| 研究生: |
賴建名 Lai, Chien-Ming |
|---|---|
| 論文名稱: |
壓電致動器驅動油壓控制閥設計與控制之研究 A Study of Design and Control on Hydraulic Control Valve Drive by Piezoelectric Stack Actuator |
| 指導教授: |
施明璋
Shih, Ming-Chang |
| 學位類別: |
碩士 Master |
| 系所名稱: |
工學院 - 機械工程學系 Department of Mechanical Engineering |
| 論文出版年: | 2014 |
| 畢業學年度: | 102 |
| 語文別: | 中文 |
| 論文頁數: | 84 |
| 中文關鍵詞: | 壓電致動器 、槓桿位移放大機構 、油壓控制閥 、自調式模糊控制 、比例閥 、伺服閥 |
| 外文關鍵詞: | piezoelectric actuator, displacement amplification mechanism, hydraulic control valve, self-tuning fuzzy controller, proportional valve, servo valve |
| 相關次數: | 點閱:118 下載:7 |
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液壓系統的性能主要取決於組成該系統的閥、泵和液壓馬達等各種流體控制元件的性能。因此提高流體控制元件的性能一直是液壓工程師的首要目標。
本文目標為研究設計並製造一利用壓電致動器取代傳統常見的比例電磁鐵、力矩馬達,當電-機換能器,直接驅動式的油壓控制閥。壓電驅動機構部分,包含了具有位移放大及導引作用之槓桿位移放大機構,實驗證實所設計之放大機構,可有效將壓電位移放大至液壓閥軸作動之行程。自行設計之五口三位閥閥體機構,也可確實達到流體換向之效果,且由油路壓力量測實驗可知,本文所設計之閥體內漏量很小,即加工精度高。之後利用本文參考文獻中所提及的自調式模糊控制器,來做閥軸的定位控制實驗,並討論其實驗結果,其控制目標下的穩態控制誤差皆在0.5μm內,可藉由控制閥軸位移,來改變流經窗孔之開口大小,以達到流量控制之效果。且經由追蹤控制實驗看出,本文壓電閥可做為高速比例閥與低流量伺服閥使用。
Performance of the hydraulic system mainly depends on various hydraulic valves, pumps and hydraulic motors and other components of the system. Therefore, to improve the performance of hydraulic control components has been the primary goal of hydraulic engineers.
The objective of this study is to design and manufacture direct drive hydraulic control valve driven by piezoelectric actuator. Replace the traditional common proportional solenoid, torque motors, to do for electricity - machine transducer. The design contains the leverage with the role of guiding the displacement amplification mechanism, experiments confirmed the amplification mechanism design can effectively enlarged the piezoelectric displacement hydraulic valve actuation shaft of the trip. And the three-position-five-way spool valve can also be really achieve the effect of changing the fluid, and can be seen from the oil pressure measurement experiments, prove that the valve design with high precision. And in the controller design, the self-tuning fuzzy controller is taken by reference to control the system be designed in the study. Discuss its results, the steady state errors are smaller than 0.5μm, by controlling the displacement of the valve shaft, to achieve the effect of flow control. And through the tracking control, this piezo valve can be used as high-speed proportional valve and low-flow servo valve.
[1] 李世筌, “結合 LVDT 之閉迴路動圈式流體傳動比例閥研發”, 國立雲林科技大學機械工程研究所碩士論文, 2007。
[2]Long, Quan, Neubert, Thomas, “Hochhydraulische Lageregelung fur Differntialzylinder mit zwei drehzahlgeregelten Pumpen”, Olhydraulik und Pneumatik, 2000.
[3]范光榮, “液氣壓閥類元件用壓電致動器微位移放大機構設計與實驗”,國立雲林科技大學機械重研究所碩士論文, 2006。
[4]Hagemeister, Wilhelm, “Auslegung von hochdynamischen servohydraulischen Antrieben fur eine active Frasspindellagerung”, Dissertation RWTH Aachen, 1999.
[5] L.H. Zhu ,E. Shiju, X.L. Zhu ,C.F. Gao, “Development of Hydroelectric Servo-valve Based on Piezoelectric Elements”, Mechanic Automation and Control Engineering , 2010 .
[6]沈傳亮, “直動式壓電伺服閥的研究”, 吉林大學碩士論文, 2003.
[7]Michael, G. and Nikola, C., “Modeling piezoelectric stack actuators forcontrol of micromanipulation,” IEEE Control Systems Magazine, Vol. 17, pp. 69-79,1997.
[8] Choi, G. S., Kim, H. S. and Choi, G. H., “A study on position control of piezoelectric actuators,” Industrial Electronics Proceedings of the IEEE International Symposium , Vol. 3, pp.851 -855,1997.
[9] S. Ueha, Y. Tomikawa, M. Kurosawa and N. Nakamura, Ultrasonic Motors Therory and Applications , Clarendon Press Oxford, 1993.
[10]陳俊毓, “長行程奈米精度氣壓-壓電混合 精密伺服定位XY平台設計與智慧型控制”, 國立台灣科技大學自動化及控制研究所碩士論文, 2004.
[11] N. Q. Hung, C. S. Bok, and K. J. Do, “The design and control of a jetting dispenser for semiconductor electronic packaging driven by a piezostack and a flexible beam”, Smart Materials and Structures, vol. 17, 2008.
[12] Herbert E. Merritt, Hydraulic Control Systems, New York: John Wiley, 1967.
[13]蔡名軒, “節能液壓電磁閥與邏輯閥分析設計”, 國立雲林科技大學機械工程研究所碩士論文, 2012.
[14]黃國鑫, “ 比例閥閥軸流動力分析應用”, 逢甲大學機械工程研究所
碩士論文, 1998.
[15]D.C.Sweeney, “Preliminary Investigation of Hydraulic Lock” Engineering , Vol. 172, pp. 513, 1951.
[16] J. Manham and D.C.Sweeney, “An Investigation of Hydraulic Lock”, Institution of Mechanical Engineers, London, 1955.
[17]T. S. Low and W. Guo, “Modeling of a three-layer piezoelectric bimorph beam with hysteresis”, Journal of microelectromechanical system, Vol. 4, pp. 230-237, 1995.
[18] B. M. Chen, T. H. Lee, C. C. Hang, Y. Guo, and S. Weerasooriya ,“An almost disturbance decoupling robust controller design for a piezoceramic bimorph actuator with hysteresis,” IEEE Transaction on Control Systems Technology, Vol. 7, pp. 160-173, 1999.
[19] G. J. Ho, K. R. Pai, and M. C. Shih, “A Study of Bi-axial Pneumatic Manipulator Position Control,” Proceeding of the 19th National Conference on Mechanical Engineering, CSME, Taiwan, pp. 427-434, 2002.
[20] M. H. Tsai, T. Y. Hsu, K. R. Pai, and M. C. Shih, "Precision Position Control of Pneumatic Servo Table Embedded with Aerostatic Bearing," Journal of System Design and Dynamics, vol. 2, pp. 940-949, 2008.
[21] H. I. Chen and M .C. Shih,"Visual Control of an Automatic Manipulation System by Microscope and Pneumatic Actuator," Automation Science and Engineering, IEEE Transactions on, vol. 10, pp. 215-218, 2013.
[22] M. C. Shih, T. Y. Chen, "Design and Control of Pneumatic Minimal Invasive Surgery Manipulator", The 12th International Conference on Fluid Control, Measurements, and Visualization, 2013.
[23]陳秉昌, “低速高精度液壓系統伺服位置控制之研究” , 國立成功大學機械工程研究所碩士論文, 2002.