve thermal conductivity properties of cordierite.
    The cordierite was synthesized with magnesium nitrate, aluminum nitrate, and tetraethyl orthosilicate by sol-gel method. The composite was composed by cordierite mixing with 0 wt%~30 wt% AlN in to promote the thermal conductivity. The ceramic body was buried with carbon black and boron nitride to avoid air oxidation of AlN in high temperature. This thesis also used bismuth oxide as sintering aids to decrease the sintering temperature of AlN and cordierite composites.
    Results showed the calcination temperature is was influential not only to the grain size of cordierite but also to the phase transition. The temperature μ-cordierite phase transited to α-cordierite phase was 1300℃. The composites with 10 wt% AlN sintered at 1250℃ for 6 h had the highest relative density of 96.7%, and linear shrinkage 27.3%. All composites had the dielectric constant between 4~5 corresponded with the demand of low dielectric constant materials. The composites with 15 wt% AlN had the best quality factor 2592.7(MHz). The composites with 10 wt% AlN sintered at 1350℃ or 6 h had the best thermal conductivity of 8.14w/mK.

    摘要 I Abstract II 誌謝 III 目錄 IV 圖目錄 VI 表目錄 IX 第一章 緒論 1 1.1 前言 1 1.2 文獻回顧 3 1.2.1 以溶膠–凝膠法製備堇青石 3 1.2.2 堇青石–氮化鋁複合材料燒結 4 1.3 研究動機與目的 7 第二章 理論基礎 8 2.1 堇青石的構造及特性 8 2.2 氮化鋁的結構及特性 14 2.3 氧化鉍的結構與特性 16 2.4 固相燒結理論 21 2.5 液相燒結理論 25 2.6 電路基板所需之材料性質 28 第三章 實驗方法與步驟 32 3.1 實驗流程與方法 32 3.1.1 堇青石前導物粉末之製備 32 3.1.2 生胚及燒結體的製備 33 3.2 實驗藥品與儀器 36 3.2.1 實驗藥品 36 3.2.2 實驗儀器 37 3.3 性質分析 39 第四章 結果與討論 43 4.1 起始粉末之性質分析 43 4.1.1 堇青石前導物粉末之熱性質分析 43 4.1.2 起始粉末之晶相分析 45 4.1.2.1 煆燒溫度對堇青石前導物之影響 45 4.1.2.2 氮化鋁起始粉末之晶相分析 46 4.1.3 起始粉末之雷射粒徑分析 47 4.1.4 起始粉末之顯微觀察 49 4.2 堇青石–氮化鋁燒結體之性質分析 51 4.2.1 堇青石–氮化鋁燒結體之晶相分析 51 4.2.2 堇青石–氮化鋁燒結體相對密度及線收縮率之分析 56 4.2.3 堇青石–氮化鋁燒結體介電係數與品質因子之分析 60 4.2.4 堇青石–氮化鋁燒結體熱傳導係數之分析 65 4.2.5 堇青石–氮化鋁燒結體顯微結構分析 67 4.3 堇青石–氮化鋁製程综合比較 72 第五章 結論與建議 74 5.1 結論 74 5.2 建議與未來研究方向 76 參考文獻 77

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