自從2004年以來，石墨烯已成為材料科學研究方面的新星，由於它優異的導電、導熱性質，可望能運用在微機電、光電產品中，因此石墨烯的品質與性質是非常的重要。在眾多的製備方法中，又以化學氣相沉積法最能製備出大面積的石墨烯，而大面積的石墨烯擁有較優良的導電性質，有利於光電產品應用。在本實驗中，我們採用化學氣相沉積法成長石墨烯，並使用銅做為反應的觸媒基材，來製備高品質的石墨烯，藉由施以不同的傾斜角度5~15度，並通入不同的甲烷濃度0.6、1.2 sccm，30sccm的氫氣與270sccm的氬氣，總流量為300sccm，成長時間0.5min~2min，製備出的石墨烯經過分析，歸納出各參數對於沉積石墨烯的影響。CVD石墨烯主要是由於碳源氣體與銅基材產生裂解反應。然而，反應氣體需跨越邊界層才能與銅基材進行反應，所以擴散過邊界層的速率會大幅影響成長的結果，經過拉曼光譜與光學顯微鏡的分析結果，我們歸納出傾斜角度與甲烷濃度主要影響石墨烯的層數與結構；成長時間主要影響披覆面積，而且並非時間越長披覆面積越高，在我們實驗中1.5分鐘是最恰當的反應時間。根據我們的實驗結果可以證實傾斜式基板法確實可以在短時間內提高披覆率，並歸納出各參數對石墨烯品質與披覆率的影響。

From 2004, graphene has been a new star for the material science. Owing to its excellent electrical and thermal conducting properties, these make it could be used in microelectromechanical system (MEMS) or electo-optical product. Therefore, its quality and property are very important. Among of such many ways to produce graphene, the chemical vapor deposition is the best for getting a large-area graphene. The large area means it has the better electrical conducting that is good for electro-optical product.
In this thesis, chemical vapor deposition (CVD) is adopted for growing graphene with copper as catalyst to produce the high quality graphene. In the experiment, the substrate tilt angle is from 5 to 15. Methane concentration is 0.6 and 1.2 sccm, hydrogen 30sccm, argon 270sccm, and the total flow rate is 300 sccm. The reactive time is 0.5 ~2 min. The mechanism of CVD graphene is major to the pyrolysis reaction between carbon gas and catalyst. However, the gas needs to diffuse across the boundary layer to react, so the diffusion rate would affect the product largely. According the Raman analysis and OM coverage result, we induce that the tilt angle and methane concentration would affect the graphene layers, that is, the thickness. The growing time influences the coverage, but it has the most proper time.
In our thesis, the most suitable reaction time is 1.5min. By our results, it can prove using the tilt substrate can promote the coverage in short time and sum up the efforts of these parameters to graphene’s properties and coverage.

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