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研究生: 彭玠中
Peng, Chieh-Chung
論文名稱: 濺鍍銦鋅氧化物薄膜應用於鈣鈦礦太陽能電池透明電極之研究
Studies of sputtered Indium Zinc Oxide thin film as transparent electrode for Perovskite Solar Cells
指導教授: 陳昭宇
Chen, Chao-Yu
學位類別: 碩士
Master
系所名稱: 理學院 - 光電科學與工程學系
Department of Photonics
論文出版年: 2017
畢業學年度: 105
語文別: 中文
論文頁數: 68
中文關鍵詞: 濺鍍銦鋅氧化物薄膜鈣鈦礦太陽能電池串疊型元件non-FTO太陽能電池可撓式太陽能電池
外文關鍵詞: Sputtered indium zinc oxide, Perovskite solar cells, Tandem solar cells, non-FTO solar cells, flexible solar cells
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  • 本研究利用濺鍍的方式沉積銦鋅氧化物 (Indium Zinc Oxide,簡稱IZO) 薄膜,將其製作成能穿透可見光及近紅外光的透明導電薄膜,在可見光區有80~90% 的穿透度,而在近紅外光區有90% 以上的穿透度,薄膜片電阻約為24Ω/□。再將此IZO透明導電薄膜應用於鈣鈦礦太陽能電池的對電極,並藉由緩衝層三氧化鉬 (Molybdenum(VI) oxide,MoO3) 的保護,使濺鍍製程於元件上得以實踐,完成一雙面透光的鈣鈦礦太陽能電池,其最高效率可達16.4%。
    我們接著使用此雙面透光鈣鈦礦太陽能電池,與矽晶太陽能電池串疊,完成一鈣鈦礦/矽晶串疊型元件,因鈣鈦礦的能隙 (Band gap) 大小,剛好能不錯的分割矽晶太陽能電池的吸收光譜,所以能將太陽光平均分配給鈣鈦礦及矽晶元件,使兩元件的電流值匹配,而較高能量的光子能由鈣鈦礦元件轉換出較高的電壓,因此提升串疊型元件整體的效率。此鈣鈦礦/矽晶串疊型元件的效率能達到19.5%。
    而我們亦利用濺鍍IZO透明導電膜的技術,完成一non-FTO太陽能電池,實現的方法為,將FTO玻璃取代為濺鍍在載玻片上的鈦金屬。鈦金屬於高溫燒結時,表面會形成緻密氧化層,使鈦金屬不會全數生成金屬氧化物,而失去其導電電極的特性,為一能承受高溫的導電電極。此鈦金屬基板製作之non-FTO太陽能電池,效率可達13.8%。最後將此non-FTO元件之結構,應用於康寧的超薄玻璃上 (Corninig glass),完成一效率13.6% 的可撓式鈣鈦礦太陽能電池。

    Perovskite solar cells (PSCs) are one of the most promising candidates for next-generation solar cells because of their high power conversion efficiencies and easily fabrication. Recently, light and thermal stability of PSCs are resolved gradually so the commercialization of PSCs can be expected. In this study, we fabricate semitransparent PSCs by sputtering indium zinc oxide (IZO) as counter electrode then make a perovskie / silicon mechanically stacked tandem. These semitransparent PSCs can be an efficiency improvement component for silicon solar cells without any modification on existing silicon solar cells.The semitransparent PSCs show power conversion efficiency (PCE) of 16.4% from front illumination (FTO side) and 15.2% from back illumination (IZO side).We also use the technique of sputtering IZO to make a non-FTO back illumination PSCs by substituting FTO with sputtered Titanium (Ti) thin film and the non-FTO PSCs show PCE of 13.8%. Eventually, we applied the structure of non-FTO PSCs to Corning ultra thin glass to make flexible PSCs and also keep the PCE at 13.6%.

    摘要 I Extended Abstract II 致謝 X 目錄 XI 表目錄 XIV 圖目錄 XV 第一章 緒論 1 1-1 太陽能電池之演進與發展 1 1-2 各類太陽能電池之原理 3 1-2-1 矽晶太陽能電池 3 1-2-2 染料敏化太陽能電池 4 1-3 太陽能電池元件量測原理 5 1-3-1 太陽能光譜與空氣質量對太陽光照度之影響 5 1-3-2 太陽能電池量測參數與原理 6 1-3-3 量子轉換效率量測原理 8 1-4 研究動機 9 第二章 文獻回顧 10 2-1有機無機混成鈣鈦礦太陽能電池發展 10 2-2雙面透光鈣鈦礦太陽能電池及其串疊型元件發展 17 第三章 元件製備及實驗儀器原理 28 3-1 實驗儀器與藥品 28 3-1-1 實驗儀器 28 3-1-2 實驗藥品 29 3-2 實驗流程 29 3-2-1基板製備 (FTO device) 29 3-2-2基板製備 (non-FTO device) 30 3-2-3鈣鈦礦主動層製備 30 3-2-4電洞傳輸層與透明對電極製備 31 3-3實驗儀器工作原理 32 3-3-1高真空濺鍍系統 32 3-3-2 高真空蒸鍍系統 33 3-4 量測與分析儀器工作原理 33 3-4-1 高解析場發射掃描式電子顯微鏡 (SEM) 33 3-4-2 X光繞射分析儀 (XRD) 34 3-4-3 表面粗糙儀 (α-step) 35 3-4-4 吸收光譜儀 (Ultraviolet-visible spectrophotometer,UV-Vis) 35 3-4-5 四點探針 (Four-point probe) 36 3-4-6 I-V量測 37 3-4-7 IPCE量測 39 第四章 結果與討論 40 4-1 濺鍍IZO薄膜參數之影響 41 4-1-1 濺鍍IZO薄膜時間之分析 41 4-1-2濺鍍IZO薄膜功率之分析 42 4-2 雙面透光鈣鈦礦太陽能電池之響應 44 4-2-1 緩衝層MoOx厚度對雙面透光元件之影響 44 4-2-2 不同光罩面積下雙面透光元件之光伏響應 46 4-2-3 雙面透光元件之光學特性分析 48 4-3 鈣鈦礦/矽晶串疊型太陽能電池之響應 52 4-3-1 串疊型太陽能電池sub-cell分別之光伏響應 52 4-3-2 串疊型太陽能電池整體之光伏響應 54 4-4 non-FTO鈣鈦礦太陽能電池之響應 56 4-4-1 鈦金屬電極厚度對non-FTO元件之影響 56 4-4-2鈦金屬電極之分析 60 4-4-3 可撓式鈣鈦礦太陽能電池之響應 63 第五章 結論與未來發展 64 第六章 參考文獻 65

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