隨著科技的進步與機械自動化的時代來臨，使得工具機在國防、航太、製造業等產業備受重用。如今，對於產品精度要求日益嚴苛，為了提升產品精度便需要更精密的加工機具，於是降低誤差源對加工機具精度的提升就更加重要。對工具機而言，在製造產品時，線性軸的定位精度對於工具機之加工精度有著決定性的影響，因此其量測技術變得相當重要。
目前產業界對於定位精度的校驗大多使用雷射干涉儀，本研究在於使用非干涉原理，來設計一種線性軸定位誤差量測方法及裝置。然而當線性軸有位移時，除了有定位誤差外，還會有其他自由度的誤差產生，因此本研究不僅提出一個簡易、全新定位誤差量測系統外，還可同時量測多個誤差等優勢。
量測系統包含架設於線性軸上之移動模組與架設於線性軸外之固定模組。其量測方法為雷射光從固定模組入射至移動模組，再依據幾何光學原理入射回固定模組，當移動模組隨著線性軸移動不同位置，產生不同姿態，造成入射感測器上的光斑重心位置產生變化，再透過光線追跡法與泰勒一階展開式求解線性軸之幾何誤差。

With the progress of science and technology, the market demand for machine tools is increasing. In order to achieve higher product quality, it is necessary to increase machining accuracy of machine tools. For a machine tool, the positioning error of the moving stage has a significant influence on machining accuracy. Therefore, the positioning error must be accurately identified .
A laser interferometer system is the most widely used instrument for positioning error calibration because of its accuracy, but there are some shortcomings for the standard procedure and method of measurement. In this thesis, a positioning error measurement system based on geometric optics rather than interference principle is provided. However, when the stage moves along the linear stage, there will produce other geometric errors besides the positioning error. Accordingly, the proposed measurement system is provided which can measure not only the positioning error but multi-degrees-of-freedom geometric errors of the linear stage simultaneously.
The proposed measurement system for the linear stage consists of a fixed module and a moving module. The fixed module is set outside the measured linear stage. The moving module is placed on the measured linear stage. A laser beam emitted from the fixed module hits the moving module and returns the position sensitive detectors (PSDs) on the fixed part. Through the movement of the linear stage, the laser beam will be deflected, and the PSDs can read the position changes, and the change in values can be utilized in the mathematical model. Finally, the geometric errors of the measured linear stage can be calculated.

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