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研究生：	黃盈捷 Huang, Yin-Jie
論文名稱：	光電調變高分子波導晶片積體化研究 The study of polymeric waveguide with EO-modulated system on a chip
指導教授：	羅裕龍 Lo, Y.L.
學位類別：	碩士 Master
系所名稱：	工學院 - 微機電系統工程研究所 Institute of Micro-Electro-Mechancial-System Engineering
論文出版年：	2005
畢業學年度：	93
語文別：	中文
論文頁數：	102
中文關鍵詞：	DR1-PMMA 、共路徑干涉儀、波導、積體化、高分子
外文關鍵詞：	common-path interferometer, polymer, waveguide, DR1-PMMA
相關次數：	點閱：82 下載：3
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　　平面波導線路為一積體光學元件，可以將各類光學元件整合在一個平面基板上，是元件朝向模組化、小型化和多功能特性發展的重要技術。利用具有光電效應的高分子來製作光學波導元件，最近引起了廣泛的研究。由於有機高分子具有低成本及較簡化的加工技術，相較於傳統的無機材料LiNbO3；有機高分子具有絕對的競爭優勢。

　　我們希望能將共路徑干涉儀量測系統中的相位延遲波片和電光調變器進行晶片化整合在同一個量測晶片上。利用DR1-PMMA高分子具有雙折射效應及電光效應的特性，經過適當的電極設計可以用來製作相位延遲波片和電光調變器，直接在晶片中對待測樣本進行量測，實現積體化概念；在晶片中直接對光波進行相位延遲、調變等功能；以達到直接量測樣本、提高量測靈敏度、降低光在傳輸中所造成的損耗。

　　本研究分成設計模擬與製程實作，係利用LCD Master 與Matlab軟體對晶片中整合性的元件進行模擬及最佳化設計，各元件間的尺寸設計將關係到量測晶片的整體表現；最後再利用南台灣奈米科技研究中心的儀器進行製程實作。

　　Planar waveguide circuit is a technology for integrated optics, which can integrate many functional devices on a substrate and make small, multi-functional and modular devices. Polymeric waveguide devices have received much attention for optical signal processing and communication systems because of simple and low-cost process. Polymers can be deposited directly on any kind of substrates , and this is advantageous over other optical waveguide materials such as LiNbO3.

　　We want to integrate the common-path interferometric measuring system on a chip. The system includes quarter wave plate, EO modulator and polarizer. The polymer DR1-PMMA has the properties of controllable birefringence and optic axis. By way of different electrode configuration designs, any desired principal axis can be formed. Then, we can measure the sample directively on the chip in orter to get better sensitivity and less loss during the operation.

　　In this study, we use the softwares, such as “LCD Master” and “Matlab” to simulate the capability of the integrated devices and do the process for manufacturing an integrated common-path interferometer in Southern Taiwan Nanotechnology Reserch Center.

誌謝................................................................................................................I
中文摘要.......................................................................................................II
英文摘要........................................................................................................III
目錄................................................................................................................IV
圖目錄............................................................................................................VII
表目錄............................................................................................................X

第一章 緒論 
1-1 前言...........................................................................................................1
1-2 微機電製程技術簡介...............................................................................2
1-3 研究背景...................................................................................................3
1-4 國內外之相關研究...................................................................................4
1-5 研究目的...................................................................................................6
1-6 章節瀏覽...................................................................................................9

第二章 元件原理介紹及設計......................................................................10
2-1 有機高分子薄膜.....................................................................................11
2-1-1 非線性光電材料..................................................................................12
2-2 元件基本理論.........................................................................................14
2-2-1 基本理論..............................................................................................14
2-2-2 極化程序(poling procedure)造成的材料雙折射現象.........................18
2-2-3光電效應...............................................................................................20
2-3 45°的斜向電極(45°-off electrode)設計原理............................................21

第三章 元件製作...........................................................................................28
3-1 光罩設計與製作......................................................................................29
3-1-1  A元件光罩尺寸設計............................................................................31
3-1-2  B元件Mach-Zehnder波導光罩尺寸設計.............................................34
3-1-3 光罩對準用標誌...................................................................................35
3-2 高分子溶液製備與薄膜塗佈..................................................................37
3-2-1  PMMA-DR1與PMMA-DR1的製備與薄膜塗佈...................................37
3-2-2  UV膠UV15-7LRI...................................................................................40
3-3 製程技術流程...........................................................................................42
3-3-1  Wafer清潔: 清洗Wafer、烘烤去水氣..................................................44
3-3-2  高溫氧化爐長SiO2...............................................................................46
3-3-3  E-Beam蒸鍍Cr和Au(電極)...................................................................48
3-3-4  切割機切割...........................................................................................51
3-3-5  黃光微影製程：上光阻、軟烤、曝光、顯影、硬烤、去除光阻...56
3-3-6  蝕刻.......................................................................................................63
3-3-7 波導端面研磨.......................................................................................67
3-4 製程結果問與題討論..............................................................................74
3-4-1 高分子薄膜注意事項...........................................................................74
3-4-2 PMMA-DR1 薄膜的裂痕.......................................................................75
3-4-3 更準確的曝光對位系統........................................................................80

第四章  光電調變高分子波導量測與分析....................................................85
4-1光學薄膜量測............................................................................................85
4-1-1 UV15-7LRI薄膜AFM表面量測.............................................................85
4-1-2 PMMA/DR1薄膜AFM表面量測............................................................87
4-2 極化製程...................................................................................................88
4-3 光學量測系統之建立與量測...................................................................92
   
第五章  總結與未來展望................................................................................96
5-1 總結與建議...............................................................................................96
5-1-1材料部分.................................................................................................96
5-1-2極化電極.................................................................................................96
5-1-3量測系統部分.........................................................................................97
5-2 未來展望...................................................................................................97

參考文獻.........................................................................................................98
作者簡介.......................................................................................................100

                                    

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校內：2007-08-01公開
校外：2007-08-01公開

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