壓電材料由於其高精準度以及響應快速的特性，使其在各領域間廣泛的應用。然而由於其材料磁滯(Hysteresis)以及潛變(Creep)的特性，使其在控制上通常需要有額外的感測器給予回授訊號。在這之中干涉儀是一種精準度相對高的感測器，本篇研究使用側向取樣(Laterally Sampled)的方式讀取干涉條紋的特徵，透過最小平方擬合求得壓電片變形的曲率。上述方法相較於其他表面形貌方法，因為忽略目標粗糙度的資訊，所以省略大量的計算時間。因此比較適合做為壓電片變形回授的感測方法，再使用PI控制器對其進行回授控制，由於PI控制器在存在建模誤差或是外在負載的情況下依舊可以擁有顯著的控制效果。最後，本研究將此伺服控制的壓電致動系統應用於脈衝壓縮器，建立基於干涉的光學色散調控系統。此種雷射脈衝壓縮器的優點在於大範圍的色散調控以及響應速度較快，然而由於壓電磁滯的特性導致其相對來說更難以進行精確的控制。因此本篇研究希望透過干涉回授解決壓電的控制問題，建立大範圍的光學色散調控系統。

It’s difficult to directly measure the curvature of a piezoelectric bender, most measurement method use the displacement of certain point on the bender to calculate the curvature. So, this thesis proposed modified laterally sampled laser interferometry (MLSLI), which is based on Meng’s research, to measure curvature of piezo bender with interferometry. The advantages of the proposed method are that it can do the direct measurement and aware that the piezoelectric bender is not deformed as expected theoretically and faster than other surface measurement method. Then, this thesis control piezoelectric bender with MLSLI feedback to manipulate optical dispersion. And, compared to other optical dispersion manipulation method, the system this thesis constructed has some advantage as shown below: First, piezoelectric bender has larger displacement than normal deformable mirror, so it can have larger optical dispersion manipulation range. Second, because of property of piezo actuator the system has high response speed. Last, with MLSLI feedback, the system can have direct measurement of curvature of piezoelectric bender and estimate whether the shape of piezoelectric bender is parabolic surface. Although, piezo actuator has many advantages. Because of hysteresis and creep effect, it’s more difficult to deform bender to exactly the desired curvature. But, with the curvature information analyzed by MLSLI as feedback signal, the closed loop system can drive the piezoelectric bender to converge to the desired curvature providing the dispersion compensation.

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