本研究運用微機電技術製作微型噴霧霧化器，以矽晶圓及派熱克斯玻璃經陽極接合，主要目的是快速大量製造螢光性微米級粒子於粒子影像測速儀（Particle Image Velocimetry，PIV）使用。本研究之霧化方式可分為氣體輔助式與液體輔助式，分別會導致粒子的表面形貌與製作過程的差異性，並於製造顆粒時發現改變霧化操作壓力和不同的溶質溶劑重量百分比濃度，會影響到粒徑大小與分佈，研究發現隨著霧化氣體操作壓力增加，Dv90及平均粒徑（SMD）有降低之趨勢。同時再輔以螢光顯微鏡及拉曼瑩光光譜儀證實其瑩光性質，並以高解析電子顯微鏡（SEM）照片顯現出粒子型貌特性。
相較於傳統噴嘴，微型霧化器的製程時間相對快速、霧化操作壓力較低、設備和氣體消耗量方面花費成本較低，而本研究所製作出的螢光粒子與市售商品相較之下，其成本花費、取用便利性、及後續PIV觀測使用上，都不亞於市售商品。

The study applies MEMS-based micro atomizer to manufacture micro fluorescent particles for Particle Image Velocimetry（PIV）application. In this thesis, micro atomizer is fabricated by using anodic bonding of Si wafer and pyrex glass 7740. Micro atomizers are operated in either air-assisted or water-assisted spray ways which leads to different results in surface morphology and particle size distribution respectively. It is found that the median mean diameters Dv90 of average particle sizes and Sauter Mean Diameter all decrease with the increase of operation pressure. Additionally, the particle size and distribution are greatly affected by different solvent weight percentage of solution. In the meantime, fluorescent particles are characterized by using fluorescence microscopy, Raman fluorescence spectrometer and scanning electron microscope. SEM images show the particles manufactured by water-assisted way have much better surface morphology than the particles with air-assisted way. Compared with traditional commercial aerosol atomizer, MEMS-based micro atomizer requires small amount of operating gas consumption which leads to lower cost in fabrication. The fluorescent particles fabricated in this research are comparable to the commercial fluorescent particles, but with a much lower cost.

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