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研究生：	陳忠凱 Chen, Jung-Kai
論文名稱：	含鎢無氫類鑽碳微鑽針於印刷電路板微孔鑽削之研究 The research of tungsten-doped hydrogen-free diamond-like carbon micron drills on PCB micro hole drilling
指導教授：	蘇演良 Su, Yean-Liang 蘇啟宗 Su, Cei-Tsung
學位類別：	碩士 Master
系所名稱：	工學院 - 機械工程學系 Department of Mechanical Engineering
論文出版年：	2002
畢業學年度：	90
語文別：	中文
論文頁數：	82
中文關鍵詞：	磨潤性質、含鎢無氫類鑽碳鍍層
外文關鍵詞：	tribology properties, hydrogen-free DLC
相關次數：	點閱：85 下載：1
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本文採用封閉式非平衡磁控濺鍍法，來被覆含鎢無氫類鑽碳鍍層於高速鋼、碳化鎢以及微鑽針上；探討不同鎢含量對於無氫類鑽碳鍍層性質之影響。首先以微小硬度機、刮痕試驗機、SRV 磨耗試驗實驗對含鎢無氫類鑽碳鍍層之基本性質有所了解，再進一步利用實際印刷電路板鑽削來探討其磨潤行為。
實驗結果顯示：含鎢無氫類鑽碳鍍層的鎢含量與鍍層硬度值沒有明顯的關係。而附著性以鎢含量8.75at.%鍍層最好，且對於高速鋼底材的附著性比碳化鎢底材好。在往覆式磨耗實驗中，所有鍍層皆能夠降低摩擦係數。就耐磨性而言，所有鍍層皆有不錯的耐磨性，尤其以鎢含量8.75at.%鍍層最好。
在PCB 鑽削實驗中，含鎢無氫類鑽碳鍍層的鎢含量為8.75at.%時，微鑽針的壽命可比未鍍層之微鑽針壽命提升2 倍左右。
而在車削應用上，在切削中碳鋼時對於車刀的保護並無明顯的作用。

The closed field unbalanced magnetron sputtering method was used in this article to deposit tungsten-doped hydrogenated-free diamond-like carbon (a-C:W) films onto high speed steel, tungsten carbide specimens, and micron drills. The effects of various W contents in a-C:W films were investigated. At first, in order to understand basic properties of a-C:W films, the experiments of micro-hardness tester, scratch tester, SRV tester were employed. Finally, in field PCB through hole drilling was used to examine the tribology properties of the coated micron drills.
The experiment results are shown as following: The hardness of the films has no concern with different contents of tungsten of the films.
The adherences of the films are best when tungsten contents 8.75at.%, and the adherences of the films on high speed steel are better than on tungsten carbide specimens. Among the SRV tester, all the coatings can reduce the friction coefficient successfully. For wear-resistance, all the coatings are very good; especially, wear-resistance of the films are best when tungsten contents 8.75at.%. In the PCB drilling tests, a-C:W films with 8.75at.% tungsten contents improved tool life 2 times more than uncoated ones. In the
turning tests, all the films can not improve tool life when turning medium carbon steel.

總目錄
授權書.................................................................... I
考試合格證明..............................................................II
摘要.....................................................................III
Abstract ................................................................ IV
誌謝........................ ..............................................V
總目錄................................................................... VI
表目錄................................................................... IX
圖目錄.....................................................................X
第一章緒論.................................................................1
1-1 前言...................................................................1
1-2 研究動機...............................................................2
第二章理論基礎與文獻回顧...................................................3
2-1 類鑽碳.................................................................3
2-1-1 類鑽碳鍍層之由來及發展...............................................3
2-1-2 類鑽碳鍍層之特性.....................................................4
2-1-3 含氫與非含氫類鑽碳鍍層之比較.........................................4
2-1-4 類鑽碳鍍層之限制及其改善方法.........................................5
2-2 非平衡磁控濺鍍法.......................................................7
2-3 微鑽針.................................................................8
2-3-1 鑽針簡介.............................................................8
2-3-2 鑽針磨耗.............................................................9
2-4 印刷電路板............................................................10
2-5 田口式實驗設計法......................................................10
第三章實驗方法與步驟......................................................12
3-1 實驗目的..............................................................12
3-2 實驗流程..............................................................12
3-3 實驗規劃..............................................................12
3-3-1 蒸鍍參數選擇與鍍層安排組合..........................................12
3-3-2 鍍層性質試驗........................................................13
3-3-3 鍍層結構與成份分析..................................................14
3-3-4 SRV 磨耗試驗........................................................15
3-3-5 耐熱實驗............................................................15
3-3-6 鑽削實驗............................................................16
3-3-7 車削實驗............................................................16
3-4 實驗設備..............................................................17
第四章實驗結果與討論......................................................19
4-1 鍍層基本性質..........................................................19
4-1-1 鎢靶材電流與鍍層含鎢量之關係........................................19
4-1-2 鍍層硬度值..........................................................20
4-1-3 附著性..............................................................20
4-1-4 組織結構分析........................................................21
4-2 SRV 往覆式磨耗試驗....................................................23
4-2-1 第一階段鍍層SRV 試驗................................................23
4-2-1 第二階段鍍層SRV 試驗................................................24
4-3 耐熱實驗..............................................................25
4-4 鑽削磨耗試驗..........................................................25
4-5 鑽削力量量測實驗......................................................27
4-6 車削磨耗試驗..........................................................28
第五章結論................................................................29
5-1 結論..................................................................29
5-2 實驗心得與改進空間....................................................30
第六章參考文獻............................................................32
自述......................................................................82

