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研究生: 楊卓諺
Yang, Cho-Yen
論文名稱: ZigBee無線傳輸應用於鎳金合金奈米柱結構非酶葡萄糖感測器
Application of ZigBee Wireless Transmission to the Ni-Au Alloy Nanowire Non-enzymatic Glucose Sensor
指導教授: 洪茂峰
Houng, Mau-Phon
學位類別: 碩士
Master
系所名稱: 電機資訊學院 - 微電子工程研究所
Institute of Microelectronics
論文出版年: 2021
畢業學年度: 109
語文別: 中文
論文頁數: 76
中文關鍵詞: 陽極氧化鋁模板鎳金奈米柱非酶葡萄糖感測器
外文關鍵詞: Ni-Au alloy nanowire, non-enzymatic glucose sensor, ZigBee, AAO
相關次數: 點閱:55下載:2
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  • 本研究主要分為兩部分,第一部分為鎳金合奈米柱金葡萄糖感測器的製備與量測,第二部分為ZigBee無線傳輸電壓感測器的設計,第三部分為將ZigBee無線傳輸電壓感測器應用於葡萄糖感測。
    第一部份,在P型重摻雜矽Si基板上沉積鋁薄膜,利用鋁薄膜進行陽極氧化鋁反應製備陽極氧化鋁模板(AAO),接著利用陽極氧化鋁模板進行電化學沉積鎳金合金奈米柱,最後將模板移除使奈米柱直立在基板上,完成奈米柱的製備後,利用恆電位儀先量測奈米柱對氫氧化鈉之氧化電位,並用此電位進行定電壓葡萄糖感測,量測結果為電流時間圖,將電流時間圖轉換成電流濃度圖,即可從量測到的電流值回推所加入之葡萄糖濃度。
    第二部分,本實驗以Arduino與XBee為架構,設計一個ZigBee無線電壓感測器,完成Arduino與XBee的基本設定與連接後,進行Arduino的程式設計與撰寫,利用Arduino軟體將程式碼燒入Arduino板中,最後利用電源供應器模擬葡萄糖感測器之實驗環境並測試量測到的電壓值是否正確。
    第三部分,完成奈米柱的製備與ZigBee無線電壓感測器的設計後,由於奈米柱量測的結果為電流,本實驗利用電阻將電流轉換為電壓,再將電壓感測器的正負端連接電阻量測其電壓,並將量測到的電壓值由無線傳輸至電腦Arduino軟體中的序列埠,使用者可從此電壓值對應到傳輸前的電流,在將電流回推至所加入的葡萄糖濃度。

    In this research, ZigBee wireless transmission is applied to the Au-Ni alloy nanowire non-enzymatic glucose sensor. This paper will be divided into two parts. The first part is the fabrication and result of Ni-Au alloy nanowire non-enzymatic glucose sensor, and the is second part is ZigBee wireless transmission.
    In the part of Ni-Au alloy nanowire non-enzymatic glucose sensor, Ni-Au alloy nanowire was fabricated by anodic aluminum oxide(AAO) template. The height of the nanowire is about 589nm and the diameter is about 55.9nm. In this experiment, aluminum was first deposited on the p-type heavily doped silicon substrate, and then fabricated anodic aluminum oxide(AAO) template by the method of anode oxidation. Finally, Ni-Au alloy nanowire was deposited into AAO template. In order to make Ni-Au nanowire stand on substrate, sodium hydroxide was used to remove the AAO template. After completing the fabrication of the nanowire, this experiment applied the nanowire on glucose sensor, and users can know the glucose concentration through the glucose sensor.
    In the part of ZigBee wireless transmission, first, this experiment combined Arduino and XBee to design a wireless voltage sensor and used power supply to check the result is correct or not. The result of voltage measurement is accurate, but it will be affect by noise. By adjusting the delay time, the noise can be reduced and make the result be more accurate. Finally, combining the glucose sensor and the wireless voltage sensor to form ZigBee wireless glucose sensor. This wireless glucose sensor brings a lot of convenience for people and can send data to the computer in real time.

    摘要 I 致謝 X 目錄 XI 表目錄 XV 圖目錄 XVII 第一章 緒論 1 1-1 前言 1 1-2 葡萄糖感測器簡介 2 1-3 無線通訊網路技術 4 1-4 研究動機 8 第二章 理論基礎 9 2-1 陽極氧化鋁模板 9 2-2-1 陽極氧化鋁模板之反應方程式 10 2-2-2 陽極氧化鋁模板之生成機制 11 2-2 電化學電鍍 12 2-2-1 電鍍原理 12 2-2-2 三極電鍍裝置 13 2-2-3 脈衝電鍍 15 2-3 非酶葡萄糖感測 16 2-3-1 循環伏安法 16 2-3-2 金屬非酶葡萄糖感測器感測原理 17 2-4 ZigBee 20 2-4-1 ZigBee 發展歷程 20 2-4-2 ZigBee 架構 20 第三章 實驗方法與儀器介紹 23 3-1 實驗流程與架構 23 3-1-1 鋁薄膜前置製程 25 3-1-2 陽極氧化鋁模板製程 26 3-1-3 鎳金合金奈米柱製程 28 3-1-4 移除陽極氧化鋁模板 31 3-1-5 非酶葡萄糖感測 32 3-1-6 ZigBee無線傳輸 33 3-2 實驗藥品以及實驗軟體套件 34 3-2-1 實驗藥品 34 3-2-2 Arduino開發板 36 3-2-3 X-BEE發射模組與X-CTU 37 3-3 實驗參數 40 3-3-1 陽極氧化鋁模板參數 40 3-3-2 鎳金和金奈米柱參數 41 3-3-3 移除陽極化鋁模板參數 42 3-3-4 葡萄糖感測參數 42 3-4 實驗製程與量測設備 43 3-4-1 熱蒸鍍系統 43 3-4-2 高溫爐管熱退火系統 44 3-4-3 場發射掃描式電子顯微鏡(FE-SEM) 45 3-4-4 能量分析光譜儀(Energy Dispersive Spectrometer ; EDS) 46 第四章 結果與討論 47 4-1 實驗架構 47 4-2 陽極氧化鋁模板製備 49 4-3 鎳金合金奈米柱製備及材料分析 50 4-4 非酶葡萄糖感測 54 4-5 ZigBee無線電壓感測器設計 57 4-5-1 X-Bee設定與封包 58 4-5-2 Arduino程式設計 61 4-5-3 ZigBee無線電壓感測器量測結果 62 4-6 ZigBee無線葡萄糖感測器 66 第五章 結論 71 第六章 未來工作 74 參考文獻 75

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