本研究是以聚二甲基矽氧烷(PDMS: polydimethylsiloxan）混合鐵粉製作微管道內無動件閥微幫浦，在微幫浦之致動薄膜上下兩側，藉由永久磁鐵上下振動去驅動微幫浦。而此微幫浦前後兩端採用一新型無動件閥門之設計，由於無動件閥門微幫浦主要原理是利用順向流壓力差(△Pf)與逆向流壓力差(△Pr)的不同，讓流體在薄膜往復式驅動下形成單一淨流量方向，其△Pr和△Pf兩壓力差比值稱為無動件閥門雙極性(Dpi)，可以做為無動件閥微幫浦效率依據，Dpi越大代表效能越好，本研究是以傳統Tesla型式無動件閥作為改良對象，新改良式無動件閥在雷諾數ReD=100的Dpi由原來1.2上升到2.28，在致動機制方面，本研究採用Fe-PDMS感磁性薄膜來驅動流體，永久磁鐵藉由直流馬達運動而影響薄膜形變，配合無動件閥不對稱設計而形成幫浦，無動件閥微幫浦流量量測為秤重法的實驗方式，經由秤重法證明薄膜在振動頻率f=3.3Hz時，平均淨流量可達1425±12.13μl/min。

This research uses Fe-PDMS to fabricate a no-moving-part valve micro pump. Fe-PDMS membrane is actuated by oscillating two magnets on both upper and lower sides of a Fe-PDMS membrane. A novel no-moving-part valves (NMPV) design, called improved T-135 Tesla valve, has been proposed. It is found by numerical simulation that dipole (Dpi)value of the improved T-135 Tesla NMPV increases from 1.2 to 2.28 at ReD=100. The improved T-135 Tesla valve has been implemented in a NMPV micro pump by using MEMS fabrication. According to experimental results, pumping flow rate can reach 1425±12.13 μl/min when membrane actuation frequency is 3.3Hz.

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