本研究採用離子氮化法與高溫氣體氮化法，分別氮化316L不鏽鋼與Ti6Al4V合金，再使用非平衡磁控濺鍍法被覆含鈦類鑽碳於上列底材。分析氮化後的316L不鏽鋼與Ti6Al4V合金和類鑽碳鍍層之微結構、機械性值，並以SRV磨耗試驗研究其磨潤特性與磨耗機構；以電化學分析法評估各種底材的抗腐蝕能力；培養Raw 264.7小鼠單核巨噬細胞於所有底材上，探討這些材料的生物相容性。
氮化後的316L與Ti6Al4V底材機械性質都大幅提升，並降低磨耗深度與磨耗率，改善DLC鍍層附著性與增加鍍層磨耗壽命；本實被覆類鑽碳在氮化底材後，在低荷重下有極佳磨耗壽命與抗磨耗能力。
316L不鏽鋼氮化後會破壞原有的氧化鉻鈍化層，導致氮化316L的抗腐蝕能力下降；Ti6Al4V的抗蝕性比316L更佳，且氮化後不降低抗蝕性。類鑽碳能夠大幅提升抗蝕能力，氮化且被覆類鑽碳之Ti6Al4V在所有試片中擁有最佳的抗腐蝕能力。
經過五天的細胞培養，細胞數目最多的為原底材316L與Ti6Al4V，氮化後與被覆DLC後由於接觸角上升，會使得細胞增生率減緩。

In this study, plasma nitriding and high temperature gas nitridingwere performed on 316L stainless steel and Ti6Al4V alloy samples respectively, and Ti-DLC coatings were deposited on above samples by unbalanced magnetron sputtering system. The main purposes of this research were: (i) Analysis microstructures and mchanical properties of nitrided 316L stainless steel and nitride Ti6Al4V alloy and DLC film. Discusstribological properties and failure mechanism by using Schwingung Reibung and Verschleiss(SRV) Tester. (ii) Assesscorrosion resistance of all samples by electrochemical test. (iii) Raw 264.7 cells were cultured on all samples in order to investigate the biocompatibility of these materials.
The results indicate that:
(i) Mchanical properties of 316L and Ti6Al4V enhance sharply after nitriding.It is shown that nitriding treatment not only reduce wear depth and wear rate, but also improve adhesion and wear life of DLC, and increase wear resistance of substrate. The hardness of DLC film is poor because of unstable C2H2 gas flow during sputtering, but it still has excellent wear life and wear resistance in low wear load.
(ii) Corrosion resistance of nitrided 316L decreased because the CrO3 passivation layer has been destroyed during nitriding process. Corrosion resistance of Ti6Al4V is better than 316L, and it does not decrease after nitriding. Deposit DLC increases corrosion resistance sharply.
(iii) After five days of cell culture, the largest number of cells has been found on 316L and Ti6Al4V substrate. After nitriding or depositing DLC coating will cause the contact angle increases, and decrease the cell culture rate. Because of low corrosion resistance, nitrided 316L oxidize and released metal ions during the culture process, we can’t culture cells on it.

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