在給予材料性質、應力-應變關係、模型、網格、邊界條件及負載條件後，本文使用有限元素ANSYS-Workbench軟體分析真空腔體在真空與大氣轉換負載下的力學行為。在材料方面則選擇三種不同材料來進行真空腔體的模擬分析，分別為鎂合金、鋁合金、銅合金，進行分析為從0到40秒鐘的抽氣變化，使真空腔體處於一個真空度為0.101325 MPa的狀態下進行模擬分析。分析結果顯示，以此三種合金材料為真空腔體的材料皆是相當安全的狀態。其分析結果顯示，6061-T6鋁合金真空腔體在靠近抽氣端的位置有最大的變形量為0.038072 mm，最大的等效應力量為26.61 MPa，而最大的等效應變量為0.0004232，至於對應降伏應力的安全係數為4.1338，其相關的數值顯示，真空腔體仍是相當安全的狀態。其他兩種合金材料分析結果顯示，對應降伏應力安全係數非常接近6061-T6鋁合金的安全係數，但由於銅合金重量較其他合金重，而鎂合金會與植入的離子元素產生化學作用，因此真空腔體則以6061-T6鋁合金來製作為最佳選擇。

After giving material properties, stress-strain relationships, models, meshes, boundary and load conditions. The finite element ANSYS-Workbench software is used to analyze the mechanical behavior of the vacuum chamber under the conversion load of vacuum and atmosphere. The different types of material are selected for the simulation analysis of the vacuum chamber, which are the magnesium alloy, the 6061-T6 aluminum alloy and the copper alloy. The analysis is the change of the pumping from 0 to 40 seconds. The vacuum chamber is analyzed in a state with a vacuum of 0.101325 MPa for simulation analysis. The analysis results show that the three alloy materials used as the material of the vacuum chamber are all in a fairly safe state. Further analysis shows that the 6061-T6 aluminum alloy vacuum chamber has a maximum deformation of 0.038072 mm near the suction end. The maximum equivalent stress is 26.61 MPa, and the largest equivalent strain is 0.0004232, and the safety factor corresponding to the yield stress is 4.1338, the related value shows that the vacuum chamber is still in a fairly safe state. The analysis results of the other two alloy materials show that the corresponding yield stress safety factor is very close to that of 6061-T6 aluminum alloy. However, because copper alloys are heavier than other alloys, and magnesium alloys have chemical interactions with implanted ion elements, therefore, the vacuum chamber made of 6061-T6 aluminum alloy is the best choice.

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