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研究生: 邱米
Chiu, Mi
論文名稱: 不同雷射退火對過飽和硼摻雜矽超導特性之研究
Investigation on Properties of Silicon Superconductor with Different Laser Annealing
指導教授: 高國興
Kao, Kuo-Hsing
學位類別: 碩士
Master
系所名稱: 電機資訊學院 - 微電子工程研究所
Institute of Microelectronics
論文出版年: 2024
畢業學年度: 113
語文別: 英文
論文頁數: 57
中文關鍵詞: 矽超導藍光雷射反射率傳輸線模型常溫超導參數
外文關鍵詞: Si superconductor, Blue laser, Reflectivity of capping oxide, TLM, Room temperature superconducting parameters
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  • 中文摘要 i Abstract iii Acknowledgment v Content vi List of Figures vii List of Tables ix Chapter 1. Introduction 1 1.1. Background of Superconductor 1 1.2. Development of Superconducting Si 2 1.3. Applications and Challenges of Superconducting Si 3 1.4. Research Motivation 5 Chapter 2. Experimental Demonstration of Si Superconductivity 7 2.1. Process Steps 7 2.2. Material Analysis 10 2.3. Cryogenic Measurement of Si Superconductivity 26 2.4. Transmission Line Model (TLM) 30 Chapter 3. Si-Based Josephson Junction 34 3.1. Process Flow of Fabrication 34 3.2. Electrical Performance of Josephson Junction 41 Chapter 4. Conclusion and Future Works 43 4.1. Conclusion 43 4.2. Future Works 43 Reference 45

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