| 研究生: |
紀建安 Chi, Chien-An |
|---|---|
| 論文名稱: |
氫端鑽石離子場效感測電晶體之研究 Study on Hydrogen-terminated Diamond Ion-Sensitive Field Effect Transistors |
| 指導教授: |
曾永華
Tzeng, Yon-Hua |
| 學位類別: |
碩士 Master |
| 系所名稱: |
電機資訊學院 - 微電子工程研究所 Institute of Microelectronics |
| 論文出版年: | 2016 |
| 畢業學年度: | 104 |
| 語文別: | 中文 |
| 論文頁數: | 165 |
| 中文關鍵詞: | 微波電漿輔助化學氣相沉積 、氫端鑽石 、離子場效感測電晶體 、pH值感測器 |
| 外文關鍵詞: | microwave plasma enhanced chemical vapor deposition, hydrogen-terminated diamond, Ion-sensitive field-effect transistors, pH sensor |
| 相關次數: | 點閱:83 下載:5 |
| 分享至: |
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離子場效感測電晶體(Ion-Sensitive Field Effect Transistors,ISFET)被發展成微小尺寸的固態元件,用來取代傳統體積大、易碎的玻璃膜電極,ISFET被認為是在未來上用來進行生理學上電訊號之偵測,如:酸鹼離子、鹵素離子、葡萄糖、……等。而傳統使用矽作為基礎的ISFET還有許多困難要克服,相較於矽,鑽石在化學及生物量測應用展現了優異的電化學特性、生物相容性、穩定性,尤其是藉由轉移摻雜形成的本質氫端鑽石具有高的P型表面導電度,因電子從鑽石價電帶穿隧至鑽石表面水溶液中空缺的電子態,故在空氣中水溶液層形成的表面導電特性及在水溶液中的氧化還原複合物特性,使得鑽石能作為ISFET的應用。
本研究以本質的氫端單晶鑽石製作離子感測場效電晶體,並藉由氫端鑽石的表面導電的通道來實現出電晶體的特性,將氫端鑽石浸入水溶液,並以白金電極作為閘極電極置於水溶液中來實現閘極控制電位的效果,而氫端鑽石在水溶液中,不必加入任何絕緣物作為絕緣層,其本身與水溶液的離子即能形成絕緣層,而其閘極電壓與pH之響應為-45.18mV/pH,可透過氫端鑽石的轉移摻雜機制、奈恩斯特方程式、電化學特性去探討。
Ion-sensitive field-effect transistors (ISFET) are fabricated using intrinsic hydrogen-terminated high temperature high pressure single crystalline diamond (HPHT-SCD) films. The properties of ion-sensitive field-effect transistors (ISFET) are realized by a surface conductive channel on hydrogen-terminated diamond. The gating is realized by immersing the diamond surface into phosphate buffered s solution which is contacted by a platinum electrode. The surface of hydrogen terminated diamond without any additional oxide layer acts as a gate insulation. The response of gate potential to pH is about −45.18 mV/pH. The results are discussed in terms of transfer doping mechanism, Nernst equation, and electrochemical properties of diamond surfaces. They are also compared with ISFETs which employ ion-sensitive gate oxides.
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