在這篇論文中，非晶型氧化鋅錫ZTO薄膜沉積自不同的條件。根據不同的沉積條件，我們將這些薄膜應用於薄電晶體（TFTs），pH傳感器和葡萄糖生物傳感器，然後進行分析並討論他們的特性。
首先我們應用非晶氧化鋅錫薄膜做為主動層與二氧化矽做為閘極介電層來製作薄膜電晶體。經由改變氧氣流量，我們得到最佳氧氣的比例為百分之四。接著經由製程後退火，有效減少表面缺陷密度，使得特性變更好。最後為了最佳化氧化鋅錫薄膜電晶體，我們改變氧化錫及氧化鋅的製程功率進而改變錫的含量。此外，我們指出元素含量組成對元件電特性之影響，然後改善電特性的確切來源，並最佳化鋅錫薄膜中鋅和錫組成比例，以改善元件特性。從我們製做出的最佳氧化鋅錫薄膜電晶體可以得到場效遷移率18cm^2/Vs，臨界電壓0.5 V，次臨界擺幅0.227 V,電流開關比10^5。
在實驗第二部分，我們將氧化鋅錫薄膜用於pH傳感器。其量測特性取決於在不同pH下的循環伏安圖，而從我們的實驗可以發現氧化鋅錫薄膜對pH感測有良好的線性關係，從線性關係圖中我們計算出氧化鋅錫pH傳感器的靈敏度為-0.0689 μA/pH。
在實驗最後一部分，我們將氧化鋅錫薄膜應用於葡萄糖生醫感測器。雖然量測靈敏度並不好，但氧化鋅錫薄膜在葡萄糖感測上表現出良好的線性關係。其靈敏度不佳的原因可能是由於葡萄糖氧化酶和氧化鋅錫電極相距太遠，導致電荷沒有效傳輸。然而氧化鋅錫仍然是很有潛能的材料在應用於生醫感測上。

In this dissertation, amorphous zinc tin oxide ZTO thin films were fabricated at different kinds of conditions. According to the different deposited condition, we applied these thin films in thin film transistors (TFTs), pH sensors and glucose biosensors, and then analyzed and discuss their performance.
First, we apply ZTO thin film as channel layer to the fabrication of TFT with SiO2 gate dielectric. By varying the flow rate of oxygen, we found the optimal oxygen ratio was 4%. And then, by post-annealing, the interface traps density was reduced significantly, and exhibited better characteristic. Finally, to optimize the ZTO TFTs, we varied the SnO2and ZnO power to change the Sn content. Additionally, we report the effect of cation composition on the device performance of ZTO TFTs was investigated. Then, the exact origin of the improvement of electrical characteristics, and optimize the ratio of the Zn, and Sn fractions in ZTO thin films, in order to improve the performance of a device. From the best ZTO TFT we fabricated, it was found that the field-effect mobility was 18 cm^2/Vs, threshold voltage of 0.5V, subthreshold swing of 0.227V/decade and Ion/Ioff of 10^5.
In the second part of our experiment, we fabricated ZTO thin films for pH sensors. The sensing performance was determined by cyclic voltammetry curve at different pH value. It could be found that the ZTO pH sensor exhibited good linearship with pH value. The pH sensitivity calculated from the linear relation between the cyclic voltammetry current and the pH value was -0.0689 μA/pH.
The last part of our experiment, we used the zinc tin oxide thin films as glucose biosensors. Although the measurement sensitivity was not good, ZTO thin films exhibited good linear relationship with glucose detection. The poor sensitivity could be attributed that the far distance between GOD and ZTO electrode, the charge carriers could not transfer availably. However, ZTO was still a potential material for biosensing application.

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