這個研究的目標是建立一套理論模型，描述離子植入靶材後的濃度分佈，以預測植入後的材料組成及顯現出的材料特性，進而就我們的需求以改變植入離子、底材、各種植入條件的方式，獲得所需的材料特性。本研究藉由碰撞力學與電動力學，計算出離子進入靶材後的射程，再配合統計學得到射程分佈。另一方面，考慮濺射效應，在模型中加入濺射產額及表面濺射去除厚度。最後，將以上兩大部分結合熱擴散效應，建立出佈植離子在靶材中的濃度分佈模型。

　　實驗分為兩部份：離子佈植製程及奈米機械性質檢測。製程部份，以核能研究所PIII（Plasma immersion ion implantation）將氮離子植入304不鏽鋼試片；試片完成後以輝光放電分光儀（GDS）作氮縱深濃度分佈分析。奈米機械性質檢測方面，以壓痕試驗量測經過離子佈植之後的304不鏽鋼，氮改質層在硬度及楊氏模數上的改變，發現上述兩種機械性質皆有明顯的提升。最後，本研究藉由以上兩組實驗，對植入後試片機械性質的改變及改質層濃度分析結果做了比較，得到植入時的電壓、溫度、製程時間、及改質後的氮濃度分佈對改質層機械性質的影響。發現對機械性質影響最大的，不在於製程時的製程參數，重要的是改質層的氮濃度高低。氮濃度高，硬度與楊氏模數也會隨著提高。
　　
　　由理論所推得的濃度分佈曲線，與GDS分析結果比較。峰值位置的誤差至表面算起不會超過10%，峰值高度的誤差也在10%之內，圖線趨勢上也極為相近，顯示理論模型由表面處至峰值附近，已經達到可以預測實驗結果的目的。

　　In this study, our target is to establish a theoretical model to describe concentration distribution of nitrogen ion doped into target material. By this model, we can predict the composing of material after ion implantation and the material property. Thus we can change the kind of ions, the kind of target material, or conditions of implantation, to tie in our requirement, and obtaining the implanted material quality we need. This study stresses three parts. One is statistic calculation for the Gaussian distribution of ion’s moving distance in the target by collision dynamics and electrodynamics. The other is considering about sputtering effect, Adding sputtering yield and reduced thickness by surface sputtering. At last, the third part is combining above two parts with effect of thermal diffusion. The ion implantation concentration distribution model is finally established.

　　There are two parts in experiment. One is the fabrication of ion implantation. The other is examination of nano-mechanical properties. In the part of fabrication, nitrogen ions are doped into 304 stainless steel chip. We analyze the chip after ion implantation by GDS in the distribution of nitrogen concentration. After getting the experimental data of GDS, we compare the data with our theoretical curve. We obtain very well result. In the part of examination of nano-mechanical properties, by indentation test, we examine the difference of formation layer’s hardness and Young’s modulus. We find that both of two material property are better than before implanting. At last, by above two experiments, we compare the difference of mechanical property with the result of concentration distribution analysis of formation layer. We get the influence of formation layer mechanical property by doping voltage, temperature, total fabrication time, and formation layer distribution of nitrogen concentration. We find that fabrication parameters are not the largest factor to influence the mechanical properties. The largest one is the height of nitrogen concentration. If nitrogen concentration is higher, hardness and Young’s modulus will be higher too.

　　Comparing with theoretical curve and GDS analysis result data, the inaccuracy is not over 10% both in peak depth and peak height. The trend of theoretical curve is very close to experimental result. It shows that the model can predict experimental result from surface to the depth of peak.

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