表目錄
表2-1 S/N 比之計算公式....................................................40
表3-1 L9 直交表表因素水準.................................................41
表3-2 L9 直交表配置.......................................................41
表3-3 第二階段含鎢無氫類鑽碳鍍層濺鍍參數..................................41
表3-4 FR4 雙面板之物理機械性質............................................42
表3-5 鑽針的機械性質表....................................................42
表4-1 L9 直交表與第一階段碳化鎢鍍層鎢含量.................................43
表4-2 第一階段壓痕試驗結果................................................43
表4-3 第二階段壓痕試驗結果................................................43
表4-4 第一階段刮痕試驗結果................................................44
表4-5 第二階段刮痕試驗結果................................................44
表4-6 拉曼光譜分析數據列表(以Gaussian 分佈函數曲線拆解) ..................45
表4-7 L9(34 )直交表磨痕深度及運算後之η 值(對磨材S45C)....................45
表4-8 L9(34 )直交表磨痕深度及運算後之η 值(對磨材磷青銅)..................46
表4-9 L9(34 )直交表磨痕深度及運算後之η 值(對磨材鉻鋼球)..................46
表4-10 L9-磨痕水準輔助表(對磨材S45C)......................................47
表4-11 L9-磨痕水準輔助表(對磨材磷青銅)....................................47
表4-12 L9-磨痕水準輔助表(對磨材鉻鋼球) ...................................47
表4-13 L9-Vb 變異數分析表(對磨材S45C) ....................................48
表4-14 L9-Vb 變異數分析表(對磨材磷青銅) ..................................48
表4-15 L9-Vb 變異數分析表(對磨材鉻鋼球) ..................................48
表4-16 刀角磨耗...........................................................49
表4-17 平均刀腹磨耗.......................................................49
表4-18 Z 軸切削力.........................................................50
表4-19 扭力...............................................................50

圖目錄
圖2-1 摻雜金屬含氫類鑽碳結構..............................................51
圖2-2 非平衡磁控濺鍍法配置圖..............................................52
圖2-3 傳統磁控法與非平衡磁控法的磁力線比較................................52
圖2-4 微鑽針幾何外型......................................................53
圖2-5 鑽針磨耗型態(1)刀腹磨耗(2)刀角磨耗..................................54
圖3-1 實驗流程圖..........................................................55
圖3-2 鍍層安排示意圖......................................................56
圖3-3 壓痕示意圖..........................................................56
圖3-4 刮痕試驗機..........................................................57
圖3-5 SRV 磨耗試驗機配置圖................................................57
圖3-6 PCB 立式三軸工具機..................................................59
圖3-7 FR4 雙面板的構造組合圖..............................................59
圖3-8 鑽削配置及鑽削力量測流程圖..........................................60
圖3-9 鑽削路徑及鑽削位置配置圖............................................61
圖4-1 第二階段鍍層鎢靶材電流值與鎢含量之關係圖(GDS 分析) .................62
圖4-2 第二階段鍍層鎢靶材電流值與鎢含量之關係圖(EDX 分析)..................63
圖4-3 第一階段a-C:W 鍍層於高速鋼底材之維氏硬度............................63
圖4-4 第二階段a-C:W 鍍層於高速鋼底材之維氏硬度............................64
圖4-5 第二階段a-C:W 鍍層於碳化鎢底材之維氏硬度............................64
圖4-6 第二階段a-C:W 鍍層之Raman 光譜分析圖................................66
圖4-7 鍍層鎢含量與D Band 值之關係圖.......................................66
圖4-8 鍍層鎢含量與G Band 值之關係圖.......................................67
圖4-9(a) 第二階段a-C:W 鍍層之薄模式XRD 分析圖.............................68
圖4-9(b) 第二階段a-C:W 鍍層之薄模式XRD 分析圖.............................69
圖4-10 第一階段a-C:W 鍍層於高速鋼底材之SRV 磨耗試驗.......................69
圖4-11 第一階段a-C:W 鍍層於高速鋼底材之SRV 磨耗試驗.......................70
圖4-12 第一階段a-C:W 鍍層於高速鋼底材之SRV 磨耗試驗.......................70
圖4-13 第二階段a-C:W 鍍層於高速鋼底材之SRV 磨耗試驗.......................71
圖4-14 第二階段a-C:W 鍍層於碳化鎢底材之SRV 磨耗試驗.......................72
圖4-15 與w21 鍍層(底材高速鋼)對磨後之S45C 上試件磨痕型態..................72
圖4-16 與w21 鍍層(底材高速鋼)對磨後之磷青銅上試件磨痕型態.................72
圖4-17 與w21 鍍層(底材碳化鎢)對磨後之S45C 上試件磨痕型態..................73
圖4-18 與w21 鍍層(底材碳化鎢)對磨後之鉻鋼球上試件磨痕型態.................73
圖4-19 第二階段a-C:W 鍍層於高速鋼底材熱處理前後之維氏硬度.................74
圖4-20 鑽針磨耗量測圖.....................................................75
圖4-21 a-C:W 鍍層鑽針刀角磨耗量圖.........................................76
圖4-22 a-C:W 鍍層鑽針平均刀腹磨耗量圖.....................................77
圖4-23 a-C:W 鍍層微鑽針鑽針磨耗SEM 圖(X1000) .............................78
圖4-24 a-C:W 鍍層微鑽針微孔品質OM 圖......................................79
圖4-25 鑽削力量測位置圖...................................................80
圖4-26 a-C:W 鍍層鑽針Z 軸切削力量圖.......................................80
圖4-27 a-C:W 鍍層鑽針扭力圖...............................................81
圖4-28 車刀最大刀腹磨耗(＊表示第一道次已缺角) ............................81
圖4-29 車刀平均刀腹磨耗(＊表示第一道次已缺角) ............................82
                                    

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